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  2. Testing, Analysis and Measurement
  3. 一般財団法人材料科学技術振興財団 MST
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一般財団法人材料科学技術振興財団 MST

EstablishmentAugust 1, 1984
addressTokyo/Setagaya-ku/Kitaomi 1-18-6
phone03-3749-2525
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last updated:Apr 10, 2026
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一般財団法人材料科学技術振興財団 MST Product Lineup

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Mass spectrometry Mass spectrometry
 【分析事例】高分子材料 【分析事例】高分子材料
【測定法】計算科学・AI・データ解析 【測定法】計算科学・AI・データ解析
Photoelectron spectroscopy Photoelectron spectroscopy
[Measurement Method] Electron Microscopy Observation and Analysis [Measurement Method] Electron Microscopy Observation and Analysis
Vibrational spectroscopy Vibrational spectroscopy
Measurement Method: X-ray Diffraction Related Measurement Method: X-ray Diffraction Related
[Measurement Method] Related to SPM [Measurement Method] Related to SPM
Measurement Method: Failure Analysis Measurement Method: Failure Analysis
[Measurement Method] Other Measurement Methods [Measurement Method] Other Measurement Methods
Processing methods and treatment methods Processing methods and treatment methods
Other services and support information Other services and support information
[Analysis Case] LSI・Memory [Analysis Case] LSI・Memory
[Analysis Case] Optical Devices [Analysis Case] Optical Devices
[Analysis Case] Solar Cells [Analysis Case] Solar Cells
[Analysis Case] Fuel Cell [Analysis Case] Fuel Cell
[Analysis Case] Display [Analysis Case] Display
[Analysis Case] Oxide Semiconductors [Analysis Case] Oxide Semiconductors
[Analysis Case] Power Device [Analysis Case] Power Device
[Analysis Case] Electronic Components [Analysis Case] Electronic Components
[Analysis Case] Secondary Battery [Analysis Case] Secondary Battery
[Analysis Case] Lighting [Analysis Case] Lighting
[Analysis Case] Manufacturing Equipment and Components [Analysis Case] Manufacturing Equipment and Components
[Analysis Case] Biotechnology [Analysis Case] Biotechnology
[Analysis Case] Cosmetics [Analysis Case] Cosmetics
[Analysis Case] Food [Analysis Case] Food
[Analysis Case] Pharmaceuticals [Analysis Case] Pharmaceuticals
[Analysis Case] Medical Devices [Analysis Case] Medical Devices
Analysis Case: Daily Necessities Analysis Case: Daily Necessities
[Analysis Case] Environment [Analysis Case] Environment
[Analysis Case] Others [Analysis Case] Others
Materials from the exhibition where MST exhibited. Materials from the exhibition where MST exhibited.
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[Analysis Case] Imaging of the Cuticle

It is possible to evaluate the distribution of components in the hair cuticle!

Our organization offers imaging of cuticles. The evaluation of cuticles has been limited to structural observation using electron microscopy due to their fine structure, and detailed component distribution has remained unclear. By using TOF-SIMS, which can evaluate the distribution of inorganic and organic materials at the sub-micron level, it is possible to assess the distribution of various components within the cuticle. This document presents the results of evaluating hair and visualizing the component distribution within the cuticle. [Measurement and Processing Method] ■ [TOF-SIMS] Time-of-Flight Secondary Ion Mass Spectrometry *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Evaluation of Composition Distribution of Organic Films by Raman Mapping

It is possible to visualize the in-plane distribution of organic components (inorganic components can also be included)!

Our organization offers composition distribution evaluation of organic films using Raman mapping. The properties such as mechanical characteristics, thermal resistance, and durability change by mixing materials. It is important to link material properties with mixing conditions in material development, and using dispersion as an indicator is effective. This document presents a case study of mapping the distribution of PS (polystyrene) and PCL (polycaprolactone) using Raman. By comparing the characteristic Raman peaks of each material, it is possible to separate the components of the mixture. Component separation from PCL was performed through spectral analysis around the PS-specific peak at approximately 3050 cm-1. [Measurement Method / Processing Method] ■ [Raman] Raman Spectroscopy *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Evaluation of Crystallinity of Carbon Materials Using Raman Mapping

It is possible to visualize the in-plane distribution of materials and crystallinity non-destructively!

Our organization offers evaluation of the crystallinity of carbon materials using Raman mapping. Carbon materials possess different properties depending on their structure and crystallinity, and are used in various applications such as industrial components and medical devices. Linking the characteristics of materials to their crystallinity is effective as an indicator for material development. This document presents a case study where the in-plane distribution (peak intensity) of diamond particles, a carbon material applied to the surface of components, and the crystallinity (full width at half maximum) of each diamond particle were evaluated using Raman mapping. Diamonds exhibit a sharp peak observed sensitively at 1330 cm-1, making Raman evaluation effective. [Measurement Method / Processing Method] ■ [Raman] Raman Spectroscopy *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Precursor Adsorption Simulation in ALD Film Formation

Information on the activation energy and reaction heat during precursor adsorption on the substrate can be obtained!

Our organization is conducting simulations of precursor adsorption in ALD film deposition using first-principles calculations. ALD (Atomic Layer Deposition) is a film deposition technology that utilizes continuous chemical reactions in the gas phase. It is widely used in the semiconductor field, where fine processing is required, due to its ability to precisely control film thickness, operate at low temperatures, and provide good step coverage. In general, to understand the differences in film deposition rates between different substrates in the slow deposition process of ALD, it is necessary to elucidate the precursor adsorption mechanisms on the substrate. [Measurement Methods and Processing Techniques] ■ Computational Science, AI, Data Analysis *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] (S)TEM Observation of Polymer Materials Using Electronic Staining

We will introduce examples of observing polymer materials using SEM-STEM and (S)TEM!

Our organization offers (S)TEM observation of polymer materials using electron staining. Since polymer materials are composed of light elements, it is difficult to obtain clear contrast in (S)TEM observations. Staining can enhance the contrast for such materials. This document introduces examples of staining and observation using a method called electron staining with ruthenium tetroxide (RuO4), osmium tetroxide (OsO4), and phosphotungstic acid (H3[P(W3O10)4]·xH2O, abbreviated as PTA). [Measurement and Processing Methods] ■ [(S)TEM] (Scanning) Transmission Electron Microscopy ■ Others *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] (S)TEM Observation by Negative Staining

Examples of morphological observation of liposomes, CNF, microparticles, proteins, etc.!

Our organization offers (S)TEM observation using negative staining. Organic functional materials, such as fine particles and fibrous substances, are primarily composed of light elements like C (carbon), H (hydrogen), O (oxygen), and N (nitrogen), which do not provide sufficient contrast for morphological observation in (S)TEM. Therefore, by applying staining to these materials, we can enhance the contrast and enable observation. In this instance, we will introduce a case where negative staining was performed using phosphotungstic acid (H3[P(W3O10)4]·nH2O, abbreviated as PTA). 【Measurement Method / Processing Method】 ■ [(S)TEM] Scanning Transmission Electron Microscopy ■ Others *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Fine Structure of Hair Cross-Section (S)TEM Analysis

We will introduce examples of observations of hair cell membrane complexes (CMC)!

Our organization offers (S)TEM analysis of the fine structure of hair cross-sections. The hair cell membrane complex (CMC) serves as a pathway for chemicals during processes such as bleaching and dyeing hair. In particular, the CMC between the cuticle layers has a three-layer structure, which we have visualized. We present a case where osmium tetroxide (OsO4) was used for electron staining targeting unsaturated fatty acids in lipids, followed by TEM observation and STEM-EDX analysis. [Measurement and Processing Methods] ■ [(S)TEM] Scanning Transmission Electron Microscopy ■ [TEM-EDX] Energy Dispersive X-ray Spectroscopy (TEM) ■ Ultramicrotome processing ■ Others *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Oil Analysis (GC/MS Edition)

When oil contamination is suspected, it is possible to distinguish between types of oil and estimate the source!

Our organization is capable of identifying the composition of petroleum products, evaluating molecular weight distribution, and distinguishing types of oils. Petroleum products such as oils and greases are mixtures of hydrocarbons with various compositions, and GC/MS methods are effective for their qualitative analysis. Here, we present a case study where commercially available oils with different molecular weight distributions were measured using soft ionization methods. Compared to hard ionization methods (EI), soft ionization methods (FI and FD) allow for the detection of molecular ions, making them effective for evaluating the composition of oil components. In particular, the FD method can also be applied to evaluate oils containing high molecular weight components that are difficult to volatilize. [Measurement Method / Processing Method] ■ [GC/MS] Gas Chromatography Mass Spectrometry *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] NMR Chemical Shift Simulation of Organic Molecules

It is possible to identify structural isomers through analysis that combines measurement and calculation!

Our organization conducts NMR chemical shift simulations of organic molecules using quantum chemical calculations. Determining the isomeric structures of organic molecules is a very important issue in fields such as natural product chemistry and drug discovery. Combining the results of nuclear magnetic resonance (NMR) measurements with NMR chemical shift simulation results from quantum chemical calculations is believed to be useful for elucidating the structures and evaluating the properties of novel compounds that lack model compounds for structure-chemical shift correlation. This document presents a case study on the identification of structural isomers of biologically active quinoxaline derivatives. [Measurement Methods and Processing Methods] ■ [NMR] Nuclear Magnetic Resonance Analysis ■ Computational Science, AI, Data Analysis ■ Others *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Structural Analysis of End Groups of Polycarbonate

End groups of polycarbonate can be distinguished by the manufacturing method using thermal decomposition GC/MS!

Our organization offers analysis of the end group structure of polycarbonate. Polycarbonate is an engineering plastic known for its excellent impact resistance and heat resistance, and it is widely used as a material in electrical, electronic, and optical devices. There are mainly two methods of manufacturing polycarbonate, and the end group structure, which affects the physical properties of the polymer, varies depending on the manufacturing method. Since the end group portion of the polymer is small compared to the main chain, the analytical methods available for its structural analysis are limited. Here, we present a case study evaluating the end group structure of polycarbonate using thermal decomposition GC/MS. [Measurement Method / Processing Method] ■ [GC/MS] Gas Chromatography Mass Spectrometry *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Energy Profile of Li Ion Insertion/Extraction Process

Information on the energy barrier during Li-ion de-insertion and the solvent formation process can be obtained!

Our organization provides the energy profile of the Li-ion insertion and extraction process in LIB anodes/electrolytes using the ESM-RISM method. During the charge and discharge processes of lithium-ion secondary batteries (LIB), various phenomena occur near the interface with the electrolyte and the anode, including the formation of solvation, desolvation, the formation of the electric double layer, and the insertion and extraction of Li ions. This document introduces a case study that evaluates the energy profile and solvation structure during the Li-ion insertion and extraction process from graphite anodes using the hybrid ESM-RISM method, which combines Effective Screening Medium (ESM) and Reference Interaction Site Model (RISM) through simulation. [Measurement and Processing Methods] ■ Computational Science, AI, Data Analysis *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Observation of Structural Changes in ABS Resin through Tensile Testing

Monitor three-dimensional structural changes! It is possible to observe the three-dimensional structure under load applied to the sample.

Our organization conducts observations of structural changes in ABS resin through tensile testing using in situ X-ray CT. In in situ X-ray CT measurements, it is possible to perform structural observations while applying a load (tensile or compressive) to the sample. In this case, X-ray CT measurements were conducted on a sample of ABS resin containing glass filler under tensile load, and the tensile stress applied to the sample was calculated. The three-dimensional structural changes of the resin and glass filler under each stress condition were monitored. [Measurement Method / Processing Method] ■ X-ray CT Method *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Metal Analysis in Organic Materials

Microwave decomposition combined with ICP-MS! Metal analysis in organic materials is possible.

Our organization conducts metal analysis in organic materials. Metal components can cause a decrease in insulation properties when they contaminate organic materials, such as in semiconductor devices. Therefore, it is important to understand the amount of metal in organic materials. In this case, we analyzed the metal content in organic materials (polyethylene products, polypropylene products, polyimide films). Organic materials can be acid-digested by irradiating them with microwaves in a sealed state (under high temperature and pressure). [Measurement Method / Processing Method] ■ [ICP-MS] Inductively Coupled Plasma Mass Spectrometry *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Evaluation of Binding States in Secondary Battery Cathodes

You can evaluate the sample in its original state, from the binder and coating to the active substance.

Our organization conducts evaluations of the bonding state of cathodes in secondary batteries. X-ray photoelectron spectroscopy (XPS), which is one of the methods for analyzing surface states, is suitable for evaluating binders and conductive additives due to its shallow detection depth (approximately 10 nm). Hard X-ray photoelectron spectroscopy (HAXPES), which uses hard X-rays (Ga rays) for excitation, allows us to obtain information about active materials buried under binders without causing damage, thanks to its deeper detection depth. 【Measurement and Processing Methods】 ■ [XPS] X-ray Photoelectron Spectroscopy ■ [HAXPES] Hard X-ray Photoelectron Spectroscopy ■ Processing under controlled atmosphere *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Analysis of Thermal Decomposition Reactions of Ionic Liquids through Quantum Chemical Calculations

Reactivity can be evaluated from the activation energy values obtained from the simulation!

Our organization conducts analyses of the thermal decomposition reactions of ionic liquids using quantum chemical calculations. Since ionic liquids are often used at high temperatures for extended periods, understanding their reactivity, such as thermal decomposition, is essential. We will introduce examples of evaluating the likelihood of thermal decomposition reactions of ionic liquids through quantum chemical calculations. 【Measurement Methods and Processing Methods】 ■Computational Science, AI, Data Analysis *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Evaluation of Molecular Permeability to Lipid Bilayers through Molecular Dynamics Calculations

Insights into the permeability of molecules can be obtained from free energy calculations!

Our organization conducts evaluations of molecular permeability to lipid bilayers using molecular dynamics simulations. The free energy obtained from molecular dynamics calculations is an important value that contributes not only to predicting the stability of the system but also to understanding the material distribution and transport phenomena in systems with spatial and temporal fluctuations. For example, it is effective in gaining insights into the permeability of molecules across biological membranes. Using lipid bilayers in aqueous solvents as an example, we will introduce a case where the permeability of molecules in the membrane was discussed based on the free energy values when benzene and carbon dioxide were transported. [Measurement Methods and Processing Techniques] ■ Computational Science, AI, Data Analysis *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Calculation of Acid Dissociation Constant (pKa) Using Quantum Chemistry Calculations

It is possible to predict the pKa of compounds with unknown pKa based on calibration curves created for each solvent and functional group!

Our organization conducts calculations of acid dissociation constants (pKa) using quantum chemistry. The acid dissociation constant (pKa) is one of the indicators that quantitatively represents the strength of an acid (the ease of proton dissociation). Knowing the pKa helps in estimating the solubility of compounds in relation to pH, their state, the ease of absorption of pharmaceuticals in the body, and pH buffering effects. Using the acid dissociation energy differences obtained from quantum chemical calculations and experimental pKa values, we create calibration curves for different solvents and functional groups, and present examples of studies investigating the impact of intramolecular hydrogen bonding on pKa. [Measurement Methods and Processing Methods] ■ Computational Science, AI, Data Analysis *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Evaluation of Hierarchical Structure of Polymer Materials Using X-ray Diffraction and Scattering Techniques

Structural analysis of lamellae and similar structures is possible! Similar evaluations can be performed using WAXS (Wide-Angle X-ray Scattering).

Our organization conducts evaluations of the hierarchical structure of polymer materials using X-ray diffraction and scattering techniques. It is known that the differences in higher-order structures created by amphiphilic substances affect the moisturizing and permeability properties of skin tissue, making it important to understand these structures in order to evaluate the functionality of the materials. We will introduce examples of evaluating the hierarchical structure of polymers using XRD (X-ray diffraction) for structures on the order of a few nanometers and SAXS (small-angle X-ray scattering) for structures on the order of several tens of nanometers. 【Measurement and Processing Methods】 ■ [XRD] X-ray Diffraction ■ [SAXS] Small-Angle X-ray Scattering *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Imaging of Lipids

Imaging of lipids in mouse testis! Introducing cases measured with TOF-SIMS and MALDI-MS.

Our organization conducts lipid imaging. TOF-SIMS excels in low-mass components and enables imaging with high spatial resolution. On the other hand, MALDI-MS specializes in high-mass components and offers a wide variety of lipids that can be imaged. Here, we present examples of measurements taken with TOF-SIMS and MALDI-MS, using lipid imaging mass spectrometry results from mouse testes as a case study. [Measurement Methods] ■ [TOF-SIMS] Time-of-Flight Secondary Ion Mass Spectrometry ■ [MALDI-MS] Matrix-Assisted Laser Desorption Ionization Mass Spectrometry *For more details, please download the PDF or feel free to contact us.

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Analysis case: Assignment of the Raman spectrum of copper phthalocyanine.

By combining actual measurements and simulations, detailed peak attribution is possible!

Our organization is conducting the assignment of the Raman spectrum of copper phthalocyanine through quantum chemical calculations. By comparing the measured results with the simulation results from quantum chemical calculations, we can perform spectral assignment, which allows for the analysis of vibrational modes. Here, we will introduce a case study of the analysis of "copper phthalocyanine," which is also expected to be utilized in organic thin-film transistors and other applications. 【Measurement and Processing Methods】 ■ [Raman] Raman Spectroscopy ■ Computational Science, AI, Data Analysis *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Investigation of Product Deterioration through Weather Resistance Testing

It is possible to reproduce the deterioration state using the Sunshine Weather Meter!

Our organization conducts product degradation investigations through weather resistance testing. The Sunshine Weather Meter can artificially reproduce sunlight, temperature, humidity, and other conditions. We conducted weather resistance testing standards for bicycle lights and examined changes over time. To quantitatively discuss the discoloration of lights that are originally black, we refer to (JIS D 0205) and present a case study evaluating color difference and glossiness. 【Measurement Methods and Processing Methods】 ■Others ■Weather Resistance Testing *For more details, please download the PDF or feel free to contact us.

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Analysis Case: Analysis of Defect Levels in Gallium Nitride

You can obtain various physical property information such as point defect formation energy, charge, and optical transitions!

Our organization conducts an analysis of defect levels in wide bandgap semiconductor gallium nitride (GaN) using first-principles calculations. Gallium nitride (GaN), a wide bandgap semiconductor, is primarily used in the field of power devices, and in recent years, there has been an increasing demand for applications such as rapid chargers and 5G communication base stations. Here, we present a case study analyzing the defect levels formed by nitrogen vacancies (VN) in GaN using first-principles calculations. [Measurement and Processing Methods] ■ [PL] Photoluminescence Method ■ Computational Science, AI, Data Analysis *For more details, please download the PDF or feel free to contact us.

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[Presentation] Surface analysis applicable in various fields! TOF-SIMS Analysis Case Studies

From inorganic to organic materials, leave high-sensitivity surface analysis to us!

TOF-SIMS analysis allows for detailed examination of the sample's outermost surface, as well as the ability to obtain information in the depth direction, making it possible to understand the distribution of components within the material. Additionally, imaging can visualize the spatial distribution of components. This document includes case studies of products analyzed from various fields. Please feel free to contact us!

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[Analysis Case] HF Etching Simulation of a-SiO2 Film

Effective for understanding surface reactions at the atomic level in the etching process.

With the miniaturization of semiconductor processes, the importance of surface reactions due to etching gases, precursors in ALD film formation, and plasma treatments is increasing. For systems involving complex chemical reactions such as etching, changes in surface bonding states, and defect generation, analysis using molecular dynamics calculations is effective for understanding phenomena at the atomic level. This document evaluates the HF etching reaction of a-SiO2 using molecular dynamics calculations. A similar approach can be applied to various reactions and materials.

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[Analysis Case] Diamond Evaluation Case Using SIMS

It is possible to quantitatively evaluate impurity elements and assess film thickness.

Diamonds possess excellent physical properties such as high breakdown electric fields, making them promising materials for next-generation power devices and quantum devices. By doping diamonds with impurity elements, they can function as high-performance semiconductors. To understand the concentration distribution of the doped elements, SIMS analysis, which can detect impurities in the ppb to ppm range with high sensitivity, is effective. Additionally, it is possible to evaluate the film thickness of each layer from the impurity concentration distribution. MST offers a variety of diamond standard samples and can quantify over 30 different elements.

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[Analysis Case] CO2 Adsorption Simulation on MOF using GCMC Method

The adsorption properties of nano-porous materials such as MOF and zeolite can be predicted!

MOFs (Metal-Organic Frameworks) are attracting attention as nano-porous materials with potential applications in separation processes, catalysis, and gas storage. The combinations of MOF topology, linkers, and metal nodes are vast, and the types of synthesizable MOFs are virtually limitless. Therefore, prior screening and understanding of the structure, function, and properties are crucial for the development of new MOF materials. In this case study, we predicted the CO2 adsorption amounts for various MOFs using the GCMC (Grand Canonical Monte Carlo) method and examined the factors affecting the adsorption characteristics.

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[Analysis Case] Depth Direction State Evaluation of Tin (Sn) Surface

Evaluation of modified layers and altered layers through surface treatment is possible!

TOF-SIMS has good depth resolution and can obtain fragment ions corresponding to bonding states, allowing for the evaluation of layer structures near the surface, within a few nanometers. This document presents a case study analyzing the layer structure of a tin plate surface based on the information obtained from the measurement of standard samples of tin oxide and hydrated tin oxide. By applying this technology, it is possible to evaluate modified layers and altered layers due to surface treatment.

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[Analysis Case] Evaluation of Bacterial Count by Real-Time PCR Method

We will analyze the bacteria in the sample from DNA without isolation or cultivation!

The measurement of bacterial counts conducted in food bacterial testing is calculated by culturing and counting the number of colonies. However, this method requires time for culturing and cannot evaluate difficult-to-culture bacteria. On the other hand, the real-time PCR method allows for the direct extraction of DNA from samples without culturing, enabling the investigation of the quantity of the target bacteria (DNA copy number). This document presents a case study comparing the bacterial counts obtained through culturing the easily cultured Escherichia coli and the copy numbers measured using the real-time PCR method.

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[Analysis Case] Vapor Pressure Calculation of Ga-containing Precursor by Molecular Dynamics Simulation

Effective for predicting the vapor pressure of metal complexes used as precursors in ALD and CVD!

ALD (Atomic Layer Deposition) is a method that allows for uniform film formation at the atomic layer level, even for high aspect ratio structures, and is being focused on as a useful technique for the miniaturization, integration, and fine wiring of semiconductors. Since it is a vapor-phase deposition method that utilizes the "adsorption saturation of precursors on the growth surface," high vapor pressure precursors are required to improve the coverage rate of precursors on the substrate and the deposition rate. This document predicts the vapor pressures of various Ga-containing precursors through molecular dynamics calculations and compares them with experimental values.

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[Analysis Case] Internal Structure Evaluation of Battery Components Using Nano-CT

Observe the fine structure inside the sample in three dimensions with a spatial resolution of 100 nm!

Nano-CT is a type of X-ray CT that uses synchrotron radiation as a source and allows for three-dimensional observation of the internal structure of samples with a spatial resolution of about 100 nm. This document presents a case study that visualizes the internal structure of battery components sealed in laminate film. Through nano-CT measurements, it is possible to confirm the fine structures and cracks of active materials that could not be captured by conventional micro-CT (spatial resolution of 1 μm or more).

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[Analysis Case] Investigation of Foreign Object Occurrence: Analysis of the Tube

It is possible to estimate the cause of wafer contamination!

TOF-SIMS is a very effective method for investigating the causes of contamination due to foreign substances, deposits, dirt, discoloration, and other factors related to the process. By comparing the mass spectral information obtained from contamination such as foreign substances with the mass spectral information of candidate contamination source components, it is possible to infer the sources of that contamination. In this document, we prepared four types of resin tubes used in the wafer manufacturing process and foreign substances on Si wafers, and by comparing their mass spectral information, we evaluated which components used in the process the contamination from the foreign substances was attributed to.

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[Analysis Case] Contamination Analysis in Vacuum Equipment

It is possible to evaluate the causes of contamination in vacuum devices, such as oil backs and grease!

Vacuum devices that utilize the characteristic of low gas molecular density in a space are used in various applications such as thin film formation and surface analysis in the manufacturing process of electronic components. Since the chamber of a vacuum device is a closed space, the presence of trace amounts of molecules can easily cause contamination within the device. To suppress contamination, it is necessary to conduct investigations to identify contamination sources such as pumps, devices, and samples. This document presents a case study investigating contamination within a vacuum device using TOF-SIMS.

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[Analysis Case] Evaluation of Surface Components of Fur

It is possible to quantify the surface condition through surface analysis of animal fur (coat)!

The surface of human hair (hair) is covered with a lipid called 18-methyl eicosanoic acid (18-MEA). The surface of animal fur (coat) is believed to contain various lipids secreted from sebaceous glands, not limited to 18-MEA. Additionally, a decrease in linoleic acid has been reported in the sebum of animals with skin diseases. Therefore, simultaneously analyzing the representative lipid 18-MEA along with several other components is useful for understanding the condition of the hair. This document presents the results of evaluating the differences in lipids for each type of animal (pet) using TOF-SIMS.

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[Analysis Case] Competitive Adsorption Analysis of SMI and TMA on Cu_C0743

It is possible to evaluate the competitive adsorption of multiple molecules using the focus parameters for film formation (temperature, pressure).

In area-selective atomic layer deposition (AS-ALD), small molecule inhibitors (SMIs) control the surface selectivity of precursor adsorption on the substrate surface. SMIs prevent unwanted deposition on the non-growth surfaces of the substrate and play a crucial role in thin film formation during the deposition process. In this case study, we used the Grand Canonical Monte Carlo (GCMC) method to predict the competitive adsorption amounts of SMIs (aniline, pyridine) and TMA (trimethylaluminum) as single and double molecular species on the Cu(111) surface. This analysis is effective for evaluating adsorption characteristics, including the steric effects of the molecules.

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[Analysis Case] Evaluation of Ion Diffusion Behavior through Molecular Dynamics Calculations

It is possible to predict and evaluate the diffusion behavior of ions by changing the composition and temperature.

Measurement Method: Computational Science, AI, Data Analysis Product Field: Secondary Batteries Analysis Purpose: Thermal Property Evaluation

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[Analysis Case] Evaluation of Solution Components Before and After Adsorption and Zeolite Structure

We capture the ion exchange process from the ion content in the solution and the structural changes of the adsorbent.

Zeolites are porous crystalline aluminosilicates with fine pores of a few nanometers, widely used as adsorbents for molecular adsorption in fine pores and cation exchange within the crystal for water treatment. Due to the freedom of design, they can be tailored to specific purposes; however, evaluating whether the performance aligns with the design requires an assessment from both a macroscopic perspective of water components and a microscopic perspective of the adsorbent's fine structure. This analysis presents a case study of an immersion experiment of zeolite in ammonia water, capturing the changes in ion content in the water before and after immersion, as well as the structural changes in the zeolite.

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SIMS (Secondary Ion Mass Spectrometry)

This is a method for qualitative and quantitative analysis of components contained in a sample by detecting secondary ions and measuring the detection amount at each mass.

When ions are incident on the sample surface, various particles such as electrons, neutral particles, and ions are emitted from the sample surface. SIMS is a technique that detects these ions and measures the detection quantity at each mass to perform qualitative and quantitative analysis of the components contained in the sample. - High sensitivity (ppb to ppm) - Analysis of all elements from H to U is possible - Wide detection concentration range (from major component elements to trace impurities) - Quantitative analysis using standard samples is possible - Depth direction analysis is possible - Evaluation with depth direction resolution of a few to several tens of nm is possible - Measurement of micro-regions up to a few micrometers in size is possible - Isotope analysis is possible - Destructive analysis

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(S)TEM (Scanning Transmission Electron Microscopy)

Elemental analysis, state evaluation, particle size analysis, and acquisition of three-dimensional structural images at the nanoscale.

TEM (Transmission Electron Microscopy) is a method that involves irradiating a thin sample with an electron beam, imaging the electrons that have passed through or scattered from the sample, and observing it at high magnification. ■ Advantages - Enlarged images can be obtained with sub-nanometer spatial resolution, allowing for the observation and analysis of the sample's fine structure and lattice defects. - It is possible to evaluate the crystallinity of the sample and identify materials. - By fabricating samples using FIB (Focused Ion Beam), it is possible to observe specific locations within a device with pinpoint accuracy. - By combining optional features, it is also possible to analyze the composition and state of localized areas. ■ Disadvantages - It is necessary to thin the sample (in some cases, thinning may be difficult for certain samples). - It does not observe individual atoms but rather displays average information in the thickness direction of the sample (typically about 0.1 μm thick). - Sample processing and observation may lead to alteration or deformation of the sample.

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[XPS] X-ray Photoelectron Spectroscopy

Effective for evaluating the types, quantities, and chemical bonding states of elements on the sample surface (at a depth of about several nanometers).

XPS is a technique that measures the kinetic energy distribution of photoelectrons emitted by X-ray irradiation, providing insights into the types, quantities, and chemical bonding states of elements present on the sample surface (to a depth of about a few nanometers). Because it can provide information about chemical bonding states, it is also known as ESCA: Electron Spectroscopy for Chemical Analysis. - Qualitative and quantitative analysis of elements on solid surfaces (approximately 2 to 8 nm) is possible. - Chemical bonding state analysis is possible. - Non-destructive analysis is possible. - Measurement of depth distribution (using ion sputtering) is possible. - Measurement of insulators is possible. - Measurement under controlled atmospheres is possible.

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Scanning Electron Microscopy (SEM)

High magnification observation (up to about 300,000 times) is possible.

SEM is a technique that allows for obtaining contrast based on the information from electrons emitted from a sample when an electron beam is directed at it, revealing the sample's surface roughness and compositional differences. - High magnification observation (up to about 500,000 times) is possible with simple operation. - Observation of secondary electron (SE) images, backscattered electron (BSE) images, and transmitted electron (TE) images is possible. - Observation can be conducted within an acceleration voltage range of 0.1 to 30 kV. - Samples up to 6 inches can be loaded into the device (depending on the equipment). - By combining options with SEM, various types of information can be obtained: - Elemental analysis using an EDX detector is possible. - Measurement of electron beam induced current (EBIC) allows for evaluation of the junction position and shape in semiconductors. - Crystal information can be obtained using electron backscatter diffraction (EBSD) method. - Three-dimensional structural information can be acquired through repeated FIB processing and SEM observation (Slice & View). - Cooling observation and atmosphere-controlled observation are available.

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[AES] Auger Electron Spectroscopy

By measuring the kinetic energy distribution of Auger electrons emitted by electron beam irradiation, insights can be gained regarding the types and quantities of elements present on the sample surface.

- Qualitative and quantitative analysis of solid material surfaces (depth of several nm) is possible. - Qualitative and quantitative analysis of micro-regions (approximately tens of nm to sub-micron) is possible. - Depth profile analysis, line analysis, and area analysis of major component elements can be measured. - For several elements such as Si and Al, evaluation in both oxide and metallic states is possible. - Identification of specific areas of interest using SEM images is possible.

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X-ray diffraction method

XRD is a method for obtaining information about the crystal structure of a sample from its diffraction pattern.

- Identification of crystalline substances is possible - Evaluation of crystal size (from a few nm to 100 nm) is possible - Evaluation of crystallinity is possible - Evaluation of orientation is possible - Evaluation of strain and stress is possible - Non-destructive analysis is possible Features of the equipment - Heating analysis is possible from room temperature to 1100°C - Micro-area measurement with a beam diameter of up to 100 μm is possible - Atmosphere control is possible with N2, He, Ar, and vacuum

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[EBSD] Electron Backscatter Diffraction Method

It is possible to easily obtain crystal information over a wide area.

This is a method for orientation analysis of crystalline samples using EBSD. It allows for easier and broader acquisition of crystal information compared to electron diffraction methods. EBSP: Electron Backscatter Pattern, also referred to as SEM-OIM or OIM. - Measurement of the surface orientation of single crystal grains is possible. - Orientation measurement of the measurement area is possible. - Observation of crystal grain size is possible. - Observation of twin grain boundaries (corresponding grain boundaries) is possible. - Extraction of specific crystal orientations is possible. - Measurement of the rotation angle of adjacent crystal grains is possible. - Evaluation of grains larger than 10 nm is possible using transmission methods.

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[LC/MS] Liquid Chromatography Mass Spectrometry

It is an analytical method that detects ions with a detector and performs qualitative and quantitative analysis.

Liquid chromatography (LC) is classified as a type of chromatographic method that separates components of a liquid sample based on chromatographic principles. The detection of the separated components using a mass spectrometer is referred to as liquid chromatography-mass spectrometry (LC/MS). LC/MS is an analytical technique for the qualitative and quantitative analysis of organic compounds. - Effective for analyzing components with relatively large molecular weights or relatively high polarity. - By selecting the ionization method, it can accommodate thermally unstable substances and others. - There are various ionization methods available, allowing detection using the most suitable ionization method for the component (Electrospray Ionization (ESI), Atmospheric Pressure Chemical Ionization (APCI), Atmospheric Pressure Photoionization (APPI)). - High mass resolution can be achieved using mass spectrometers that utilize the Time-of-Flight method.

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Atomic Force Microscopy (AFM) method

Three-dimensional measurement of nanoscale surface roughness.

AFM is a method that scans the surface of a sample with a fine probe and measures nanoscale surface topography in three dimensions. - It can measure a wide range of samples, from insulators to soft organic materials, including metals, semiconductors, and oxides. - By using tapping mode with low contact pressure, it is possible to minimize sample damage.

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