List of Evaporation Equipment products

  • classification:Evaporation Equipment

46~90 item / All 207 items

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Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

  • PRエリア.png
  • Other conveying machines

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Strong cold wind from room temperature to -13°C! Depending on the usage environment, you can choose between the combo type or the separate type!

  • Cooling system

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April 10, 2024 (Wednesday) to April 12, 2024 (Friday) Notice of Participation in Nagoya Manufacturing World 2024

Sanwa Shiki Ventilator Co., Ltd. will be exhibiting at the 2024 Monozukuri World (Nagoya) held at Port Messe Nagoya. We will also be showcasing our large cooling fans and cool/warm ambient products. Date: April 10, 2024 - April 12, 2024 Opening: 10:00 AM Location: Nagoya Port Messe (Exhibition Hall 1) *Our booth: 19-1 We would be grateful if you could visit us if you have the time.

TELEMARK Electronic Gun Series

  • Other surface treatment equipment
  • Vacuum Equipment
  • Evaporation Equipment

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Leave vacuum deposition, such as electron guns for evaporation, to us.

  • Vacuum Equipment
  • Other physicochemical equipment
  • Evaporation Equipment

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We provide the ideal ion source for ion assist deposition.

  • Evaporation Equipment
  • Other physicochemical equipment
  • Vacuum Equipment

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It is a high-performance vacuum deposition source that can be used as a high-temperature heating cell for vacuum applications, with an organic deposition source up to 800°C and a metal deposition sour...

  • Evaporation Equipment
  • Heating device
  • Electric furnace

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BHS-series_iPROS-1.jpg

BH Series [UHV Compatible Ultra-High Temperature Vacuum Thin Film Experiment Substrate Heater] Max 1800℃

It can be applied to various vacuum thin film experiments such as PVD (sputtering, evaporation, EB, etc.), CVD, high-temperature vacuum annealing, and high-temperature sample analysis substrate stages. We offer custom-made solutions to meet various specifications. 【Features】 ● Semi-custom product. Designed and manufactured according to your requests. ● Easy replacement of the auxiliary heater wire. ● Easy installation and maintenance (M6 stud bolts, supports). ● Compatible with RF/DC bias and substrate rotation. 【Standard Accessories】 ● Thermocouple: wire type with alumina insulating sleeve. ● Mounting stud bolts. 【Options】 ● RF (150W)/DC (1KW) bias application. ● Non-standard heater wires (Nb, Mo, Pt/Re, WRe, etc.). ● Substrate holding clips. ● Mounting brackets. ● Substrate holders. ● Tapped holes for holder installation. ● Change of top plate material (PBN, quartz, carbon, Inconel, etc.). ● Additional thermocouples for overheating. ● Base flange and vacuum feedthrough.

Introduction of various experimental devices for research and development in semiconductors, electronic devices, fuel cells, displays, and thin film experiments.

  • Sputtering Equipment
  • Evaporation Equipment
  • Annealing furnace

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BHS-series_iPROS-1.jpg

BH Series [UHV Compatible Ultra-High Temperature Vacuum Thin Film Experiment Substrate Heater] Max 1800℃

It can be applied to various vacuum thin film experiments such as PVD (sputtering, evaporation, EB, etc.), CVD, high-temperature vacuum annealing, and high-temperature sample analysis substrate stages. We offer custom-made solutions to meet various specifications. 【Features】 ● Semi-custom product. Designed and manufactured according to your requests. ● Easy replacement of the auxiliary heater wire. ● Easy installation and maintenance (M6 stud bolts, supports). ● Compatible with RF/DC bias and substrate rotation. 【Standard Accessories】 ● Thermocouple: wire type with alumina insulating sleeve. ● Mounting stud bolts. 【Options】 ● RF (150W)/DC (1KW) bias application. ● Non-standard heater wires (Nb, Mo, Pt/Re, WRe, etc.). ● Substrate holding clips. ● Mounting brackets. ● Substrate holders. ● Tapped holes for holder installation. ● Change of top plate material (PBN, quartz, carbon, Inconel, etc.). ● Additional thermocouples for overheating. ● Base flange and vacuum feedthrough.

Composite thin film experimental device nanoPVD-ST15A capable of mixed installation of vacuum deposition (metal and organic deposition sources) and sputtering cathodes.

  • Sputtering Equipment
  • Evaporation Equipment

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BHS-series_iPROS-1.jpg

BH Series [UHV Compatible Ultra-High Temperature Vacuum Thin Film Experiment Substrate Heater] Max 1800℃

It can be applied to various vacuum thin film experiments such as PVD (sputtering, evaporation, EB, etc.), CVD, high-temperature vacuum annealing, and high-temperature sample analysis substrate stages. We offer custom-made solutions to meet various specifications. 【Features】 ● Semi-custom product. Designed and manufactured according to your requests. ● Easy replacement of the auxiliary heater wire. ● Easy installation and maintenance (M6 stud bolts, supports). ● Compatible with RF/DC bias and substrate rotation. 【Standard Accessories】 ● Thermocouple: wire type with alumina insulating sleeve. ● Mounting stud bolts. 【Options】 ● RF (150W)/DC (1KW) bias application. ● Non-standard heater wires (Nb, Mo, Pt/Re, WRe, etc.). ● Substrate holding clips. ● Mounting brackets. ● Substrate holders. ● Tapped holes for holder installation. ● Change of top plate material (PBN, quartz, carbon, Inconel, etc.). ● Additional thermocouples for overheating. ● Base flange and vacuum feedthrough.

High-temperature crucible heating heater for vacuum use. A versatile heater unit that can be used as an organic deposition source at 800°C and a metal deposition source at 1500°C.

  • Evaporation Equipment
  • Heating device
  • Electric furnace

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BHS-series_iPROS-1.jpg

BH Series [UHV Compatible Ultra-High Temperature Vacuum Thin Film Experiment Substrate Heater] Max 1800℃

It can be applied to various vacuum thin film experiments such as PVD (sputtering, evaporation, EB, etc.), CVD, high-temperature vacuum annealing, and high-temperature sample analysis substrate stages. We offer custom-made solutions to meet various specifications. 【Features】 ● Semi-custom product. Designed and manufactured according to your requests. ● Easy replacement of the auxiliary heater wire. ● Easy installation and maintenance (M6 stud bolts, supports). ● Compatible with RF/DC bias and substrate rotation. 【Standard Accessories】 ● Thermocouple: wire type with alumina insulating sleeve. ● Mounting stud bolts. 【Options】 ● RF (150W)/DC (1KW) bias application. ● Non-standard heater wires (Nb, Mo, Pt/Re, WRe, etc.). ● Substrate holding clips. ● Mounting brackets. ● Substrate holders. ● Tapped holes for holder installation. ● Change of top plate material (PBN, quartz, carbon, Inconel, etc.). ● Additional thermocouples for overheating. ● Base flange and vacuum feedthrough.

We have incorporated all the latest vacuum deposition technology into a compact benchtop-sized device that can effectively utilize limited lab space.

  • Evaporation Equipment

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BHS-series_iPROS-1.jpg

BH Series [UHV Compatible Ultra-High Temperature Vacuum Thin Film Experiment Substrate Heater] Max 1800℃

It can be applied to various vacuum thin film experiments such as PVD (sputtering, evaporation, EB, etc.), CVD, high-temperature vacuum annealing, and high-temperature sample analysis substrate stages. We offer custom-made solutions to meet various specifications. 【Features】 ● Semi-custom product. Designed and manufactured according to your requests. ● Easy replacement of the auxiliary heater wire. ● Easy installation and maintenance (M6 stud bolts, supports). ● Compatible with RF/DC bias and substrate rotation. 【Standard Accessories】 ● Thermocouple: wire type with alumina insulating sleeve. ● Mounting stud bolts. 【Options】 ● RF (150W)/DC (1KW) bias application. ● Non-standard heater wires (Nb, Mo, Pt/Re, WRe, etc.). ● Substrate holding clips. ● Mounting brackets. ● Substrate holders. ● Tapped holes for holder installation. ● Change of top plate material (PBN, quartz, carbon, Inconel, etc.). ● Additional thermocouples for overheating. ● Base flange and vacuum feedthrough.

We have incorporated all the latest vacuum deposition technology into a compact benchtop-sized device that can effectively utilize limited lab space.

  • Evaporation Equipment

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ML-S125-iPROS_550-1.jpg

Multi-Target Sputtering Device [MiniLab-125] Compatible with Φ8" SiC Coating Equipped with 1000℃ Heater Stage! Compact Size!

Multifunctional Multi-Sputtering Device (Compatible with Φ8inch Substrates) - Simultaneous deposition of three components + one component Pulse DC sputtering - Flexible arrangement of RF500W and DC850W power supplies to three cathodes (Source 1, 2, 3) - Equipped with a 5KW Pulse DC power supply → used with dedicated cathode (4) - Substrate heating stage Max 800℃ (SiC coated heater can achieve Max 1000℃) - MFC x 3 systems (Ar, O2, N2) for reactive sputtering - Main chamber RIE etching stage RF300W - LL chamber <30W low power controlled soft etching - Unique "Soft-Etching" technology reduces substrate damage through substrate bias - Touch panel or Windows PC operation: All operations can be performed on the touch panel/PC without dispersing control. - Equipment installation dimensions: 1,960(W) x 1,100(D) x 1,700(H) mm - Multi-chamber type can also be manufactured. ● Mixed specifications for resistance heating deposition, organic material deposition, EB deposition, PECVD, etc. are also possible.

Sputter Cathode and Co-evaporation Source Mixed Thin Film Experimental Device: Metal deposition, organic deposition, and sputter cathode installed in a compact frame.

  • Sputtering Equipment
  • Evaporation Equipment
  • Annealing furnace

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☆★☆【nanoETCH】Soft Etching Device☆★☆

<30W Low Power Control for Damage-Free Etching Achieves delicate etching processes with an output control precision of 10mW. A jointly developed product with the graphene research group at the University of Manchester, led by Nobel Prize winners who discovered graphene in 2010. 【Features】 • 2D (Transition Metal Chalcogenides, graphene delamination after material transfer): Surface modification cleaning • Removal of polymer resists such as PMMA and PPA • Surface modification and etching on substrates prone to damage, such as Teflon substrates • h-BN sidewall etching (*Option for "Fluorine Gas Supply Module," requires SF6 gas system) • SiO2 etching (*Option for "Fluorine Gas Supply Module," requires CHF3 gas system) 【Specifications】 ◉ Compatible substrates: Up to Φ6 inches ◉ Easy operation with a 7" touch panel and PLC automatic sequencing ◉ Automatic pressure control (APC) ◉ One Ar gas line (standard) + up to three additional lines for N2 and O2 ◉ Connects to a Windows PC with a USB port for automatic etching recipe creation and storage. Data logging on PC.

For applications in solar cells, organic devices, and bio-related fields! Comprehensive catalog of deposition equipment giveaway!

  • Evaporation Equipment

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We will introduce research and development equipment suitable for the development of organic EL devices.

  • Evaporation Equipment

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The E-100 retains its features while omitting the automatic exhaust control function to reduce costs.

  • Evaporation Equipment

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It is possible to measure optical properties in real time during vacuum deposition!

  • Evaporation Equipment

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A deposition device for ellipsometry that can measure optical properties in real time during vacuum deposition.

  • Evaporation Equipment

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Uniform carbon deposition is now possible! Ideal for pretreatment in EPMA and analytical SEM.

  • Evaporation Equipment

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The precision wobble stick was developed for delicate operations within ultra-high vacuum chambers, minimizing the risk of damage to the equipment!

  • Vacuum Equipment
  • Evaporation Equipment
  • Plasma surface treatment equipment

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We will introduce hand clean rolls made of silicone-based and non-silicone-based materials.

  • Other cleaning tools
  • Special labels, etc.
  • Evaporation Equipment

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To customers considering ultra-wide equipment for roll-to-roll production lines.

  • Evaporation Equipment
  • Extrusion Machine
  • Food Packaging Machinery

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The passivation MBE device is composed of various chambers specially designed for laser facet passivation and other purposes.

  • Evaporation Equipment
  • CVD Equipment

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Metal, dielectric, and organic film deposition! Introducing the thermal evaporation device.

  • Evaporation Equipment

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A one-axis sample transporter designed for transporting samples between UHV chambers!

  • Vacuum Equipment
  • Evaporation Equipment
  • Transport and handling robots

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Robust cold cathode ionization vacuum gauge

  • Evaporation Equipment

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This is a compact thermal cathode ionization vacuum gauge with an integrated sensor, circuit, and display. It supports 16 types of gases and also uses a metal sensor!

  • Evaporation Equipment

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A wide range of measurements from atmospheric pressure to high vacuum with this one device! A vacuum gauge with an integrated sensor, circuit, and display.

  • Evaporation Equipment

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One device for measuring a wide range from atmospheric pressure to high vacuum! A vacuum gauge with an integrated sensor, circuit, and display. Compact and saves installation space!

  • Evaporation Equipment

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"Complete Case Collection of Flow Paths" - Presenting examples of diaphragm valves made with PFA resin sheets that can be used in high-temperature environments up to 200°C for the entire valve.

  • Evaporation Equipment
  • Other semiconductor manufacturing equipment
  • valve

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Optimized thermal design for handling delicate organic materials! Suppressing thermal effects on evaporated substances and substrates.

  • Evaporation Equipment

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Opening up the future of the medical device industry with high-performance and safe materials!

  • Evaporation Equipment

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A technology that deposits molecules onto a substrate surface to form a thin film! An explanation of vacuum deposition!

  • Evaporation Equipment

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Easy maintenance and workability! The lift-off film formation mechanism employs a special heat insulation mechanism!

  • Evaporation Equipment

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You can attach and detach the bell jar inside the glove box, and exchange or replenish the substrate and deposition materials!

  • Evaporation Equipment

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Can be fixed at any position on an arc-shaped rail corresponding to substrate incidence! The deposition position can be adjusted.

  • Evaporation Equipment

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Equipped with a holder that supports substrate rotation and substrate heating! Continuous film deposition is possible without releasing into the atmosphere!

  • Evaporation Equipment

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Transport between chambers is achieved by the transfer rod! Continuous film formation is possible without releasing into the atmosphere!

  • Evaporation Equipment
  • Sputtering Equipment

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Equipped with an EB source expansion port! Compatible with 4-inch substrates, it features a substrate heating mechanism and a film thickness control mechanism!

  • Evaporation Equipment

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Solving issues such as storage and supply stability, wettability, and heat resistance! Next-generation environmental compatibility!

  • Reflow Equipment
  • Evaporation Equipment
  • Bonding Equipment

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Not only can we create films on flat surfaces, but we can also apply films to three-dimensional objects! Please let us know the areas where you would like the film to be applied.

  • Evaporation Equipment
  • Sensors
  • Contract manufacturing

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The refined and simple glove box is suitable for anyone. It comes with a new era gas purification device that does not require recycled gas or recycling processes.

  • Glove box
  • Vacuum Equipment
  • Evaporation Equipment

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Glove box system with gas refining equipment for a new era that does not require regeneration gas or regeneration processes.

  • Glove box
  • Vacuum Equipment
  • Evaporation Equipment

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MBE cells (molecular beam epitaxy sources) are important for the quality of epitaxial films. We introduce the MBE cells from RIBER, a company with a proven track record.

  • Evaporation Equipment

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We will handle everything from material arrangement to He leak testing with one company.

  • Vacuum Equipment
  • Evaporation Equipment

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Materials require high purity and stable dissolution. Our company provides materials suitable for deposition!

  • Evaporation Equipment

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Easy-to-handle design allows for easy control of various film formation conditions! Six types of targets can be used.

  • Evaporation Equipment

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