This is a comprehensive catalog featuring a wide range of products, including semiconductor transport robots and aligners.
In the comprehensive product catalog of JEL, we feature a variety of transport robot products, including cylindrical coordinate clean robots, horizontal multi-joint clean robots, and cylindrical coordinate vacuum-compatible clean robots. The 3-axis cylindrical coordinate clean robot "SCR3000CS" is designed for super clean rooms and is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. You can choose between base type and flange type according to the equipment layout, and it is equipped with an operation monitor. The 4-axis horizontal multi-joint clean robot "GCR4000-PM" is a multi-axis type for super clean rooms. It is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices that accommodate 300 mm wafers, using two-phase stepping motors with absolute encoders on all axes. S-curve acceleration and deceleration control, along with motion trajectory optimization, enable high-speed and high-precision wafer transport.
For more details, please contact us or download the catalog.