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Clean Robot - List of Manufacturers, Suppliers, Companies and Products

Clean Robot Product List

16～30 item / All 42 items

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Tabletop Single-Arm Clean Robot 'AR1300-220'

Tabletop Single-Arm Clean Robot 'AR1300-220'

Significantly contributes to the reduction of CO2 emissions during operation! Ultra-compact clean robot.

The AR1300-220 is an ultra-compact, lightweight tabletop single-arm clean robot. It can build a tabletop system for transporting conventional sorters and inspection devices. To reduce the size of the controller, the motor driver can be stored in the bottom of the robot. 【Features】 ■ The motor driver can be stored in the bottom of the robot ■ Significantly contributes to the reduction of CO2 emissions during operation ■ Board holding: Wafer is vacuum suctioned ■ Equipped with various sensors ■ Equipped with a two-phase pulse motor with an encoder ■ Dedicated command control via RS232C *For more details, please refer to the PDF materials or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Tabletop Double-Arm Clean Robot 'AR2300-220'

Tabletop Double-Arm Clean Robot 'AR2300-220'

Low power consumption under 100W! The transport arm adopts a unique compact and lightweight multi-stage sliding mechanism.

The "AR2300-220" is a tabletop wafer transport device equipped with functions similar to conventional clean robots. It adopts a unique compact and lightweight multi-stage slide mechanism for the transport arm. By reducing the weight of the rotation and vertical axes, it achieves a simple structure with a mass of less than one-third compared to conventional models. 【Features】 ■ Achieves a mass of less than one-third compared to conventional models ■ Cleanliness measures: unique structure that sucks air from the side of the lower cover ■ Achieves low power consumption of less than 100W ■ Dedicated command control via RS232C ■ Equipped with a two-phase pulse motor with an encoder *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Direct Drive Single Arm Clean Robot 'HR1400-720'

Direct Drive Single Arm Clean Robot 'HR1400-720'

The motor can be equipped with a reduction gear! The controller is a 5-axis specification clean robot.

The "HR1400-720" is a linear single-arm clean robot equipped with an AC servo motor of the absolute encoder type for all axes. The motor can be equipped with a reduction gear. Control methods can be selected from RS232C, I/O, and Ethernet. 【Features】 ■ Equipped with various sensors ■ Controller is 5-axis specification ■ Control method: RS232C ■ I/O and Ethernet can be selected ■ Equipped with an AC servo motor of the absolute encoder type for all axes *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Link-type double-arm cleaning robot 'PR2111-60'

Link-type double-arm cleaning robot 'PR2111-60'

Reduce manufacturing costs by increasing the sheet metal ratio and simplifying the structure! Link-type clean robot.

The PR2111-60 is a link-type double-arm clean robot equipped with various sensors. By increasing the sheet metal ratio and simplifying the structure compared to our conventional products, we achieve a reduction in manufacturing costs. It is equipped with a vacuum suction type ceramic chuck. 【Features】 ■ All axes use 2-phase stepping motors ■ Chuck: Ceramic chuck (vacuum suction type) optional ■ Equipped with various sensors ■ Reduction in manufacturing costs by increasing the sheet metal ratio and simplifying the structure *For more details, please refer to the PDF materials or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Link-type single-arm cleaning robot 'SR1160-310'

Link-type single-arm cleaning robot 'SR1160-310'

Full-axis 2P stepping motor specifications! Link-type single-arm clean robot.

The SR1160-310 is a link-type single-arm clean robot with a hand that can rotate 180°. The hand section comes with a rotary unit. It can accommodate other wafer size hands by replacing the mounting block. As an option, various sensors for positioning and air pressure confirmation are available. 【Features】 ■ Hand: KUMADE FORK KMWF-12SF ■ The hand section includes a rotary unit ■ Various sensors included (positioning, air pressure confirmation) *optional ■ All axes are equipped with 2P stepping motors ■ Hand can rotate 180° *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Vacuum-Compatible Single-Arm Clean Robot 'SV1240'

Vacuum-Compatible Single-Arm Clean Robot 'SV1240'

Achieved further reduction in manufacturing costs by reducing the number of parts in conventional aluminum structures!

The "SV1240" is a single-arm clean robot that employs a magnetic fluid seal and a metal bellows method for its vacuum seal. By reducing the number of conventional aluminum structural components, further manufacturing cost reductions have been achieved. It uses a belt link system with a timing belt for arm drive. 【Features】 ■ Equipped with a 2-phase pulse motor with an encoder ■ RS232C communication control ■ Parallel I/O control ■ Adopts a magnetic fluid seal and metal bellows method for the vacuum seal ■ Belt link system using a timing belt for arm drive *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Link-type single-arm cleaning robot "PR2000 Series"

Link-type single-arm cleaning robot "PR2000 Series"

Introducing a clean robot that increases the sheet metal ratio and simplifies the structure, achieving reduced manufacturing costs!

The "PR2000 Series" is a link-type single-arm clean robot that achieves manufacturing cost reduction by increasing the sheet metal ratio and simplifying the structure compared to our conventional products. It features a 2-phase stepping motor for all axes and is equipped with various sensors. If you are looking for a link-type single-arm clean robot, please feel free to consult us. 【Features】 ■ 2-phase stepping motor for all axes ■ Equipped with various sensors ■ Chuck: Ceramic chuck (vacuum suction type) option *For more details, please refer to the PDF materials or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Cylindrical Coordinate Clean Robot "PHT-R-4"

Cylindrical Coordinate Clean Robot "PHT-R-4"

Supports atmospheric transport of wafers! The main unit weighs approximately 47 kg and the controller weighs about 8 kg.

The "PHT-R-4" is a horizontal multi-joint wafer transport robot designed for use in clean rooms. It is capable of moving in the front and back (X-axis), rotating (θ-axis), moving up and down (Z-axis), and hand rotation (0 to 180 degrees), making it suitable for transporting wafers in the atmosphere. The drive motor is an AC servo motor with absolute encoder specifications for all axes. 【Product Overview (Excerpt)】 ■ Installation Environment: Inside clean rooms (ambient temperature 10 to 35 degrees, humidity below 70% RH) ■ Arm: Single arm (Material: Aluminum, CFRP, Ceramic) ■ Load Capacity: 3 kg (total weight of hand base, hand, and work) *For more details, please refer to the PDF document or feel free to contact us.

  • Company：PHT
  • Price：Other
  • Transport and handling robots

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4-axis cylindrical coordinate clean robot STCR4000S series

4-axis cylindrical coordinate clean robot STCR4000S series

The exchange of wafers can be done in a short time with two arms.

The Super Clean Room 4-axis cylindrical coordinate clean robot STCR4000S series is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It allows for quick wafer exchanges with its two arms. It has obtained CE marking certification. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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3-Axis Cylindrical Coordinate Clean Robot MCR3000C Series

3-Axis Cylindrical Coordinate Clean Robot MCR3000C Series

It offers superior cost performance compared to conventional MHR.

The MCR3000C series, compatible with 300mm for super clean rooms, is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with all-axis AC servo, offering superior cost performance compared to conventional MHR models. You can choose between base type and flange type to match your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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4-axis cylindrical coordinate clean robot MTCR4000 series

4-axis cylindrical coordinate clean robot MTCR4000 series

It is suitable for wafer transport and enables high-speed transport using all-axis AC servos.

The MTCR4000 series, compatible with 300mm for super clean rooms, is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with full-axis AC servos, offering superior cost performance compared to conventional MTHR models. You can choose between base type and flange type according to your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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4-axis horizontal multi-joint clean robot GCR4000-AM series

4-axis horizontal multi-joint clean robot GCR4000-AM series

Specifications of AC servo motors and high-speed transportation through motion trajectory optimization.

The GCR4000-AM series is a multi-axis type, 4-axis horizontal articulated clean robot suitable for wafer transport in semiconductor manufacturing equipment and inspection devices that accommodate 300mm. You can choose between base type and flange type according to the equipment layout. It is possible to use optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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Vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series

Vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series

It can be used for transporting wafers inside a vacuum chamber.

The vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series can be used for transporting wafers within a vacuum chamber. Compared to the SVHR, it has double the payload capacity and offers excellent cost performance. Additionally, it is compatible with the SVHR for installation, allowing for a smooth transition. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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3-Axis Cylindrical Coordinate Clean Robot LHR3000 Series

3-Axis Cylindrical Coordinate Clean Robot LHR3000 Series

For Z strokes of 760mm or more, the Z-axis is multi-stage, allowing for low-pass line configuration.

The LHR3000 series clean robot with a 3-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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4-axis cylindrical coordinate clean robot LTHR4000 series

4-axis cylindrical coordinate clean robot LTHR4000 series

It is suitable for the transport of glass substrates for inspection devices, etc., within liquid crystal manufacturing equipment.

The LTHR4000 series clean robot with a 4-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots

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