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Clean Robot - List of Manufacturers, Suppliers, Companies and Products

Clean Robot Product List

31～42 item / All 42 items

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4-axis cylindrical coordinate vacuum-compatible clean robot FTVHR4000

4-axis cylindrical coordinate vacuum-compatible clean robot FTVHR4000

Optimal for transporting masks and glass substrates in liquid crystal manufacturing equipment, inspection devices, etc.

The FTVHR4000 series clean robot, compatible with mask and glass substrates and designed for four-axis cylindrical coordinate link-type high vacuum applications, is suitable for transporting mask and glass substrates within LCD manufacturing equipment and inspection devices. It transports glass substrates at high speed and high precision through S-curve acceleration and deceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
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Clean Robot "SHR3000 Series"

Clean Robot "SHR3000 Series"

Ideal for wafer transport in semiconductor manufacturing equipment and similar environments!

The "SHR3000 Series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It is optimal for wafer transport within semiconductor manufacturing equipment and inspection devices. Additionally, it can accommodate optimal chucks tailored to the transported items and equipment layout. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations can be selected from 100mm - Z-axis variations are available in 200mm and 300mm - Load capacity is 3kgf or less when calculated at the third joint of the arm - Base type and flange type can be selected according to the equipment layout - Equipped with a motion monitor *For more details, please refer to the catalog or feel free to contact us.

  • Other conveying devices
  • Other factory equipment and parts

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Clean Robot "STWHR4156 Series"

Clean Robot "STWHR4156 Series"

Ideal for wafer transport in acidic and alkaline mist environments!

The "STWHR4156 series" is a waterproof twin-arm 4-axis cylindrical coordinate clean robot. It is suitable for wafer transport in an acidic and alkaline mist atmosphere during the LSI manufacturing process. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 ■ Arm variation is 156mm ■ Z-axis variation is 200mm and 300mm ■ Load capacity is 3kgf or less when calculated at the third joint of the arm ■ The arm section is coated with Teflon to ensure corrosion resistance ■ The arm joint section uses V-seals for waterproofing *For more details, please refer to the catalog or feel free to contact us.

  • Other conveying devices
  • Other factory equipment and parts

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Clean Robot 'SSCR2090S Series'

Clean Robot 'SSCR2090S Series'

Clean robot for small wafer paths!

The "SSCR2090S Series" is a two-axis cylindrical coordinate clean robot designed for super clean rooms. With its compact footprint and lightweight design, it is suitable for small wafer transport within semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, allowing for a more compact equipment layout. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Load capacity is 0.1 kgf or less (work only) when converted to the third joint of the arm - Equipped with operation monitoring - Control method is RS232C and parallel photo I/O - All axes use two-phase stepping motors - High-speed and high-precision wafer transport through S-curve acceleration and deceleration control *For more details, please refer to the catalog or feel free to contact us.

  • Other conveying devices
  • Other factory equipment and parts

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Direct Drive Double Arm Clean Robot 'HR81315-1900'

Direct Drive Double Arm Clean Robot 'HR81315-1900'

High rigidity design enables high-speed transport of glass substrates! ISO Class 2 clean robot.

The "HR81315-1900" is a linear double-arm clean robot equipped with an all-axis ABS encoder AC servo motor. It transports glass substrates at high speed due to its high rigidity design. It holds the glass substrates by attaching anti-slip pads to the top surface of the CFRP fork. Additionally, it features a CFRP fork that is heat-resistant up to 250°C. 【Features】 ■ Equipped with various sensors ■ All-axis ABS encoder AC servo motor specification ■ Dedicated command control via RS232C ■ Substrate holding: Glass substrates are held by attaching anti-slip pads to the top surface of the CFRP fork ■ Fork: 250°C heat-resistant CFRP fork *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Direct Drive Double Arm Clean Robot 'HR71000-1500'

Direct Drive Double Arm Clean Robot 'HR71000-1500'

Support for transporting 3rd generation glass substrates! Double-arm clean robot equipped with various sensors.

The "HR71000-1500" is a direct drive double-arm clean robot compatible with third-generation glass substrate transport. Both the arms and the vertical axis can achieve long strokes. It vacuum-suctions the backside of the substrate. The arms are equipped with stepping motors, while the pivoting vertical axis uses servo motors. 【Features】 ■ Dedicated command control via RS232C ■ Equipped with various sensors ■ Substrate holding: Vacuum suction on the backside of the substrate ■ Arms: Stepping motor specification for pivoting ■ Vertical axis: Servo motor specification *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Direct Drive Double Arm Clean Robot 'LR31000-600'

Direct Drive Double Arm Clean Robot 'LR31000-600'

High rigidity design enables high-speed transport of third-generation glass substrates! Double-arm clean robot.

The "LR31000-600" is a compact body, long-stroke direct-drive double-arm clean robot. With a high-rigidity design, it transports third-generation glass substrates at high speed. It is designed for easy docking with the lateral slide axis. The slide axis is equipped with an incremental encoder and can be controlled by a servo motor. 【Features】 ■ Compact body, long stroke ■ Easy docking with the lateral slide axis ■ Slide axis: Incremental encoder specification, controllable by servo motor ■ Equipped with a two-phase pulse motor with encoder *For more details, please refer to the PDF materials or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Link-type single-arm cleaning robot 'PR1111-200'

Link-type single-arm cleaning robot 'PR1111-200'

The hand can be rotated 180 degrees with a stepping motor drive! Link-type clean robot.

The "PR1111-200" is a link-type single-arm clean robot with a specification of 2P stepping motors for all axes. The hand can be rotated 180 degrees by a stepping motor drive. The rotation axis is equipped with a home position sensor, a motor stall detection sensor, and a 180-degree position sensor. 【Features】 ■ 2P stepping motor specification for all axes ■ The rotation axis is equipped with a home position sensor, a motor stall detection sensor, and a 180-degree position sensor ■ Chuck: Special I-type chuck made of a laminated structure of aluminum and stainless steel *For more details, please refer to the PDF materials or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Link-type double-arm cleaning robot 'SR2160-310'

Link-type double-arm cleaning robot 'SR2160-310'

The lower inversion axis allows for vacuum suction of wet wafers! Double-arm clean robot.

The "SR2160-310" is a link-type double-arm clean robot equipped with an inversion unit and a mapping unit. To address issues with wet wafers, the lower inversion axis is capable of vacuum suction for wet wafers. To prevent water from entering the robot's drive components, water catchers have been installed in both the arm drive unit and the main body drive unit. 【Features】 ■ Includes inversion unit and mapping unit ■ Water catchers installed in arm drive unit and main body drive unit ■ Special ceramic chuck included (optional) ■ Positioning sensor included (optional) *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Parallel Link Single Arm Cleaning Robot 'EV2250'

Parallel Link Single Arm Cleaning Robot 'EV2250'

Single-arm clean robot using contact sealing method for vacuum sealing.

The "EV2250" is a parallel link single-arm clean robot that uses a contact sealing method for its vacuum seal. The arm section has been treated with Alpicca. In addition to being equipped with a two-phase pulse motor with an encoder, it supports RS232C communication control and parallel I/O control. 【Features】 ■ Heat-resistant use: Installation of a reflector (thermal reflective plate) on the arm ■ Arm section treated with Alpicca ■ Equipped with a two-phase pulse motor with an encoder ■ RS232C communication control ■ Parallel I/O control *For more details, please refer to the PDF materials or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Waterproof Double-Arm Cleaning Robot 'WR2154-300'

Waterproof Double-Arm Cleaning Robot 'WR2154-300'

High rigidity arm specification with Teflon coating! Equipped with a transparent mapping sensor in the handle.

The "WR2154-300" is a waterproof double-arm clean robot. The arm section above the mounting flange complies with the IP64 standard. The hand section is equipped with a transmissive mapping sensor capable of vertical/horizontal operation. Additionally, it can accommodate rotary and clamp units. 【Features】 ■ Arm section: Teflon-coated, high-rigidity arm specification ■ Capable of mounting rotary and clamp units ■ Wafer holding: Vacuum suction using ceramic chucks ■ Equipped with a two-phase pulse motor with encoder ■ Control: RS232C communication control or parallel I/O control *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Link-type single-arm cleaning robot "PR1000 series"

Link-type single-arm cleaning robot "PR1000 series"

Introducing a clean robot with a 180-degree reversible design and a full-axis 2P stepping motor specification!

The "PR1000 Series" is a link-type single-arm clean robot that can rotate 180 degrees driven by a stepping motor. It features a 2P stepping motor for all axes. It has a special I-type chuck made of a laminated structure of aluminum and stainless steel. Additionally, the rotating axis is equipped with a home position sensor, a motor stall detection sensor, and a 180-degree position sensor. 【Features】 ■ The hand can rotate 180 degrees driven by a stepping motor ■ Special I-type chuck made of a laminated structure of aluminum and stainless steel ■ The rotating axis is equipped with a home position sensor, a motor stall detection sensor, and a 180-degree position sensor *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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