キヤノンアネルバ List of Products and Services

Gas analysis systems have been used in a wide range of fields and industries as a means of quality control in manufacturing and research and development. However, due to differences in the analysis targets, there can be variations in measurement conditions, and in some cases, individual responses are necessary to perform suitable measurements. At Canon Anelva, we use our own quadrupole mass spectrometer to design custom configurations based on customer requests, proposing optimal system configurations that align with their needs and measurement purposes.

• Other measurement, recording and measuring instruments

The "Capacitance Gauge" is a temperature-compensated diaphragm vacuum gauge that can measure absolute pressure with high precision and stability. It features excellent zero-point stability, low temperature dependence, and outstanding vibration resistance. The "Cold Cathode Pirani Gauge" is a combination gauge that combines a robust cold cathode gauge (cold cathode ionization vacuum gauge) and a Pirani gauge, offering a wide pressure measurement range from atmospheric pressure to high vacuum. For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

Since our establishment in 1967, we have been developing, manufacturing, selling, and providing services for vacuum thin film manufacturing equipment and vacuum component products, utilizing the vacuum technology and film processing technology we have cultivated over many years. With the theme "Opening the Future with Vacuum Technology," we have been providing high value-added products to our customers and contributing to the development of the market. In 2005, we became a member of the Canon Group, and today, as part of the Canon Industrial Equipment Group, we aim to maximize the strengths of our global group network in our business development. 【Business Activities】 ■ Manufacturing and sales of vacuum thin film processing equipment ■ Manufacturing and sales of vacuum component products ■ Maintenance services *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments
• Vacuum Equipment
• Other semiconductors

The "Miniature Gauge" is a metal small gauge ball that eliminates the disadvantages of glass gauge balls, which are large and prone to breaking. It is easy to select the installation location, and it can be miniaturized (1/20 of the conventional size according to our company) without compromising the performance of the gauge, such as sensitivity and measurement range. Pressure measurement from the target pressure to process pressures like sputtering (measurable in the range of 1 Pa) can be performed with a single gauge. 【Lineup】 ■ MG-2 ■ MG-2M ■ MG-2I/NW16, 25 ■ MG-2I/φ34ICF, φ70ICF ■ MG-2F ■ MG-2WF *For more details, please refer to the PDF materials or feel free to contact us.

• Other measurement, recording and measuring instruments
• Pressure

The "Piranigage" is a versatile vacuum gauge that combines ease of measurement from atmospheric pressure with high cost performance. It has good reproducibility and is suitable for measuring in low to medium vacuum ranges. It can be used in various industries, including food, automotive, and pharmaceuticals, for various system installations. 【Features】 ■ High cost performance ■ Measurement range from 5×10^-2 Pa to atmospheric pressure ■ Usable in various industries ■ Applications include pressure measurement in roughing systems, pressure monitoring in exhaust systems, and control purposes. *For more details, please refer to the PDF document or feel free to contact us.

• Pressure
• Other measurement, recording and measuring instruments

Temperature-compensated diaphragm vacuum gauge, capacitance gauge 'M-342DG' 【Features】 ■ High precision and stable pressure measurement - Excellent zero point stability - Low temperature dependence - Excellent vibration resistance ■ Compact and low power consumption - Lightweight and compact with a mass of 200g and dimensions of W46mm × H49mm × L106mm - Power consumption of 0.5W *For more details, please refer to the PDF document or feel free to contact us.

• Pressure

The "V-025SV" is primarily used by attaching it to the intake port of an oil rotary vacuum pump. It is equipped with the functions of a cut-off valve and a vent valve, which helps prevent backflow of pump oil due to power outages or operational errors. The driving source utilizes the vacuum force generated by the oil rotary vacuum pump. Unlike conventional automatic valves, there is no need for compressed air and associated piping. (The valve does not open when the pump is not operating.) 【Features】 ■ Prevents backflow of pump oil ■ No need for compressed air and associated piping ■ Utilizes the vacuum force generated by the oil rotary vacuum pump as the driving source ■ No control circuit required *For more details, please refer to the PDF materials or feel free to contact us.

• valve

The "951-7179 Inlet Valve" is a product designed to introduce specific gases into vacuum systems. The shaft seal is made of austenitic stainless steel bellows, and the vacuum seal uses fluororubber (Viton). It is suitable as a gas introduction valve for high vacuum and ultra-high vacuum devices. It can also be used in ultra-high vacuum areas down to approximately 10^-7 Pa. 【Features】 ■ For ultra-high vacuum areas ■ No atmospheric contamination ■ Excellent heat tolerance ■ Easy maintenance *For more details, please refer to the PDF document or feel free to contact us.

• valve

The "Ultra High Vacuum Variable Leak Valve" is a product used in vacuum devices that require adjustment of the introduced gas flow rate. It allows for gas introduction from an extremely low flow rate region, with an adjustable minimum leak rate of 6.7×10^-9 Pa·m³/sec or less. Additionally, it is made entirely of metal and can withstand baking up to 450°C, making it suitable for ultra high vacuum devices. 【Features】 ■ Seal section resistant to heat and external shocks ■ Stable adjustment of minute gas flow rates ■ Excellent heat tolerance ■ Capable of adjusting a wide range of gas flow rates ■ Compatible with ultra high vacuum connections *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment
• valve

The "V Series" is an L-type valve designed for longevity and improved maintenance. The bellows built into the valve are made from Hastelloy alloy. All air cylinders used in the valve come standard with position sensor switches (magnetic sensors) for opening and closing. The valve body is made of stainless steel, and special connection flanges can be easily welded. Additionally, cleaning of internal valve components and replacement of maintenance parts can be done in a short time. 【Features】 ■ Usable up to ultra-high vacuum levels ■ Long-life valve ■ Opening and closing position sensor switches ■ Excellent heat tolerance ■ Abundant connection flanges ■ Easy maintenance *For more details, please refer to the PDF document or feel free to contact us.

• valve

The "V Series" is an L-type valve that can be used in high vacuum areas down to approximately 10^-4 Pa. Fluororubber (Viton) O-rings are used for vacuum seals and shaft seals. It is suitable as a valve for high vacuum devices and as a roughing valve for ultra-high vacuum devices. Additionally, the air cylinder used for the pneumatic drive valve is equipped with a position sensor switch for opening and closing. 【Features】 ■ Usable in high vacuum areas down to approximately 10^-4 Pa ■ Fluorogrease is used only for the shaft seal section ■ Equipped with a position sensor switch for opening and closing ■ Drive methods - Pneumatic - Manual *For more details, please refer to the PDF document or feel free to contact us.

• valve

The "Ultra High Vacuum L-Type Polyimide Valve" is a product that can be used in ultra high vacuum areas of approximately 10^-8 Pa. For the vacuum seal, polyimide resin is used, which has a high heat resistance and low gas release. It is suitable for valves used in ultra high vacuum devices that involve baking at temperatures above 150°C. Additionally, the valve body is made of austenitic stainless steel, and the shaft seal also uses a bellows made of austenitic stainless steel. 【Features】 ■ Can be used in ultra high vacuum areas of approximately 10^-8 Pa ■ Excellent heat tolerance ■ Seal material with low gas release ■ Small tightening torque *For more details, please refer to the PDF document or feel free to contact us.

• valve

The "Ultra High Vacuum L-Type All-Metal Valve" is a fully metallic product that can be used down to 10^-8 Pa or lower. The valve body is made of austenitic stainless steel, and the shaft seal also uses a bellows made of austenitic stainless steel. It features an all-welded structure, and the areas exposed to vacuum are oil-free and clean. Additionally, the valve sealing structure employs a reliable Capturing seal design similar to ICF flanges. 【Features】 ■ For ultra high vacuum applications ■ Capturing seal structure ■ Excellent tolerance to heating ■ Easy gasket replacement ■ Parallel piping connection possible (excluding 951-7148 mini metal valve) ■ Easy maintenance *For more details, please refer to the PDF document or feel free to contact us.

• valve

We offer a variety of "current terminals" with ceramic-sealed terminals welded to ICF flanges. These terminals have excellent insulation properties and are mechanically and thermally robust, with no risk of leakage. As a result, they are used in ultra-high vacuum systems and devices with high thermal loads, providing high reliability. 【Features】 ■ Proven soldering technology and ICF flanges enable compatibility with high-temperature baking ■ Excellent thermal, mechanical, and electrical properties ■ Usable in ultra-high vacuum regions ■ Available in various types for large current introduction, small current introduction, high-pressure current introduction, and multi-terminal configurations *For more details, please refer to the PDF materials or feel free to contact us.

• Other terminal blocks
• Other machine elements

The "Linear Feedthrough" is used to introduce linear motion of equipment installed in a vacuum, and it can be used in ultra-high vacuum areas with a pressure below 10^-8 Pa. Since it is made entirely of metal, hard baking is possible. It is suitable for ultra-high vacuum systems. By utilizing the expansion and contraction of the bellows, it introduces linear motion into the vacuum without the concern of leaks during operation. 【Features】 ■ A bellows-type linear feedthrough that completely isolates the vacuum side from the atmospheric side with bellows. ■ All components are made of non-magnetic materials, making it suitable for vacuum systems that are sensitive to magnetism (excluding models 954-7626 and 7627). ■ All models have a linear movement of 1 mm per one full rotation of the handle, with the handle scale divided into 20 increments. *For more details, please refer to the PDF document or feel free to contact us.

• Other machine elements
• Vacuum Equipment

This product is a rotary feedthrough used to introduce rotational motion to equipment installed in a vacuum, capable of operating in ultra-high vacuum regions with pressures below 10^-8 Pa. We offer magnetic coupling rotary feedthroughs and bellows-type rotary feedthroughs. Adopting vacuum brazing for joining, it does not use any elastomer seals, making it suitable for ultra-high vacuum systems. 【Features】 ■ High torque transmission ■ Long lifespan ■ Bake-out capable ■ Outer rotor stopper ■ Motor drive capable *For more details, please refer to the PDF materials or feel free to contact us.

• Other machine elements
• Vacuum Equipment

We would like to introduce the "supplementary materials" that we handle. "Molypaste 500" is a paste-like product that contains a high concentration of MoS2 microparticles and base oil (mineral oil). By applying a small amount to the fitting parts, sliding parts, and threaded sections of machine components, it prevents wear, seizure, and galling. (Not for use in a vacuum.) Additionally, we offer "sheath heaters," as well as "bolts, nuts, and washers." 【Features of Molypaste 500】 ■ Chemically stable ■ Prevents seizure and wear ■ Effective for lubrication in low-speed, heavy-load areas ■ Being in paste form allows lubrication in places where oil is difficult to use *For more details, please refer to the PDF materials or feel free to contact us.

• Other consumables
• bolt
• Other heaters

The "Ultra High Vacuum Viewing Port" is a peep window for observing the inside of a vacuum container from the outside. It is welded to an ICF flange using Kovar glass or a combination of synthetic sapphire and Kovar, making it usable in ultra-high vacuum areas down to 10^-8 Pa. In particular, the sapphire viewing port has stable transmission characteristics against ultraviolet (short wavelength) electromagnetic waves and particle beam irradiation. 【Features】 ■ Wide and clear effective viewing area ■ Usable in ultra-high vacuum areas ■ Excellent heating tolerance ■ Stable transmission across a wide range of wavelengths ■ Excellent radiation resistance *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment

The "Vacuum Switch" is equipped with a single-pole double-throw contact, allowing for simultaneous ON/OFF control signals at the upper or lower limit of the operating pressure, with only slight changes in operating pressure. Additionally, the vacuum side is made entirely of SUS-304, and the seal with the atmosphere is a welded structure, making it possible to connect to high vacuum. Therefore, it can also be used as a switch for protection and safety circuits in automated vacuum devices. 【Features】 ■ Equipped with a single-pole double-throw contact ■ ON/OFF control signals can be obtained at the upper or lower limit of the operating pressure ■ The vacuum side is made entirely of SUS-304 ■ The seal with the atmosphere is a welded structure, allowing for connection to ultra-high vacuum *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment

We offer vacuum flanges that comply with ISO standards and are convenient to handle. ISO refers to this as a Quick-release Coupling, and it is standardized for four types of small flanges with nominal diameters of 10, 16, 25, and 40. All of these flanges can be easily attached and detached using clamps, without the need for bolts. Additionally, we provide various connecting elements that utilize these flanges for your convenience. 【Features】 ■ No bolts or nuts required, easy to attach and detach ■ Completely symmetrical flange with no male or female parts ■ Continuously and uniformly tightens around the entire circumference of the flange *For more details, please refer to the PDF document or feel free to contact us.

• Coupling

In assembling the device, various components are used for piping connections. The connection components handled by our company are those that connect with ICF flanges and are used in ultra-high vacuum equipment and its associated systems. We offer a lineup of fittings, metal adapters, glass adapters, and φ15 adapters. 【Features】 ■ Wide variety ■ Usable according to application ■ Equipped with ICF flanges ■ Usable up to ultra-high vacuum *For more details, please refer to the PDF materials or feel free to contact us.

• Piping Materials

We handle "ICF flanges" as ultra-high vacuum flanges. This product features a metal seal flange, which is particularly reliable among the ultra-high vacuum flanges currently known, and is easy to handle. It uses a dedicated oxygen-free copper gasket. 【Features】 ■ Seals the gasket elastically based on the theory of "Capturing" ■ Designed to withstand pressures below 10^-10 Pa ■ Leak-free in a temperature range from -196°C to +450°C ■ Completely symmetrical flange without male or female parts *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment

The "Foreline Trap" efficiently adsorbs oil molecules using a molecular sieve installed in the gas pathway. Furthermore, by cooling the molecular sieve with liquid nitrogen, it effectively adsorbs not only oil molecules but also water vapor (in the case of the Foreline Trap S). Additionally, since it has a built-in heater, the adsorption capacity of the molecular sieve can be easily regenerated by baking the molecular sieve before use. 【Features】 ■ Easily prevents backflow of oil ■ Efficiently adsorbs oil molecules using the molecular sieve installed in the gas pathway ■ The adsorption capacity of the molecular sieve can be easily regenerated by baking it before use *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum pump

The POWER Eco series product is a high-performance energy-saving cryopump developed with the aim of reducing power consumption and cooling water usage from an energy-saving perspective. Due to the increased efficiency of refrigeration units and multi-wave control, the number of cryopumps that can be operated with a single compressor has increased, significantly reducing power consumption and cooling water usage per unit. 【Features】 ■ Effective for energy and resource savings [Power consumption, cooling water usage: Reduction of 15-70% possible] ■ Shortened regeneration and startup time [Less than half compared to conventional models (compared to our company)] ■ Improved exhaust performance [Substantially increased effective argon exhaust capacity by 1.5 to 4 times (compared to our company)] ■ Low vibration [Approximately 1/10 or less compared to conventional models] *For more details, please refer to the PDF materials or feel free to contact us.

• Vacuum pump

The POWER series product is a high-performance cryopump that enhances practical exhaust performance and temperature stability during multi-operation. The average value of vibration acceleration is less than about one-tenth compared to conventional models (our comparison). Even if only one pump is regenerated during multi-operation, the startup time does not become excessively long, minimizing changes in startup time due to operating conditions. 【Features】 ■ Achieves safe, heater-less high-speed regeneration ■ Excellent practical startup characteristics and temperature stability ■ Low vibration ■ Maintains good exhaust performance up to the limit of argon exhaust capacity ■ Significantly increases refrigeration capacity, sustaining stable hydrogen exhaust performance for extended periods *For more details, please refer to the PDF materials or feel free to contact us.

• Vacuum pump

The "Excel Pump" is a compact and lightweight vacuum pump. Based on an ion pump, it has been developed by improving the discharge characteristics in low-pressure regions, featuring pump elements and a built-in heater that enables efficient baking. Additionally, the incorporation of a NEG (non-evaporable getter) pump allows for the achievement of XHV. 【Features】 ■ High exhaust capacity in UHV and XHV regions ■ Realization of high-efficiency baking ■ Compact and lightweight ■ Compatible with clean rooms *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum pump

The "Ion Pump - Noble Pump" is an ultra-high vacuum pump. By generating cold cathode discharge in a magnetic field, ionized gas molecules are embedded in the cathode, and during collisions with the cathode material (Ti), sputtering occurs, continuously creating an active getter film for evacuation. Since it does not use any oils or organic materials, it achieves a clean vacuum without contaminating the system. 【Features】 ■ Completely oil-free ■ Ultra-high vacuum, extreme ultra-high vacuum ■ Unmanned operation ■ Exhaust of inert gases (Noble Pump) *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum pump

The "P-500" is a control device for operating ion pumps or noble pumps in high vacuum conditions ranging from 10^-2 Pa to 10^-4 Pa or lower. It features large green LEDs for improved visibility from a distance. While considering compatibility with conventional models, it achieves enhanced functionality and compliance with CE and RoHS standards. In addition to its comprehensive I/O functions, it is suitable for automation equipment and remote operation devices, with the possibility of supporting RS232C communication through optional board additions. 【Features】 ■ High performance ■ Comprehensive functionality ■ High compatibility ■ Communication support ■ Compliance standards: CE marking, RoHS directive compliance *For more details, please refer to the PDF materials or feel free to contact us.

• Vacuum pump
• Other process controls

The "C Series" is a gas analysis system that is designed to be simple and compact while accommodating a variety of gas analysis applications. By selecting the basic configuration (exhaust system + mass filter) and further choosing from a range of recommended options that are preset for various applications, it is possible to create a system configuration that suits the customer's needs. Despite its simplicity, it comes standard with basic interlock functions, allowing for safe use. 【Features】 ■ Flexible customization options ■ Can be installed in a compact space of W480mm x D500mm ■ Simple yet equipped with basic interlock functions as standard ■ Can be ordered as an exhaust unit for gas analysis without the need for an analysis tube *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

The "D Series" is a suitable gas analysis system for various gas analysis and research and development fields. It allows for easy measurements controlled by a computer. Depending on the application, it features a flexible configuration that can combine a quadrupole mass spectrometer with a TMP exhaust system and optional components. 【Features】 ■ Five models to choose from: ・M-101QA-TDF, M-101/201QA-TDM, M-401QA-M (high sensitivity/high speed) ■ System upgrades can be combined according to application needs ■ Compact and space-saving ■ Easy operability *For more details, please refer to the PDF materials or feel free to contact us.

• Other measurement, recording and measuring instruments

Canon Anelva Corporation offers high-performance and high-functionality quadrupole mass spectrometers capable of measuring mass numbers up to 410 amu. We provide the "M-401QA-MGSY/MUSY," which can acquire data at intervals of 1 second for m/z = 1 to 410, and the "M-401QA-MGHY/MUHY," which features high sensitivity with an 8-digit dynamic range. You can choose between UHV type (cage type) and gas introduction type (box type), and we employ an ion source with low gas emission and have degassing functionality. 【Features】 ■ Choice of UHV type (cage type) or gas introduction type (box type) ■ Adoption of an ion source with low gas emission ■ Degassing functionality included *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

The "M-101/201QA-TDM" is a quadrupole mass spectrometer specifically designed for PC control, achieving high sensitivity, high functionality, and low gas emissions. It uses a secondary electron multiplier in the detector, allowing for fine adjustments of ionization voltage and emission current. It is widely used for gas analysis in thin film manufacturing equipment and accelerator gas analysis, among other applications. Additionally, we offer a cost-effective version suitable for residual gas monitoring in various vacuum systems, the "M-070QA-TDF." 【Features】 ■ Uses a secondary electron multiplier in the detector ■ Adopts a low gas emission ion source ■ Allows for fine adjustments of ionization voltage and emission current ■ QUADVISION ■ Comes standard with a rich array of I/O functions *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

The process gas monitor "M-080QA-HPM" is a quadrupole mass spectrometer capable of measuring in the mass range of 1 to 80 amu, and it can measure from pressures below 2.0 Pa (no differential pumping system required). It monitors the partial pressure of gases during the process, detects abnormalities such as process gas anomalies and leaks, and provides process stability. It can be utilized for quality control and residual gas analysis during the process. 【Features】 ■ High sensitivity detection of hydrogen during the process ■ High sensitivity measurement across a wide pressure range ■ Long maintenance cycle and low running costs ■ Various alarm functions to detect abnormalities during production *For more details, please refer to the PDF document or feel free to contact us. The document states the operating pressure as "below 1.3 Pa," but the correct value is "below 2.0 Pa."

• Other semiconductor manufacturing equipment

The "M-723HG, M-823HG, M-923HG" series is a general-purpose B-A type ionization vacuum gauge series equipped with a variety of expansion boards that support diverse gauges. It comes standard with remote operation functions necessary for vacuum process control and an effective range hold function with APC (Automatic Pressure Control). The "M-823HG" features an auto-filament function that allows for the combination of wide-range B-A gauges and thermocouple gauges, enabling automatic switching between gauges to accurately cover the range from atmospheric pressure to high vacuum with a single unit. 【Features】 ■ Automatic switching of pressure ranges ■ Pressure and various messages displayed on LCD ■ Complete remote operation possible with rich external control functions ■ Two set points standard equipped ■ D/A output standard equipped for recorder output *For more details, please refer to the PDF materials or feel free to contact us.

• Vacuum Equipment

The "M-833HG" is a control unit specifically designed for miniature B-A gauges. An expansion board is available as an option to support various gauges, data output, and more. By combining the miniature B-A gauge with the TC gauge (optional) and incorporating an auto-filament for automatic gauge switching, it enables high-precision vacuum measurement from atmospheric pressure to ultra-high vacuum. 【Features】 ■ Easy-to-read LCD display format ■ Pressure and various messages displayed on the LCD ■ Pressure range automatically switches ■ Complete remote control possible with rich external control functions ■ Standard equipped with 2 set points *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment

The "M-431HG" is a vacuum gauge control power supply specifically designed for miniature gauges. The input voltage is wide voltage. It comes standard with RS-232C communication functionality for external input and output, and complies with CE marking and RoHS. It can be used for pressure measurement in automated vacuum systems, as well as for measuring and controlling process pressures such as sputtering. 【Features】 ■ External input and output ■ Standard RS-232C communication functionality ■ Wide input voltage ■ CE marking and RoHS compliant ■ Cables available with heat resistance up to 80℃/250℃ *For more details, please refer to the PDF materials or feel free to contact us.

• Vacuum Equipment

The "M-601GC/603GC" is a display unit compatible with the transducer-type vacuum gauge series. It features a large digital LCD display for easy visibility and significantly improved operability. It is packed with various innovations aimed at enhancing convenience on-site. You can choose between a 1-channel type and a 3-channel type according to your needs. 【Features】 ■ Automatic gauge recognition ■ Large digital LCD display ■ Standard RS232C interface ■ Excellent operability ■ Easy-to-read three types of display - Digital display, trend graph (up to 18 hours), analog meter *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment

The "G-511 Series" is a micro-focus X-ray source with a sealed design that allows for quick image acquisition and does not require target rotation adjustment. Warm-up takes less than 3 minutes, eliminating long wait times during startup. It features a self-diagnostic function for X-ray tube lifespan, contributing to planned equipment maintenance. 【Features】 ■ Voltage increase to 110kV in under 1 second ■ Maintenance-free target ■ Warm-up in under 3 minutes ■ Self-diagnostic function for X-ray tube lifespan ■ Optional pulse output of less than 1 second *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment

The "G-311 Series" is a transmission-sealed micro-focus X-ray source that enables high brightness, high magnification, and rapid image acquisition. There is no need for target rotation adjustment, which improves equipment operational efficiency. Long waiting times during startup are eliminated, and aging after long-term storage is unnecessary. 【Features】 ■ Supports overseas operation ■ High magnification with high imaging throughput ■ Contributes to planned equipment maintenance ■ Resolves 4μm at 10W ■ Complies with CE and RoHS standards *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment

The "HELEN Series" is a portable type helium leak detector developed with the concepts of compact size, lightweight, and portability. We offer a variety of products, including the compact "M-212LD" which emphasizes mobility, the "M-212LD(-D)" equipped with a diaphragm pump, and the high-power "M-222LD." These products achieve a high level of sensitivity, stability, and responsiveness in the industry. 【Features】 ■ Easy operation ■ One-button operation allows for startup and measurement ■ Achieves high levels of sensitivity, stability, and responsiveness ■ High sensitivity of 10^-12 Pa·m³/s and high stability for long-term use, with models available for minimum detectable leaks of 10^-13 Pa·m³/s ■ Robust design focused on durability *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment

The capacitance gauge "M-342DG" is a diaphragm vacuum gauge that achieves high-precision and stable pressure measurement with minimal zero-point adjustment frequency. Weighing 200g and measuring W46mm × H49mm × L106mm, it is lightweight and compact. It employs a newly developed small silicon MEMS chip in the pressure sensor section, minimizing the influence of external environments such as temperature, vibration, and atmospheric pressure fluctuations. 【Features】 ■ High-precision and stable pressure measurement ■ Excellent zero-point stability ■ Low temperature dependence, achieving excellent stability without a temperature adjustment mechanism ■ Excellent vibration noise performance *For more details, please refer to the PDF document or feel free to contact us.

• Other semiconductor manufacturing equipment

The Pirani gauge "M-350PG" is a versatile Pirani vacuum gauge that combines ease of measurement from atmospheric pressure and high cost performance. It can be used in various industries, including food, automotive, and pharmaceuticals, for measuring in the low to medium vacuum range and for integration into various systems. 【Features】 ■ Good reproducibility and low price ■ Measurement range from 5×10^-2 Pa to atmospheric pressure ■ Suitable for measuring in the low to medium vacuum range *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment

The Pirani gauge "M-351PG" uses Ni filament to improve corrosion resistance and is compatible with hard process equipment such as RIE and CVD. It offers good reproducibility at a low price, with no restrictions on installation direction. It can be used in various devices, including semiconductor and electronic device manufacturing equipment, as well as food and pharmaceutical manufacturing equipment. 【Features】 - Improved corrosion resistance (such as the use of Ni filament) - Good reproducibility at a low price - Operating range from 5×10^-2 Pa to atmospheric pressure - No restrictions on installation direction *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment

The M-370CG is a robust cold cathode gauge (cold cathode ionization vacuum gauge) that does not use thermal filaments. It achieves stable pressure measurement from high vacuum to ultra-high vacuum. With excellent measurement stability, it reduces measurement interruptions due to discharge and fluctuations in pressure readings. 【Features】 ■ Good start-up performance under high vacuum ■ Eliminates discharge and discharge delay ■ Easy maintenance with only parts replacement required *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment

The M-361CP is a combination gauge that integrates a Pirani gauge for measuring atmospheric pressure to medium vacuum and a cold cathode gauge for measuring high to ultra-high vacuum. It can measure a wide pressure range with a single unit, contributing to cost reduction and reduced management burden for the system by serving dual purposes. Additionally, it features easy maintenance with only parts replacement required. 【Features】 ■ Improved measurement stability - The newly developed discharge assist function reduces switching failures between the Pirani and cold cathode, as well as measurement interruptions due to lack of discharge. ■ Achieves excellent atmospheric pressure detection (compared to our products) - The Pirani gauge equipped in this device has improved stability and reproducibility near atmospheric pressure. *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment