東京電子 List of Products and Services

"0.2% BeCu" is a vacuum structural material with good thermal conductivity, low thermal emissivity, and suppresses outgassing. It is suitable for applications such as vacuum chambers requiring ultra-high vacuum environments, materials for analysis rooms in high-precision analytical devices, materials for ion sources in mass spectrometers, areas of devices that dislike outgassing near heat sources, sections requiring low temperatures, areas needing simplification and miniaturization of cooling equipment, and devices that require reduced time to reach vacuum and high throughput. 【Features】 ■ Good thermal conductivity and low thermal emissivity ■ Suppresses outgassing to the extreme ■ Achieves ultra-high vacuum pressures ■ Reduces evacuation time ■ Simplifies cooling equipment ■ Capable of 300°C baking ■ Compatible with copper gaskets *For more details, please download the PDF or feel free to contact us.

• alloy

Our company offers a service for gas analysis (leak measurement) of samples received from customers using a high-precision quadrupole mass spectrometry system. We employ a vacuum structural material made of 0.2% BeCu alloy with "low gas release" in our analytical equipment, enabling the detection of extremely small leaks below 10^-15 Pa·m³/s (He) through destructive testing of the device. We conduct gas analysis of the interior of sealed devices and the interface of bonded wafers. This contributes to failure analysis, quality improvement, and quality control of semiconductor devices. 【Measurement Examples】 ■ Measurement of residual and released gases between each layer of semiconductor chips ■ Measurement of gas release from semiconductor wafer substrates ■ Gas analysis of the bonded wafer interface ■ Measurement of residual gases within MEMS device chips ■ Ultra-small leak checks of sealed devices *In addition to introducing this service, you can view materials that explain the analytical system by downloading the PDF. Please feel free to contact us with any inquiries.

• Other semiconductor manufacturing equipment

A completely new vacuum structural material, 0.2% BeCu! Traditionally, stainless steel (SUS) has been the standard material for vacuum structures. However, SUS has poor thermal properties and tends to heat up, resulting in significant gas release. In contrast, the 0.2% beryllium copper alloy (BeCu) has excellent thermal properties and, with its special surface treatment, minimizes outgassing to an extreme level, creating an ultra-clean environment! It excels in advanced semiconductor manufacturing and high-precision analysis! If you are struggling with gas release in a vacuum, please try Tokyo Electron's 0.2% BeCu!

• Vacuum Equipment

This is a NEG pump with a small nipple NEG cartridge inserted into a vacuum container made of 0.2% BeCu alloy. Activation is performed using a spiral tantalum heater placed in the center. The low emissivity and high thermal conductivity of the copper alloy allow for a reduction in gas (hydrogen) release from the pump itself to as little as 1/10 of that of conventional NEG pumps. The power required during activation at 450°C is 22W for the ICF70 type and 50W for the 114 type, making it energy-efficient. Our company refers to the low gas release technology product using 0.2% BeCu alloy as a "magic product," and thus we named this series of NEG pumps the "Magic NEG Pump." The greatest appeal of the Magic NEG Pump is that we can offer it at an ultra-low price for both the CF70 type and the 114 type. Since it is priced as a consumable, it can be tried by customers who are using NEG for the first time.

• Vacuum Equipment

Analysis Application Examples (Accumulation Method) Destructive Analysis - Measurement of residual and emitted gases between each layer of semiconductor chips - Measurement of gas emissions from semiconductor wafer substrates - Measurement of residual gases within MEMS device chips Non-Destructive Analysis - Leak testing and gas emission measurement of sealed devices

• Other inspection equipment and devices

We are pleased to announce that we will be appearing on the digital broadcasting station "Aperza TV" (operated by Aperza Inc.), which is dedicated to engineers involved in manufacturing and research and development! Aperza TV can be viewed for free with prior registration, so please register using the URL below and take this opportunity to watch! ▼ Register here to view the semiconductor and electronic components manufacturing special https://tv.aperza.com/event/92?utm_source=di_10006492 ▽ Detecting extremely small amounts of "residual gas" to prevent degradation of semiconductor chips and automotive sensors https://tv.aperza.com/event/92?webinar=828&utm_source=di_10006492 *Please note that it cannot be viewed on Internet Explorer (recommended viewing browser is Google Chrome).

• Analytical Equipment and Devices

Our company offers a service for gas analysis (leak measurement) of samples received from customers using a high-precision quadrupole mass spectrometry system. We employ a vacuum structural material made of 0.2% BeCu alloy with "low gas emission" in our analytical equipment, enabling the detection of extremely small leaks below 10^-15 Pa·m³/s (He) through destructive testing of the device. This contributes to failure analysis, quality improvement, and quality control of semiconductor devices. [Measurement Examples] ■ Measurement of residual and emitted gases between layers of semiconductor chips ■ Measurement of gas emissions from semiconductor wafer substrates ■ Measurement of residual gases within MEMS device chips ■ Ultra-small leak checks for sealed devices * In addition to introducing this service, you can view materials that explain the analytical system by downloading the PDF. Please feel free to contact us with any inquiries.

• Other semiconductor manufacturing equipment
• Other measurement, recording and measuring instruments

The "WATMASS-MPH DA System" is a new concept gas analysis device that combines the technology of our ultra-low gas emission residual gas analyzer "WATMASS" with the technology of ultra-low gas emission vacuum structural materials (0.2% BeCu alloy). Our ultra-trace gas analysis device "WATMASS-MPH System" is capable of measuring destruction and leak rates (below 10^-15 Pa·m³/s). It is suitable for MEMS, life science devices, and sealing devices such as semiconductors! ★ We also accept various commissioned gas analyses for device evaluation and material evaluation! ★ 【Features】 ■ Ultra-high sensitivity gas analysis device made of 0.2% BeCu alloy ■ Measurement accuracy evaluation obtained from AIST ■ Capable of measuring destruction and leak rates (below 10^-15 Pa·m³/s) ■ Various commissioned gas analyses are also possible *For more details, please refer to the PDF document or feel free to contact us.

• Food Testing/Analysis/Measuring Equipment

A new vacuum structural material that significantly reduces gas release from the inner walls by using BeCu alloy instead of the conventional stainless steel used in vacuum systems! BeCu alloy has a low emissivity and excellent thermal conductivity, allowing it to quickly dissipate even the slight heat it absorbs, thereby reducing the gas release speed to less than 1/10 by suppressing temperature rise. 【Features】 ■ Significantly reduces gas release in vacuum systems ■ Improves achieved vacuum ■ Copper surface is passivated with NiP ■ Capable of baking up to 300°C ■ Copper gaskets can be used *For more details, please refer to the materials available for download in PDF format or feel free to contact us.

• Vacuum Equipment

"WATMASS" is an ultra-low gas release residual gas analyzer that has improved its ion source to perform high-precision residual gas analysis in the range of 10^-7 to 10^-13 Pa. By adopting a thermal cathode ion source and a sensor nipple tube (ICF70) made of 0.2% BeCu with low radiation and high thermal conductivity, it significantly reduces gas release through low power consumption and cooling of the ion source. Additionally, by manufacturing the grid from a platinum-iridium (Pt-Ir) alloy, it reduces ESD gas release. Thorough low gas treatment using an electric furnace eliminates hydrogen and forms an oxidized Be layer. 【Application Examples】 ■ High-precision gas analysis in XHV/UHV ■ Surface analysis ■ Degradation and gas release of semiconductor devices ■ Gas analysis generated by light stimulation and electron stimulation ■ Trace gas analysis (TDS/Out Gas) ■ Gas analysis of sealed devices/MEMS and leak testing at the level of 10^-17 Pa·m³/s ■ Helium permeability testing of glass and micro-bubble gas analysis *For more details, please refer to the PDF document or feel free to contact us.

• Analytical Equipment and Devices

In the rapidly changing environment surrounding automobiles, MEMS sensor devices for automotive electronics have become extremely important and are required to have high reliability. Even a slight gas intrusion (leak) into MEMS sensor devices (sealed devices) can lead to degradation and significantly compromise reliability. To ensure reliability, ultra-small leak measurements of 10^-15 Pa·m³/s (He) through destructive testing are required. [Commonly Used Automotive Electronics (Excerpt)] ■ Airflow Meter ■ Accelerator Sensor ■ Pressure Sensor ■ Steering Sensor ■ Millimeter-Wave Radar *For more details, please refer to the PDF materials or feel free to contact us.

• Analytical Equipment and Devices

When it comes to vacuum structural materials, stainless steel and titanium are common, but they have a very high absorption rate for thermal radiation (from infrared to visible light) and are metals that do not conduct heat well. As a result, once heat is absorbed, it does not easily escape, causing the temperature of vacuum chambers and flanges to rise, which leads to a significant increase in gas release. Beryllium copper, on the other hand, has an extremely high thermal conductivity and a low thermal emissivity, which prevents it from reaching high temperatures and greatly reduces gas release. Additionally, by incorporating beryllium, it becomes harder, allowing for the use of copper gaskets, making it a suitable material for use in ultra-high vacuum conditions.

• Other metal materials

We would like to introduce the lineup of Tokyo Electric, which enables diverse mass spectrometry. Specifically, the following types of mass analysis will be possible. 【Features】 ■ Ultra-trace gas analysis at E-15 Pa·m3/sec ■ High-precision mass analysis at E-13 Pa range under ultra-high vacuum ■ High-precision measurement of elements and compounds ■ Real-time analysis at atmospheric pressure (such as exhaled air and combustion gases) *For detailed mechanisms of diverse and high-precision mass analysis, please download the PDF for more information.

• Analytical Equipment and Devices

The INFICON CPM Compact Process Monitor is a compact mass spectrometer (gas analyzer) equipped with all functions, making it ideal for in-situ monitoring of complex processes. Additionally, the dried exhaust system utilizes the proven technology of the INFICON Transpector system to achieve an even higher level of performance.

• Analytical Equipment and Devices

The "Magical Nipple/Cube/Chamber" uses BeCu alloy as a material, replacing the stainless steel traditionally used in vacuum systems, significantly reducing gas release from the inner walls with a new vacuum structural material. BeCu alloy has a low emissivity and excellent thermal conductivity, allowing it to quickly dissipate even a small amount of absorbed heat, thereby reducing the gas release speed to less than 1/10 by suppressing temperature rise. 【Features】 ■Improved ultimate vacuum ■Copper surface is NiP passivated ■Capable of baking up to 300°C ■Copper gaskets can be used *For more details, please refer to the materials available for download in PDF format or feel free to contact us.

• Other semiconductor manufacturing equipment
• Vacuum Equipment

The "Magical Nipple/Cube/Chamber" uses BeCu alloy as a material, replacing the stainless steel traditionally used in vacuum systems, significantly reducing gas release from the inner walls with a new vacuum structural material. BeCu alloy has a low emissivity and excellent thermal conductivity, allowing it to quickly dissipate even the slightest absorbed heat, thereby reducing the gas release speed to less than 1/10 by suppressing temperature rise. ★ We will be exhibiting at "SEMICON Japan 2019" starting December 11 (Wednesday)! 【Features】 ■ Significantly reduces gas release in vacuum systems ■ Improves achieved vacuum ■ Copper surface is NiP passivated ■ Capable of baking up to 300°C ■ Copper gaskets can be used *For more details, please refer to the materials available for download in PDF format or feel free to contact us.

• Vacuum Equipment

The "WATMASS-MPH DA System" is a new concept mass spectrometer that combines the technology of our ultra-low gas emission residual gas analyzer "WATMASS" with the technology of ultra-low gas emission vacuum structural materials (0.2% BeCu alloy). Our ultra-trace gas analysis device "WATMASS-MPH System" is capable of measuring destruction and leak rates (below 10^-15 Pa·m³/s). It is suitable for MEMS, life science devices, and sealing devices such as semiconductors! ★ We also accept various commissioned mass analyses (gas analyses) for device evaluation and material evaluation! ★ 【Features】 ■ Ultra-high sensitivity gas analysis device made of 0.2% BeCu alloy ■ Measurement accuracy evaluation obtained from AIST ■ Capable of measuring destruction and leak rates (below 10^-15 Pa·m³/s) ■ Commissioned mass analyses are also available * For more details, please refer to the PDF document or feel free to contact us.

• Food Testing/Analysis/Measuring Equipment

"WATMASS" is an ultra-low gas release residual gas analyzer (mass spectrometer) that has improved its ion source to perform high-precision residual gas analysis in the range of 10^-7 to 10^-13 Pa. By adopting a thermal cathode ion source and a sensor nipple tube (ICF70) made of 0.2% BeCu with low radiation and high thermal conductivity, it significantly reduces gas release through low power consumption and cooling of the ion source. Additionally, by manufacturing the grid from a platinum-iridium (Pt-Ir) alloy, it reduces ESD gas release. A thorough low gas treatment using an electric furnace eliminates hydrogen emissions and forms a Be oxide layer. 【Application Examples】 ■ High-precision mass analysis in XHV/UHV ■ Surface analysis ■ Degradation and gas release of semiconductor devices ■ Gas analysis (mass spectrometry) generated by light stimulation and electron stimulation ■ Trace gas analysis (TDS/Out Gas) ■ Mass analysis of sealed devices/MEMS and leak testing at the level of 10^-17 Pa·m³/s ■ Helium permeability testing of glass and microbubble gas analysis *For more details, please refer to the PDF materials or feel free to contact us.

• Analytical Equipment and Devices
• Food Testing/Analysis/Measuring Equipment
• others

"The Magical Nipple" is an innovative product that utilizes the properties of a 0.2% BeCu alloy material. Thermal cathode ionization vacuum gauges, such as BA gauges, should feel quite warm near the gauge port when the gauge is lit. Everyone has thought at least once about wanting to turn off the thermal cathode ionization vacuum gauge to lower the vacuum. However, without the vacuum gauge, you cannot know the vacuum inside. In such cases, please try our product. When you set your current BAG or EXG to our product and attach it to the stainless steel gauge port, the gas release from the vacuum gauge magically decreases, even though you haven't done anything to the gauge. [Features] ■ Gas release from the vacuum gauge is reduced to 1/7 ■ Achieved vacuum improves by about one order of magnitude ■ Power consumption is reduced to less than 1/2 ■ Made of 0.2% BeCu alloy ■ Copper surface is treated with NiP passivation *For more details, please refer to the PDF document or feel free to contact us.

• Piping Materials

The "Transpector MPH" is a high-performance residual gas analyzer (mass spectrometer) designed to eliminate process defects, improve yield, and reduce equipment downtime. It features a completely redesigned RGA ion source, incorporating an assembly of two filaments combined with an anode, cathode, and repeller electrodes. The dual filament design, using both main and backup filaments, allows for prolonged sensor use and helps avoid critical system failures. Additionally, the ability to select filaments suitable for specific applications ensures that filament lifespan is not shortened due to the process. 【Features】 ■ Ultra-fast data collection at 1.8 ms per point ■ Standard calibrator (optional) ■ TCP/IP Ethernet connectivity ■ Dual filaments (2) ■ Field-replaceable secondary electron multiplier *For more details, please refer to the PDF document or feel free to contact us.

• Analytical Equipment and Devices

The "3B-Gauge" is a new type of measuring device that comprehensively improves the three measurement limits of soft X-rays, electron impact desorption (ESD), and gas release present in thermal cathode ionization vacuum gauges, enabling pressure measurements down to the 10^-12 Pa range. The electrodes are embedded within a conflated flange (ICF70) made of ultra-low gas release vacuum structural material, a 0.2% BeCu alloy, to achieve low gas release. 【Features】 ■ Comprehensive improvement of the three measurement limits ■ Capable of measuring pressures down to the 10^-12 Pa range ■ Achieves low gas release ■ Flange material: 0.2% BeCu alloy (appearance NiP plated) ■ Current introduction terminals: SUS304, Kovar vacuum terminals *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment

The "Transpector MPS&MPH" achieves industry-leading data collection speed, minimal detection partial pressure, and S/N ratio. Inficon, a world leader in the field of Residual Gas Analyzers (mass spectrometers), offers standard and high-performance RGAs suitable for your vacuum applications. 【Features】 ■ Ultra-fast data collection ■ TCP/IP Ethernet connection ■ Dual filament ■ Filament kit integrating anode, cathode, and repeller ■ Compatible sensors and electronics units (no matching required) ■ Minimization of installation space *For more details, please refer to the PDF materials or feel free to contact us.

• Analytical Equipment and Devices

This is a hybrid vacuum gauge that combines a crystal gauge and a cold cathode gauge, covering wide-band measurements with a single unit. It can measure from atmospheric pressure to high vacuum without the need for switching operations, allowing for space-saving installation dimensions. By simplifying the structure, customers can perform sensor cleaning and sensor replacement themselves, enabling a reduction in downtime for production recovery! 【Features】 ■ Achieves a wide measurement range (10^5Pa to 10^-7Pa) ■ Reduces installation space for the vacuum gauge ■ The low vacuum section employs a crystal gauge for atmospheric pressure detection, achieving excellent stability on the low vacuum side ■ The high vacuum section uses a new, durable structure of CCG ■ Easy maintenance *For more details, please refer to the PDF document or feel free to contact us.

• Evaporation Equipment

This is a hybrid vacuum gauge that combines a crystal gauge and a cold cathode gauge, covering a wide measurement range with a single device. It can measure from atmospheric pressure to high vacuum without the need for switching operations, allowing for space-saving installation dimensions. Thanks to the simplification of its structure, customers can perform sensor cleaning and sensor replacement themselves, enabling a reduction in downtime until production resumes! 【Features】 ■ Achieves a wide measurement range (10?Pa to 10-?Pa) ■ Reduces the installation space for the vacuum gauge ■ The low vacuum section employs a crystal gauge for atmospheric pressure detection, providing excellent stability on the low vacuum side ■ The high vacuum section uses a new durable structure of CCG ■ Easy maintenance *For more details, please refer to the PDF document or feel free to contact us.

• Evaporation Equipment

The "High Voltage Semiconductor Switch" is a power supply device that generates high-speed pulses at high voltage. It connects 90 FETs in series to achieve switching of up to 90kV. The operating frequency allows for pulse operation from DC to 5kHz. Additionally, it has advantages such as low on-resistance and high-speed switching, and it incorporates two 90kV switch units for power supply and discharge. We handle everything from the design and development of the switch unit circuit board, manufacturing and adjustment, to the creation of cooling systems, leading to product commercialization. 【Applications】 ■ Pulse power supply for gyrotrons in fusion devices ■ Pulse power supply for EUV lasers ■ Medical X-ray control ■ Pulse power supply for klystrons in accelerators *For more details, please refer to the PDF document or feel free to contact us.

• Other semiconductors

This is an "Ion Gauge Vacuum Meter" capable of high-precision measurements in a wide vacuum range from 1.33×10^-7 Pa to 6.65 Pa. The display uses a high-brightness, high-definition organic EL, providing high visibility, and allows for easy operation to call up and control various data. Additionally, it comes standard with a variety of interfaces. 【Features】 ■ Wide measurement range (1.33×10^-7 Pa to 6.65 Pa) ■ Easy setup ■ High visibility with organic EL display ■ Compatible with 16 types of gases ■ Standard equipped with two filaments (with protective function to prevent disconnection) *For more details, please refer to the PDF document or feel free to contact us.

• Evaporation Equipment

This is an "Ion Gauge Vacuum Meter" capable of high-precision measurements in a wide vacuum range from 1.33×10^-7 Pa to 6.65 Pa. The display uses a high-brightness, high-definition organic EL, providing high visibility, and allows for easy operation to call up and control various data. Additionally, it comes standard with a variety of interfaces. 【Features】 ■ Wide measurement range (1.33×10^-7 Pa to 6.65 Pa) ■ Easy setup ■ High visibility with organic EL display ■ Supports 16 types of gases ■ Comes standard with two filaments (with protective function to prevent disconnection) *For more details, please refer to the PDF document or feel free to contact us.

• CVD Equipment

Utilizing new technology, the thermal conduction type micro vacuum gauge achieves high vacuum measurement that was previously difficult. With a size of a few hundred microns, it covers the measurement range of the Pirani vacuum gauge.

• Other measurement, recording and measuring instruments

This is a constant temperature Pirani vacuum gauge that automatically adjusts the power supplied to keep the filament, which is deprived of heat, at a constant temperature. Its compact body allows for space-saving when integrated into equipment. The display is in an easy-to-use digital format.

• CVD Equipment

This is a cold cathode gauge controller that can measure pressures ranging from 4.0×10^-7 Pa to 3.0×10^-2 Pa in one range.

• Evaporation Equipment

This is a Pirani vacuum gauge that can measure low vacuum in the range of (1.0×10^-1 Pa) to (1.0×10^4 Pa).

• CVD Equipment