[Analysis Case] Evaluation of the Diffusion Layer of Power Transistors (DMOSFET)
You can understand the positional relationship between the gate layer, source layer, and body layer.
We investigated the shape and positional relationship of the poly-Si gate, n-type source layer, and p-type body layer of commercially available power transistors (DMOSFETs). By overlaying AFM images, we can also understand the positional relationship with the gate.
- Company:一般財団法人材料科学技術振興財団 MST
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