PI Japan Product Lineup

In the field of measurement, calibration and fine positioning require high reproducibility and stable positioning performance. Especially in measurements and alignments at the nanoscale, even slight backlash or friction can affect the reliability of the measurement results. The P-517/P-527 multi-axis piezo scanner adopts an integrated structure with frictionless flexure guides, minimizing hysteresis and mechanical play. With nanometer-level resolution and high reproducibility, it contributes to improving the accuracy of calibration work and precise measurements. Stable operating characteristics also contribute to ensuring long-term measurement reliability. 【Application Scenarios】 - Optical inspection equipment - Wafer inspection and measurement equipment - Nano-positioning applications - Precision measurement systems - Microscopes and scanning systems 【Benefits of Implementation】 - Improved calibration accuracy due to high reproducibility - Stable measurement environment due to frictionless structure - Enhanced reliability of measurement data and strengthened quality control

• Other industrial robots
• Piezoelectric Devices
• Actuator

In the field of precision machining, further miniaturization and quality enhancement are progressing, with positioning accuracy at the nano level becoming a crucial factor that influences product performance. Particularly in laser processing and micro-patterning, even slight errors caused by vibrations and friction directly affect processing quality. The P-517/P-527 multi-axis piezo scanner adopts a frictionless flexure guide integrated structure, eliminating backlash and wear. With PICMA piezo ceramics and high-resolution capacitive sensors, it achieves nano-level reproducibility and high dynamics. Its stable high-speed response enables precise position control in micro-machining, contributing to improved processing quality and yield. 【Application Scenarios】 - Laser micro-machining equipment - Micro-patterning - Wafer processing and inspection equipment - Nano-positioning applications - Precision measurement and machining systems 【Benefits of Implementation】 - Nano-level high-precision machining control - Improved processing quality due to stable operation - Reduced processing time and increased productivity - Cost reduction through improved yield

• Other industrial robots
• Piezoelectric Devices
• Actuator

Positioning in the field of optics is a very important factor in high-precision measurement, inspection, and microfabrication. In particular, the adjustment of the position of optical components such as lenses and mirrors is a critical challenge that affects the performance of the system. Conventional mechanical positioning methods have limitations in accuracy due to friction and backlash, making high-precision positioning difficult in some cases. The P-517/527 multi-axis piezo scanner addresses these challenges in the positioning of optical components with its nano-level resolution and reproducibility. 【Application Scenarios】 - Optical inspection - Wafer inspection - Nano positioning - Measurement - Microscopy 【Benefits of Implementation】 - High-precision positioning with sub-nanometer resolution - Stable operation with frictionless flexure guides - High linearity with capacitive sensors - Capability for transmitted light measurement with a 50 x 50 mm aperture

• Other industrial robots
• Piezoelectric Devices
• Actuator

The P-517/527 multi-axis piezo scanner uses zero-wear flexure guides, PICMA piezo ceramics, and capacitive sensors to achieve nanometer-level reproducibility and resolution. The available motion axes include XY, XYZ, and XYθz types. The XY axis has options of 100µm and 200µm, the Z axis is 20µm, and θz is 2mrad. It has a load capacity of 50N, making it ideal for applications such as optical inspection, wafer inspection, nanopositioning, measurement, and microscopy. It also allows for transmitted light with an aperture of 50 × 50mm. *For more details, please download the PDF or contact us.

• Other industrial robots
• Piezoelectric Devices
• Actuator

In the field of nanotechnology, precise manipulation at the nanoscale is required. In particular, accurate positioning and stable operation are essential for manipulating materials at the atomic level and for manufacturing fine structures. Conventional technologies have faced challenges due to their susceptibility to environmental changes, making it difficult to maintain precision. The multi-layer PICMA® piezo actuators P-882 and P-888 address these challenges. 【Application Scenarios】 - Scanning Probe Microscopy (SPM) - Nanoindentation - Microfabrication - Precision adjustment of optical systems - Semiconductor manufacturing equipment 【Benefits of Implementation】 - High-precision operation with sub-nanometer resolution - Stable operation in harsh environments - Reduced maintenance costs due to longer lifespan - Flexible system construction through diverse shapes and custom options - Achievement of high throughput

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the field of precision measurement, measurements requiring nanometer-level accuracy and those conducted in harsh environments are essential. Various external factors, such as temperature changes, vibrations, and vacuum conditions, can affect measurement accuracy, making stable operation and high durability crucial. The PICMA(R) multilayer piezo actuator P-882 and P-888 address these challenges with high rigidity and environmental performance. 【Application Scenes】 - Scanning Probe Microscopes (SPM) - Semiconductor manufacturing equipment - Precision positioning of optical elements 【Benefits of Implementation】 - High-precision positioning with sub-nanometer resolution - Stable operation in harsh environments - Reduced maintenance costs due to increased lifespan

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the field of microscopy, achieving high precision in focusing on the observation target is essential for obtaining clear images. This is particularly important during high magnification observations or dynamic observations, where fine adjustments to the focus are crucial. If the focus is off, it becomes impossible to see the details of the observation target, hindering accurate analysis and research. The PICMA(R) multilayer piezo actuator P-882 and P-888 precisely control the focus of microscopes with sub-nanometer resolution and ultra-high rigidity, providing clear images. 【Application Scenarios】 - Microscope focus adjustment - Cell observation - Material analysis - Semiconductor inspection 【Benefits of Implementation】 - Clear image acquisition through high-precision focus control - Reduction in observation time - Increased efficiency in research and analysis

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the field of life sciences, high-precision manipulation and measurement of cells, tissues, and micro-samples are required. In particular, even slight positional errors and vibrations in microscopic manipulation and measurement systems can affect the reproducibility and reliability of experimental results. The PICMA piezo actuators P-882 and P-888 achieve stable precision control with sub-nanometer resolution and ultra-high rigidity, providing strong support for life science research. 【Application Scenarios】 - Precise manipulation of cells and samples under a microscope - Control of micromanipulators and stages - Integration into bio-measurement and interferometer systems 【Benefits of Implementation】 - Improved reproducibility of experiments and measurements - Stabilization of fine manipulation - Enhanced research efficiency

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the field of optics, high-precision positioning and fine-tuning are required. In particular, the adjustment of the position of lenses and mirrors is a crucial factor that affects the performance of optical systems. Even a slight misalignment can lead to a decrease in image quality or a deterioration in measurement accuracy. The multi-layer PICMA® piezo actuators P-882 and P-888 achieve precise positioning and fine-tuning of optical systems with sub-nanometer resolution and ultra-high rigidity. 【Application Scenarios】 - Wavefront correction of optical systems - Fine adjustment of lenses and mirrors - Control of reference mirrors for interferometers - Stabilization of laser optical systems 【Benefits of Implementation】 - Improved optical performance through high-precision positioning - Fine adjustments enabled by sub-nanometer resolution - Long lifespan and high reliability - Stable operation in harsh environments

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

The PICMA(R) multi-layer piezo actuator P-882 and P-888 are strong against humidity and electrolytic corrosion due to their ceramic insulation structure, and they exhibit excellent temperature stability. Custom options allow for high-temperature resistance up to 200 degrees, support for high currents up to 20 A, and modifications in shape such as perforated, circular, and rectangular designs. Additionally, they are compatible with UHV 10⁻⁹ hPa, have no outgassing, can withstand high bake temperatures, and operate in harsh environments such as vacuum systems and cryogenic conditions. In addition to a wide variety of sizes and shapes, custom specifications and integrated sensor models are also available. *For more details, please contact us or refer to the catalog.*

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In optical field adjustment work, even a slight misalignment of the optical axis can significantly impact system performance. Particularly in situations requiring fine positional adjustments, high resolution, excellent linearity, and reproducibility are essential. Inaccurate positioning can lead to a decline in optical performance and measurement errors. This nanopositioner achieves a high resolution of up to 0.1 nm and excellent linearity of 0.02%. Furthermore, it supports variable stroke and multi-axis configurations (X, XY, Z, XYZ), allowing for flexible system construction tailored to specific applications. Direct position measurement using non-contact sensors and zero backlash flexure guides ensure high stability and reproducibility, maximizing the performance of optical systems. [Application Scenarios] - Scanning of microscope samples - Optical alignment - Interferometric measurements [Benefits of Implementation] - Improved optical system performance through high-precision positioning - Enhanced measurement accuracy - Improved work efficiency

• Actuator
• Piezoelectric Devices
• encoder

In the field of microscopy, precise scanning of samples is required. Especially in high-magnification observations and analysis of fine structures, accurate positioning is essential. Misalignment can lead to degradation of the observed image and a decrease in measurement accuracy. The PIHera P-620.1/629.1 series addresses these challenges with 0.1 nm resolution and high-precision positioning. 【Application Scenes】 - Scanning of microscope samples - Optical alignment - Interferometric measurements 【Benefits of Implementation】 - High-precision observation and measurement - Accurate analysis of fine structures - Improved experimental efficiency You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

• Actuator
• Piezoelectric Devices
• encoder

In the field of biotechnology, particularly in cell manipulation, precise positioning is required while minimizing damage to the cells. Nano-level accuracy is essential for elucidating biological phenomena, such as in cell culture, microscopic observation, and microinjection. Inaccurate positioning can lead to experimental failures and decreased reliability of data. PI's 0.1nm resolution nanopositioner enables precise positioning in cell manipulation, contributing to increased efficiency and accuracy in research. 【Application Scenarios】 - Cell culture - Microscopic observation - Microinjection - Cell selection 【Effects of Implementation】 - Minimizing damage to cells and improving the success rate of experiments - Enhancing the reliability of experimental data through accurate positioning - Achieving greater efficiency in research and more detailed observations

• Actuator
• Piezoelectric Devices
• encoder

In the field of nanotechnology measurement, precise positioning is extremely important. Observing fine structures, performing precise machining, and conducting advanced experiments require nanometer-level accuracy. Positioning errors can compromise the reliability of measurement results and hinder research progress. PI's 0.1nm resolution nanopositioner achieves high-precision positioning through built-in capacitive sensors and flexure guides, addressing these challenges. 【Application Scenarios】 - Scanning microscope samples - Optical alignment - Interferometric measurement 【Benefits of Implementation】 - Acquisition of high-precision measurement data - Improved reproducibility of experiments - Enhanced efficiency in research and development

• Actuator
• Piezoelectric Devices
• encoder

In the semiconductor industry, high-precision positioning is essential due to the miniaturization of manufacturing processes. Particularly in wafer inspection and exposure processes, even slight positional deviations can significantly affect product quality. The P-620.1/629.1 addresses these challenges and achieves high-precision positioning. With its built-in capacitive sensor, it achieves a linearity error of 0.02%, contributing to improved yield in semiconductor manufacturing. 【Application Scenarios】 - Wafer inspection - Exposure processes - Optical alignment - Interferometric measurement 【Benefits of Implementation】 - Quality improvement through high-precision positioning - Increased yield - Streamlined manufacturing processes For detailed product specifications, please refer to the catalog. If you have any questions, please feel free to contact us.

• Actuator
• Piezoelectric Devices
• encoder

The PIHera P-620.1/629.1 series is a one-axis nanopositioner that combines a flexure guide with PICMA® piezo technology. It has a stroke range of 50 to 1800 µm, a minimum resolution of 0.1 nm, and achieves a linearity error of 0.02% by measuring the actual moving parts with an integrated capacitive sensor. The flexure guide has no wear parts, offers high rigidity, excellent straightness, and outstanding long-term stability. It can also be expanded to X, XY, Z, and XYZ configurations, making it ideal for applications such as microscope sample scanning, optical alignment, and interferometric measurements. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• encoder

In the field of photonics, alignment work requires precise positioning of components such as optical fibers and lenses. In particular, misalignment of the optical axis can significantly affect measurement accuracy and efficiency, making precise positioning at the nano level crucial. The Z-Chip Tilt Aperture Piezo Stage P-5x8 addresses these challenges by contributing to high-precision positioning and enabling transmission light measurement through its wide aperture. 【Application Scenarios】 - Optical fiber alignment - Lens alignment - Interferometric measurement - Transmission light applications 【Benefits of Implementation】 - Improved alignment accuracy through precise positioning at the nano level - Enhanced efficiency of transmission light measurement with a 66mm x 66mm aperture - Increased longevity due to high-reliability PICMA piezo ceramics - High linearity achieved with capacitive sensors

• Actuator
• Piezoelectric Devices
• encoder

In the field of precision measurement, even slight positional shifts or angular errors can significantly impact measurement results. This is especially true for the evaluation of fine structures and measurements using transmitted light, where nanometer-level resolution, high stability, and sufficient aperture diameter are required. The P-518/P-528 series is a high-precision piezo stage that combines a Z-axis stroke of 100µm/200µm with chip tilt control. Its large aperture design of 66mm accommodates transmitted light measurements, achieving high linearity and reproducibility. This contributes to improved reliability in precision measurements and alignment processes. [Application Scenarios] - Semiconductor inspection and evaluation equipment - Photonics/optical measurements - Microscope/interferometer systems - High-precision alignment applications [Benefits of Implementation] - High-precision Z and angular adjustments at the nanometer level - Compatibility with transmitted light measurements due to the 66mm aperture - Enhanced measurement reliability through high linearity and stability

• Actuator
• Piezoelectric Devices
• encoder

In scanning microscopy, even slight misalignments or tilts of the sample or objective lens can significantly affect the resolution and contrast of the image. This is especially critical in high-magnification observations and fine structure analyses, where nanometer-level Z control, angle correction, and high stability are essential. The P-518/P-528 series is a high-precision piezo stage that combines Z-axis strokes of 100µm/200µm with chip tilt control. Its large aperture design of 66mm accommodates transmitted observations. With high linearity and reproducibility, it enables the acquisition of high-quality images with minimized blur and distortion, contributing to the performance enhancement of microscopy systems. 【Application Scenes】 - Confocal microscopy - Fluorescence microscopy - Scanning probe microscopy (SPM) - Cell and live cell observation - Material and fine structure analysis 【Benefits of Implementation】 - High-precision Z scanning at the nanometer level - Stabilization of images through chip tilt correction - 66mm aperture for transmitted observations - Improved high-resolution image acquisition and reproducibility - Enhanced research and development efficiency

• Actuator
• Piezoelectric Devices
• encoder

In optical system adjustments, even a slight misalignment of the optical axis can significantly impact resolution and measurement accuracy. This is especially critical in applications such as interferometers, high-resolution microscopes, and precision alignment, where nano-level Z control and tip-tilt adjustments are essential. The P-518/P-528 series achieves high-precision control with Z-axis strokes of 100µm/200µm and tip-tilt of 1mrad/2mrad. Its large aperture design of 66mm makes it ideal for transmitted light applications. The high-rigidity flexure guide structure ensures stable reproducibility, contributing to improved accuracy and efficiency in optical adjustment tasks. 【Application Scenarios】 - Adjustment of microscope objective lenses and samples - Optical fiber alignment - Interferometer and wavefront measurement systems - Semiconductor inspection equipment 【Benefits of Implementation】 - Nano-level Z and angle adjustments - Flexible adaptation to transmitted light optical systems - Improved measurement accuracy through stable optical axis maintenance - Enhanced work efficiency due to reduced adjustment time

• Actuator
• Piezoelectric Devices
• encoder

The P-5x8 series features the piezo nano stage P-518.TCD with chip tilt and the long-stroke version P-528.TCD/ZCD, both developed on the same platform. It achieves a system resolution of 0.8 nm and a linearity error of 0.03% using highly reliable PICMA piezo ceramics, flexure guides, parallel kinematics, and capacitive sensors. The large aperture of 66 × 66 mm is suitable for interferometric measurements and transmitted light applications, with a load capacity of 50N, making it ideal for semiconductor testing, photonics, microscopy, and high-precision alignment. *For more details, please download the PDF or contact us.

• Actuator
• Piezoelectric Devices
• encoder

The P-752 is a high-precision piezo nano positioning stage with a maximum stroke of 35 µm and a maximum resolution of 0.1 nm. Its flexure guide structure and high-resolution capacitive sensors (closed-loop specification) achieve high reproducibility and stability while minimizing the effects of hysteresis. It provides reliable positioning performance in the field of biotechnology, where nanometer precision is required for applications such as cellular-level observation and manipulation of fine samples. 【Application Scenarios】 - Precision focusing in fluorescence microscopy and confocal microscopy - Nanoscale position control of cells and organoids - Micromanipulation - Biosensor evaluation and nano-level alignment 【Benefits of Implementation】 - High-precision positioning with a maximum resolution of 0.1 nm - High reproducibility and stability through closed-loop control - Compatibility for integration into microscopes and analytical devices due to compact design - Improved measurement efficiency through fast response

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the field of measurement and evaluation, calibration and micro-positioning require nanometer-level resolution and high positional reproducibility. The P-752 is a linear piezo flexure stage equipped with a maximum stroke of 35 µm and a minimum resolution of 0.1 nm (when used with an appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash, achieving high straightness. This supports stable micro-positioning in the calibration and evaluation processes of precision measurement instruments. 【Application Scenarios】 - Calibration and performance evaluation of precision measurement instruments - Alignment and positional correction of optical systems - Micro-displacement control in sensor evaluation and material testing 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Stabilization of measurement accuracy through stable micro-displacement control

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the field of nanotechnology, the fabrication and evaluation of structures require positioning resolution at the nanometer level and high reproducibility. The P-752 is a linear piezo flexure stage equipped with a maximum stroke of 35 µm and a minimum resolution of 0.1 nm (when used with the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash, achieving high straightness. It provides stable micro-displacement control for research and development applications that require positioning control at the nanoscale. 【Application Scenarios】 - Micro-positioning in nanostructure fabrication - Sample/probe position control in scanning probe microscopy (SPM) - Precision alignment in microfabrication processes - Evaluation of nanomaterials and surface analysis 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Stabilization of micro-displacement control

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

The P-752 is an excellent single-axis nanopositioning stage with a flexure guide structure that incorporates a two-electrode capacitive sensor, achieving zero friction and outstanding straightness (pitch and yaw error ±1μrad), with an open-loop resolution of 0.1nm. Additionally, the built-in capacitive sensor measures the actual moving parts non-contactly at a sub-nanometer level, providing higher linearity and hysteresis compensation, ensuring long-term stability. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In optical field adjustment work, high-precision positioning of the optical axis is required. Particularly in the arrangement of optical elements that require fine adjustments, even slight positional deviations can cause light loss and measurement errors, affecting the performance and quality of the final product. The XZ/XYZ nanopositioner achieves a compact design with a 44mm square footprint, while providing a maximum stroke of 120µm and a high resolution of 0.2nm. Its zero-backlash flexure guide mechanism enables highly reproducible precise positioning. Furthermore, the adoption of PICMA® piezo actuators ensures high reliability and long lifespan. [Application Scenes] - Adjustment of microscope objective lenses - Fiber alignment - Positioning of optical elements [Benefits of Implementation] - Improved measurement accuracy through high-precision positioning - Increased work efficiency - Stabilization of product quality

• Piezoelectric Devices
• Actuator
• encoder

In semiconductor manufacturing processes, precise positioning at the nanometer level is required during wafer processing and inspection stages. Especially in semiconductor processes where miniaturization is advancing, positioning accuracy significantly impacts product quality and yield. The P-611.XZ / P-611.2 is a piezo nano-positioner that achieves a maximum travel range of 120 µm and a high resolution of 0.2 nm, all within a compact design of 44 mm × 44 mm. With its high-precision flexure guide mechanism and PICMA(R) piezo actuators, it enables stable nano-positioning in semiconductor manufacturing and inspection equipment. 【Application Scenarios】 - Semiconductor manufacturing equipment - Wafer inspection equipment - Nano fabrication and micro fabrication equipment - Optical alignment equipment 【Benefits of Implementation】 - Improved yield through nano-level positioning - Enhanced inspection accuracy through high-precision positioning - Easier integration into equipment due to compact design - Stable process control due to high reproducibility

• Piezoelectric Devices
• Actuator
• encoder

The P-611.1 piezo stage is a flexure guide nanopositioning system with a footprint of just 44 x 44 mm. 【Features】 ○ Compact design: footprint of 44 x 44 mm ○ Stroke up to 120 x 120 μm ○ Resolution up to 0.2 nm ○ Low-cost mechanical/electronic system configuration ○ Frictionless precision flexure guide system ○ Remarkable long lifespan with PICMA(TM) piezo actuators ○ Available in X, Z, and XYZ versions ● For more details, please contact us or refer to the catalog.

• Piezoelectric Devices
• Actuator
• encoder

In optical systems, fine angle adjustments of light beams and optical axis control are crucial factors that influence performance. Particularly in fields such as laser processing, optical communication, and beam control, high-speed and high-precision angle control is required. The S-330 piezo chip/tilt platform is a Tip/Tilt stage that achieves high-speed response and high resolution through piezo actuators. With sub-millisecond response and excellent position stability, it is ideal for high-speed steering mirror applications and precise optical alignment. 【Application Scenarios】 - Precise angle control of laser beams - Optical fiber alignment - Optical axis adjustment in optical microscopes - Beam steering/beam stabilization 【Benefits of Implementation】 - Reduced adjustment time due to high-speed response - Increased precision of optical systems due to high resolution - Improved device performance through dynamic control

• Laser Components

The S-330 piezo chip/tilt platform is a high-speed and compact chip/tilt unit that accurately realizes the angular movement of the top platform around two orthogonal axes. 【Features】 ○ Resolution up to 20 nrad, excellent position stability ○ Light beam deflection up to 20 mrad (>1°) ○ Improved dynamics, stability, and linearity through parallel control design ○ Same-plane rotation axis and fixed pivot point to avoid polar rotation ○ Sub-millisecond response ○ For mirrors with a maximum diameter of 50 mm ○ Closed-loop version for improved linearity ○ Excellent temperature stability ● For more details, please contact us or refer to the catalog.

• Laser Components

In the field of microscopic observation, precise positioning of samples and control of fine movements are essential for obtaining clear images. Particularly in high-magnification observations and analysis of microstructures, nanometer-level precision is required. Even slight misalignments or vibrations in positioning can significantly impact the observation results and hinder accurate data acquisition. The P-734 addresses these challenges with high-precision positioning and high-speed operation. 【Application Scenes】 - Optical Microscopes - Scanning Microscopes - Surface Shape Analysis 【Benefits of Implementation】 - Acquisition of high-precision observation images - Accurate analysis of microstructures - Reduction of observation time For detailed product specifications, please refer to the catalog. If you have any questions, please feel free to contact us.

• Actuator
• Piezoelectric Devices
• encoder

The P-734 high dynamic XY piezo nano positioning stage achieves a linear stroke of 100 x 100 μm with sub-nanometer resolution and high flatness of motion. 【Features】 ○ Ultra-precise trajectory control ideal for surface shape analysis and scanning microscopy ○ Improved responsiveness through parallel control/measurement and multi-axis precision control ○ Stroke: 100 x 100 μm, center opening of 56 x 56 mm ○ Achieves a resolution of 0.4 nm with capacitive sensors ○ Incredible long lifespan with PICMA(TM) piezo actuators ● For more details, please contact us or refer to the catalog.

• Actuator
• Piezoelectric Devices
• encoder

In the field of precision machinery assembly, the accurate positioning of components affects the quality of the product. Particularly in the assembly of fine parts, high-precision positioning is required. Low positioning accuracy can lead to product defects and increased assembly time. The P-611.1 piezo nanopositioner, while being low-cost and featuring a compact design of 44 x 44 mm, achieves a resolution of 0.2 nm and a maximum stroke of 120 µm. Its high-speed response due to the piezo actuator enables high-precision and stable positioning at the nanoscale, contributing to the advancement of fine assembly processes. 【Application Scenarios】 - Precise positioning of fine components - High-speed assembly of small parts - High-precision inspection processes 【Benefits of Implementation】 - Improved assembly accuracy - Reduced defect rates - Shortened assembly time

• Actuator
• Piezoelectric Devices
• encoder

In scanning applications of microscopes, high precision positioning and stability are required. Especially in the observation and image acquisition of fine structures, accurate position control at the nano level is essential. If the positioning accuracy is low, there is a risk of missing the observation target or reducing the resolution of the images. The P-611.1 piezo nanopositioner is ideal for microscope scanning applications due to its compact design and high precision positioning performance. 【Usage Scenarios】 - Microscope observation - Scanning electron microscopy - Precision positioning of samples 【Benefits of Implementation】 - Improved observation accuracy through high precision positioning - Effective use of installation space due to compact design - Cost-effective implementation

• Actuator
• Piezoelectric Devices
• encoder

In the semiconductor industry, as manufacturing processes become more advanced, high precision in the positioning of wafers and masks is required. Particularly in fine processing and inspection processes, positioning accuracy at the nanometer level affects product quality. Conventional systems have faced challenges such as large size and high costs. The P-611.1 piezo nano-positioner achieves precise positioning in semiconductor manufacturing at a low cost, with a compact design occupying only 44 x 44 mm, while providing a maximum stroke of 120 μm and a resolution of 0.2 nm. 【Application Scenarios】 - Wafer probing - Mask alignment - Fine processing - Inspection processes 【Benefits of Implementation】 - Improved yield through high-precision positioning - Space-saving due to equipment miniaturization - Enhanced return on investment through cost reduction

• Actuator
• Piezoelectric Devices
• encoder

The P-611.1 piezo stage is a flexure guide nanopositioning system with a footprint of just 44 x 44 mm. 【Features】 ○ Compact design: footprint of only 44 x 44 mm ○ Stroke up to 120 μm ○ Resolution up to 0.2 nm ○ Low-cost mechanism/electronic system configuration ○ Incredible long lifespan with PICMA(TM) piezo actuators ○ Available in Z stage, XY, XZ, and XYZ versions ● For more details, please contact us or refer to the catalog.

• Actuator
• Piezoelectric Devices
• encoder

In semiconductor manufacturing equipment and inspection devices, high-precision positioning at the nanometer level significantly impacts product quality and yield. In particular, slight positioning errors in fine processing, wafer inspection, and measurement processes can lead to a decline in device performance or defects. The N-111 is a linear actuator that utilizes PI's proprietary NEXLINE(R) PiezoWalk(R) walking drive technology. It achieves high resolution at the nanometer level while maintaining a long stroke, enabling high-precision positioning in semiconductor manufacturing equipment and precision inspection devices. 【Application Scenarios】 - Semiconductor manufacturing equipment - Wafer inspection equipment - Nano measurement devices - Fine processing equipment - Precision positioning applications 【Benefits of Implementation】 - Improved quality through high-precision positioning - Increased yield - Enhanced productivity

• Actuator
• Linear motor
• Piezoelectric Devices

The N-111 NEXLINE(R) OEM drive is a compact nano-positioning actuator with a stroke of up to 5mm, high resolution, and a generated force of up to 40N. 【Features】 ○ Stroke: 5mm ○ Resolution: 0.025nm (open loop) and 5nm (closed loop) ○ Push-pull force up to 40N and holding force of 60N ○ Automatic locking when stationary, no heat generation ○ Non-magnetic and vacuum-compatible operating principle ● For more details, please contact us or refer to the catalog.

• Actuator
• Linear motor
• Piezoelectric Devices

In the field of photonics, positioning of optical elements and optical fibers requires nanometer-level resolution and high reproducibility. The P-753 LISA is a compact linear piezo stage equipped with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when using the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It provides stable nanopositioning for optical alignment and micro-position correction applications. 【Application Scenarios】 - Optical fiber alignment - Optical fiber alignment - Fine adjustment and position correction of optical elements - Precision positioning of laser beam paths - Evaluation of photonic devices 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Suitability for device integration due to compact design

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the field of precision measurement, calibration and micro-positioning corrections require nanometer-level resolution and high reproducibility. The P-753 LISA is a linear piezo stage equipped with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when using the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It provides stable nanopositioning for calibration processes of measuring instruments and micro-displacement control applications. 【Usage Scenarios】 - Calibration of precision measurement instruments - Micro-position adjustments in sensor evaluation - Reference movement in displacement and position measurement systems - Fine-tuning of optical measurement systems 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Stabilization of micro-displacement control - Suitability for device integration due to compact design

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the field of biotechnology, cell observation and micromanipulation require positioning stages that can stably control minute displacements. The P-753 LISA is a compact linear piezo stage equipped with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when used with an appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It supports nanometer-level positioning for integration into microscope systems and for fine adjustment of small samples. 【Application Scenarios】 - Fine adjustment of samples under a microscope - Focus and position correction during cell observation - Micromanipulation applications - Precision positioning of bio-samples 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Suitability for device integration due to compact design

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the field of nanotechnology, positioning mechanisms with nanometer-level resolution and high reproducibility are required. The P-753 LISA is a linear piezo stage equipped with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when used with the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It is suitable for research and development applications that require sample positioning adjustments and micro-displacement control at the nanoscale. 【Application Scenarios】 - Position control for scanning probe microscopy (SPM) - Micro-positioning in nano-lithography - Precision alignment in microfabrication processes - Evaluation of nanomaterials and surface analysis 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Compact design suitable for device integration - Stable micro-displacement control

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In microscopy applications, a stage that can stably position samples and optical systems at the nanometer level is required. The P-753 LISA is a linear piezo stage with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when using the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It is suitable for micro-scanning and position correction of samples in microscopy systems. 【Usage Scenarios】 - Micro-scanning of samples using a microscope - Fine adjustment of focus position - Position correction during high-resolution observation Positioning at micro and nano scales 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Compact design suitable for device integration - Stable control of minute displacements

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In optical system adjustments, it is required to stably control the optical axis and the positions of optical elements with minute precision. The P-753 LISA is a linear piezo stage equipped with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when using the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It is suitable for micro-position correction and alignment applications in microscopes, laser optical systems, and interferometers. 【Application Scenarios】 - Adjustment of the objective lens position in optical microscopes - Fine-tuning of laser beams - Optical fiber alignment - Slit position adjustment in spectrometers - Mirror position correction in interferometers 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Compact design suitable for device integration - Stabilization of micro-position corrections

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

P-753 is a one-axis piezo nano positioning stage that controls a travel range of 15 to 38 µm with a resolution of 0.1 nm. By measuring the actual movable part with a two-electrode capacitive sensor and utilizing a frictionless structure with flexure guides, it achieves nanometer-level motion and positioning within a few milliseconds. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• Solenoid Actuators