A surface shape inspection machine capable of measuring minute height changes over a wide range! Extremely resistant to vibrations, eliminating the need for vibration isolation tables and devices!
The "CSM & CSYS series" is a laser scanning surface shape inspection machine capable of fast measurements with high sensitivity over a wide measurement range. Utilizing patented technology for "laser surface shape inspection," it inspects "surface shape," "roughness," "waviness," "particles," and "defects" of semiconductor wafers (Si, SiC, GaN, etc.), MEMS, hard disks, functional films for FPDs, and sputtered thin films with high sensitivity, quickly, and over a wide range, displaying "digital data" and "3D image data."
【Features】
■ Non-contact laser scanning for surface shape measurement data display
■ High detection sensitivity allows for fast measurements over a wide range, with digital image display
■ High reliability due to simple optical detection principles and structure
■ Extremely resistant to vibration, eliminating the need for vibration isolation tables or devices
■ Capable of 100% non-destructive inspection in inline processes, with automation support
*For more details, please request documentation or view the PDF data available for download.
