Clean Robot 'SSCR3115S Series'
A clean robot that achieves a small footprint and lightweight design!
The "SSCR3115S series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It allows for a compact device layout. Additionally, due to its small footprint and lightweight design, it is ideal for transporting small wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Maximum load capacity is 0.2 kgf or less at the third joint of the arm (work only) - Equipped with a motion monitor - Control methods include RS232C and parallel photo I/O - All axes use two-phase stepping motors - High-speed and high-precision wafer transport through S-curve acceleration and deceleration control *For more details, please refer to the catalog or feel free to contact us.
- Company:ジェーイーエル
- Price:Other