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robot Product List and Ranking from 899 Manufacturers, Suppliers and Companies | IPROS GMS

Last Updated： Aggregation Period:Jan 28, 2026～Feb 24, 2026
This ranking is based on the number of page views on our site.

robot Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Jan 28, 2026～Feb 24, 2026
This ranking is based on the number of page views on our site.

  1. 鈴与商事 Shizuoka//Trading company/Wholesale
  2. 因幡電機産業 産機カンパニー Osaka//Trading company/Wholesale
  3. ABBジャパン Tokyo//Industrial Electrical Equipment
  4. 4 ABB ロボティクス＆ディスクリート・オートメーション事業本部 - 産業用ロボット関連製品 Tokyo//robot
  5. 5 ロボットバンク Tokyo//robot
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robot Product ranking

Last Updated： Aggregation Period:Jan 28, 2026～Feb 24, 2026
This ranking is based on the number of page views on our site.

  1. Cardboard box stacking robot "Palletizer" 鈴与商事
  2. YAMAHA Collaborative Robot 'Yamaha Motor Cobot' 因幡電機産業 産機カンパニー
  3. Three commercial cleaning robots 水戸工業
  4. 4 Remote Welding Robot System 'WELDEMOTO' *Trademark Registered 高丸工業 西宮工場
  5. 5 Automated valet parking robot and vehicle transport robot for automobile factories. Kantum Ushikata Co., Ltd.

robot Product List

151～180 item / All 3753 items

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Collaborative transport robot 'Souther E Series' for factory labor reduction and efficiency improvement.

Collaborative transport robot 'Souther E Series' for factory labor reduction and efficiency improvement.

Excellent customizability! Building solutions tailored to individual site requirements.

The "Souther E Series" is a collaborative transport robot that can accommodate various levels of automation, from simple button operations to managing multiple devices in a network. It adapts to indoor and outdoor environments, day and night, uneven surfaces, slopes, rainy conditions, and wet floors. Its rich interfaces enable the creation of highly flexible solutions. Additionally, it allows for diverse customization by combining peripheral devices sold by related companies or by manufacturing custom equipment and systems based on provided technical information such as 3D model data and electrical and communication control specifications. **Features** - A variety of automatic driving functions that can be easily switched - Base units that can be selected according to the environment and operation - A wealth of interfaces compatible across all models *For more details, please refer to the catalog or contact Koyama Co., Ltd.*

  • 協働運搬ロボット『サウザーEシリーズ』2.JPG
  • Transport and handling robots
  • robot

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Collaborative Transport Robot "Souther" <Effectively Utilizing Dollies and Carts>

Collaborative Transport Robot "Souther" <Effectively Utilizing Dollies and Carts>

Bringing collaborative transport robots closer to you! We also accommodate customizations such as cargo beds and more.

We design and manufacture various towing devices and carts, such as a 6-wheel cart towing unit and a hand pallet towing unit, that can effectively utilize our collaborative transport robot "Souther" with your existing carts and trolleys. Additionally, we also handle customizations for cargo beds and other requests. If you have any issues regarding the production of towing fittings, carts, or other customizations, please feel free to consult with us. 【Product Lineup (Excerpt)】 ■ 6-wheel cart towing unit ■ 4-wheel cage cart towing unit ■ Hand pallet towing unit ■ Equipped with lithium-ion battery ■ Automatic disconnect towing fitting ■ Anti-wrapping cover *For more details, please refer to the catalog or contact Koyama Co., Ltd.

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  • 協働ロボット『サウザー』8.JPG
  • Transport and handling robots
  • robot

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Automatically transport items! Collaborative transport robot 'Souther'.

Automatically transport items! Collaborative transport robot 'Souther'.

To provide the perfect answer for many customers, Doog's collaborative transport robot product line is equipped with important features!

A high-level solution that perfectly fits your company can be built with just a little customization, without the need to search for or custom-order equipment like "AGVs or AMRs with limited operators, environments, applications, and functions." This is a new mobile robot that can collaborate with everyone in various departments, such as planners/improvement personnel, equipment designers, and operators. **Features** - **Operability**: Easy to understand and intuitive for operators. - **Mobility**: Operates in diverse environments and surface conditions alongside operators. - **Adaptability**: Switches between multiple autonomous driving functions according to site requirements and tasks. - **Scalability**: Pursues both simple operation and advanced system operation. **Lineup** - **E Series**: A high-end model with high customization capabilities. This collaborative transport robot can handle everything from simple button operations to network management of multiple units, adapting to various levels of automation. - **BASIC**: An entry-level model for limited automatic transport. The concept is "buy it and use it as is," and it is a simplified collaborative transport robot with a limited customization interface. *For more details, please refer to the catalog or contact Koyama Co., Ltd.*

  • Transport and handling robots
  • robot

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Screw Tightening Forgetting Prevention Counter for Automobile Manufacturing

Screw Tightening Forgetting Prevention Counter for Automobile Manufacturing

We will eliminate quality defects caused by forgetting to tighten screws and improve production efficiency.

In automobile manufacturing, forgetting to tighten screws or incomplete tightening is a serious issue that can lead to product quality defects and safety problems. Our "Screw Tightening Forgetting Prevention Counter" solves these issues when used in combination with electric screwdrivers, contributing to improved production efficiency. 【Usage Scenarios】 - Screw tightening processes on automobile manufacturing lines - Processes using multiple types of screws - Processes requiring complex screw tightening patterns - Processes experiencing quality defects or safety issues due to forgotten screw tightening 【Benefits of Implementation】 - Reduces the occurrence of quality defects caused by forgotten screw tightening, contributing to improved product quality. - Alleviates the burden on workers and achieves improved work efficiency. - Prevents product damage or accidents caused by incorrect screw tightening, contributing to enhanced safety. - Promotes automation and labor-saving in production lines, contributing to cost reduction.

  • others
  • robot

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Industrial Router RX220 with LTE Multi-Carrier Compatible Module

Industrial Router RX220 with LTE Multi-Carrier Compatible Module

Rooster RX220, IoT/M2M remote management service "SunDMS", LTE multi-carrier, supports autonomous connection maintenance function (ASC).

【Rooster RX220 Features】 ■ Equipped with IoT/M2M remote management service "SunDMS" ■ Compact design ■ Supports LTE multi-carrier (NTT Docomo, SoftBank, KDDI, various MVNOs) ■ Redundant configuration (wired line ⇔ mobile line backup, VRRP function) ■ Achieves low power consumption (approximately 0.3W) during sleep mode ■ Extended temperature range (-20 to 60℃), wide DC power supply (DC5 to 27.4V) ■ Realizes long-term stable operation

  • Routers, Switches, and Hubs
  • robot

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Dual SIM Redundant Design 5G Compatible Industrial Router DRX5510

Dual SIM Redundant Design 5G Compatible Industrial Router DRX5510

Redundant design with dual SIM support, backup function, VPN function, vehicle compatibility, extended temperature range (operating temperature -20 to +65℃)

Features ■ 5G compatible ■ Equipped with wireless LAN functionality ■ Dual SIM support for redundancy operation ■ Easy installation with built-in antenna ■ Compatible with various VPN functions ■ Rugged design considering in-vehicle use ■ Achieves long-term stable operation ■ High environmental resistance performance ■ Expected to meet the ★1 security compliance evaluation system for IoT products ■ Equipped with IoT remote management service "SunDMS"

  • Routers, Switches, and Hubs
  • robot

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Goniometer (joint angle measurement sensor)

Goniometer (joint angle measurement sensor)

Wireless 8ch Data Logger + Goniometer

The goniometer features flexible and high-precision angular displacement measurement, making it a versatile angle sensor that can be widely used from industrial applications to measuring human movement. By combining it with our product, the "Wireless 8ch Data Logger," real-time waveform monitoring and data storage on a PC are possible. Furthermore, simultaneous measurement can also be achieved when combined with compact 9-axis wireless motion sensors or wireless EMG loggers. Features: - Precise reproducibility enabling high-precision measurements - Zero temperature drift - Lightweight and flexible mounting feel - High noise resistance - Excellent weather resistance - Long lifespan exceeding 1 million cycles - Low cost

  • Other electronic parts
  • robot

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[Case Study] High-speed automatic sorting of fresh meat and seafood! Also for daily delivered products!!

[Case Study] High-speed automatic sorting of fresh meat and seafood! Also for daily delivered products!!

Products that are difficult to sort mechanically, such as tofu, eggs, and fragile items like pudding, can be sorted!

JA Zen-Noh's A-Coop has adopted the Linisort system as a result of considering automation due to the aging of the DPS (Digital Picking System) that had been used for sorting tasks. They appreciated the feature of Linisort that allows for the sorting of delicate products such as tofu, eggs, and pudding, which are difficult to sort mechanically.

  • Sorting machine
  • robot

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Completely Airless: An Environmentally Friendly Model for High-Speed Automatic Sorting Systems Has Arrived

Completely Airless: An Environmentally Friendly Model for High-Speed Automatic Sorting Systems Has Arrived

Energy-saving and low-noise sorting achieved through electric actuator drive.

＼If you are struggling with the following issues, please consider this／ - Maintenance costs for compressors and air equipment are high - Due to rising electricity costs, you want to reduce the electricity expenses of your equipment ～～～～ Quick Sort EP is a high-speed automatic sorting unit that changes the sorting and branching operations traditionally performed by air cylinders to be driven by electric actuators. Its energy-efficient design achieves reductions in both running costs and maintenance costs. ■ Features of Quick Sort EP - Energy-saving: Reduces power consumption by 34% compared to traditional air cylinder specifications - Low noise: Reduces peak sound pressure level by 8.3% compared to traditional air cylinder specifications - Compressor-less, reducing running costs - Maintenance (inspection) notification function

  • Conveyor
  • Sorting machine
  • robot

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Parallel link robot "Delta Robot": lightweight, lubrication-free

Parallel link robot "Delta Robot": lightweight, lubrication-free

Lightweight design with resin and aluminum, oil-free and maintenance-free.

The "Delta Robot" is an assembly-type parallel link robot based on igus's toothed belt-driven linear actuator. It operates with a lightweight design made of resin and aluminum, and is lubrication-free, oil-free, and maintenance-free. - Lubrication-free, oil-free, maintenance-free - Lightweight structure of resin and aluminum - Transport capacity of 60 picks/min or 30 picks/min - Working range Ø360mm or Ø660mm Individual parts as well as assembled products are available for sale.

  • Transport and handling robots
  • Other industrial robots
  • Assembly robot
  • robot

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Easy-to-install Cartesian robot: Supports large sizes up to 6m, oil-free and grease-free.

Easy-to-install Cartesian robot: Supports large sizes up to 6m, oil-free and grease-free.

Customizable up to 6,000 x 6,000 x 1,500mm, capable of handling up to 10kg. Grease-free and resistant to harsh environments such as water and dust.

The igus Cartesian robot is a gantry robot that uses igus's linear guide "drylin," which operates with resin sliding. It can be freely customized to customer specifications from 1-axis to 3-axis and features high maintenance-free performance with complete oil-free and grease-free operation. ◆ Custom-made to accommodate a maximum size of 6,000 x 6,000 x 1,500 [mm] and a payload of up to 10 kg ◆ Extremely easy to install ◆ Operates in harsh environments such as water and dust with complete oil-free and grease-free design ◆ Allows for free selection from single-axis to multi-axis, with fine customization possible in 10 mm increments Being oil-free makes it resistant to harsh environments like water and dust, and compared to traditional Cartesian robots (gantry robots), it offers many advantages such as easy installation, scalability, and customization in 10 mm increments.

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  • Cartesian Robot
  • Transport and handling robots
  • Power Transmission Equipment
  • robot

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Low-cost lightweight robot "ReBeL"

Low-cost lightweight robot "ReBeL"

A lightweight robot that can be introduced from 1.2 million yen (for a complete 4-axis system). It has a built-in controller and weighs about 8 kg. It enables quick recovery of equipment investment.

ReBeL: The low-cost, high-performance collaborative robot has finally arrived! With flexible robotic arms that have 4 to 6 degrees of freedom, it is suitable for both industrial and service robots. Available at an astonishing price starting from 1.2 million yen (for a 4-axis set), it offers excellent cost-effectiveness, saving you valuable time and costs. Equipped with safe collaborative features, it facilitates smooth cooperation with humans. With a simple plug-and-play design, it can be operational immediately. High performance is achieved through advanced technology and innovative design. Guaranteed by igus's reliability and quality. Experience ReBeL now to enhance productivity in manufacturing and service industries!

  • Company：イグス
  • Price：1 million yen-5 million yen
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  • LCA_PROD_Rebel_on_AGV_MiR_4.png
  • Articulated Robot
  • robot

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Lightweight Robot Travel Axis "7th Axis"

Lightweight Robot Travel Axis "7th Axis"

The 7th axis that expands the possibilities of robots.

The sliding axis using the igus slide table (toothed belt drive type) expands the workspace of collaborative robots by up to four times. This significantly enhances design flexibility. The igus sliding axis can be operated and programmed with the UR teaching pendant. ● Stroke length: 500 to 3,000 mm (can be extended up to 6,000 mm upon request) ● Comes with an adapter kit for easy connection to the energy chain system.

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  • LCA_PROD_Rebel_7th_axis_2-(1).jpg
  • Transport and handling robots
  • robot

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Scalar Robot

Scalar Robot

For assembly tasks with short takt times.

3-axis or 4-axis configuration. Available in three sizes to fit the working area. It comes with a compatible control unit, available in two versions: control cabinet or DIN rail. A typical application of a scara robot is pick and place tasks performed in a laboratory.

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  • SCARA robot 3 DOF _ size M _ 560 mm.jpg
  • SCARA Robot
  • robot

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[Equipment Introduction] Robot Welding Machine

[Equipment Introduction] Robot Welding Machine

The key to the re-force welding process! Leave the welding of iron, SUS, aluminum, and copper to us!

Our robotic welding machines come in two types, which are used according to the processed products. Once the program is set, even operators without technical skills can achieve high-quality and stable welding, contributing to increased productivity. Fiber Laser Welding Robot (manufactured by Trumpf) * Welding methods: Pulse welding, CW welding [Features] Enables welding of thin plates and fine shapes with appropriate welding methods. Welding of copper and aluminum is also possible. Achieves a beautiful finish on the appearance parts. Arc Welding Robot (manufactured by Panasonic) * Welding methods: MAG welding, CO2 welding [Features] High work efficiency with minimal spatter. Once the program is set, operators without technical skills can perform the work. Three arc welding robots are dedicated to mass production. In addition to robotic welding machines, we have various assembly technologies such as argon welding machines, spot welding machines, and riveters. With a wide range of technologies, we have established both mass production lines and prototype/small lot lines, allowing us to respond broadly. *For more details, please feel free to contact us.

  • Contract manufacturing
  • robot

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3-Axis Cylindrical Coordinate Clean Robot SCR3000CS Series

3-Axis Cylindrical Coordinate Clean Robot SCR3000CS Series

It is suitable for wafer transport in semiconductor manufacturing equipment, inspection devices, etc.

The SCR3000CS series of three-axis cylindrical coordinate clean robots for super clean rooms is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. Depending on the equipment layout, you can choose between base type and flange type, and the S-curve acceleration and deceleration control allows for high-speed and high-precision wafer transport. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
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3-Axis Cylindrical Coordinate Clean Robot SCR3100S-PM Series

3-Axis Cylindrical Coordinate Clean Robot SCR3100S-PM Series

By reducing the footprint, the equipment layout can be downsized.

The Super Clean Room 3-Axis Cylindrical Coordinate Clean Robot SCR3100S series is suitable for transporting small-diameter wafers within semiconductor manufacturing equipment and inspection devices, thanks to its reduced footprint, allowing for a more compact equipment layout. You can choose between base type and flange type according to your equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
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2-Axis Cylindrical Coordinate Clean Robot SSCR2090S Series

2-Axis Cylindrical Coordinate Clean Robot SSCR2090S Series

It features an energy-saving design using a full-axis stepping motor.

The SSCR2090S series of super clean room two-axis cylindrical coordinate clean robots is suitable for transporting small-diameter wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, thanks to its reduced footprint and lightweight design, allowing for a more compact equipment layout. Each axis retains the specifications of higher-end models, including encoders, latch-type solenoid valves, and pressure switches with digital displays. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
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3-Axis Cylindrical Coordinate Clean Robot SSCR3115S Series

3-Axis Cylindrical Coordinate Clean Robot SSCR3115S Series

Suitable for small wafer transport, allowing for a compact device layout.

The SSCR3115S series of 3-axis cylindrical coordinate clean robots for super clean rooms is suitable for transporting small-diameter wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, thanks to its reduced footprint and lightweight design, allowing for a more compact equipment layout. It is compatible with the SSCR2090S-PM and can be modified to have a link arm specification or a Z-axis-less specification. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
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3-Axis Cylindrical Coordinate Clean Robot SHR3000 Series

3-Axis Cylindrical Coordinate Clean Robot SHR3000 Series

It is possible to choose between base type and flange type according to the device layout.

The SHR3000 series of 3-axis cylindrical coordinate robots for super clean rooms is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. You can choose between base type and flange type according to the equipment layout. The S-curve acceleration and deceleration control allows for high-speed and high-precision transport of wafers. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
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  • robot

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4-axis cylindrical coordinate clean robot STHR4000 series

4-axis cylindrical coordinate clean robot STHR4000 series

It is suitable for wafer transport and allows for quick wafer exchange.

The STHR4000 series of super clean room 4-axis cylindrical coordinate twin-arm robots is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. The two arms allow for quick wafer exchanges. You can choose between base type and flange type to match the equipment layout. S-curve acceleration and deceleration control enables high-speed and high-precision wafer transport. It is possible to accommodate optimal chucks tailored to the transported objects and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
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4-axis horizontal multi-joint clean robot GCR4000-PM series

4-axis horizontal multi-joint clean robot GCR4000-PM series

Optimal for wafer transport in semiconductor manufacturing equipment and inspection devices compatible with 300mm.

The GCR4000-PM series is a multi-axis type, 4-axis horizontal articulated clean robot suitable for wafer transport within semiconductor manufacturing equipment and inspection devices that accommodate 300mm. It is possible to choose between base type and flange type according to the equipment layout. It can be equipped with optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
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5-axis horizontal multi-joint clean robot GTCR5000-AM series

5-axis horizontal multi-joint clean robot GTCR5000-AM series

While it is a single arm, it maintains the functionality of a twin arm.

The GTCR5000 series is a 5-axis horizontal multi-joint clean robot compatible with 300mm, which ensures the functionality of a twin arm while being a single arm by incorporating a twin chuck. It is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices that accommodate 300mm. Depending on the equipment layout, you can choose between a base type and a flange type. It is possible to accommodate with optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • robot

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4-axis horizontal multi-joint clean robot GCR4280-AM series

4-axis horizontal multi-joint clean robot GCR4280-AM series

Ideal for transporting wafers and other items within semiconductor manufacturing equipment compatible with 300mm and 450mm.

The multi-axis type for super clean rooms, the 4-axis horizontal articulated clean robot GCR4280-AM series, is suitable for transporting wafers, small glass substrates, and other items within semiconductor manufacturing equipment and inspection devices, compatible with 300mm and 450mm sizes. You can choose between base type and flange type according to the equipment layout. It is possible to accommodate optimal chucks tailored to the items being transported and the equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
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3-Axis Cylindrical Coordinate Vacuum-Compatible Clean Robot LVHR3000 Series

3-Axis Cylindrical Coordinate Vacuum-Compatible Clean Robot LVHR3000 Series

The S-shaped acceleration and deceleration control enables high-speed and high-precision transport of glass substrates.

The LVHR3000 series vacuum-compatible clean robot with a 3-axis cylindrical coordinate system, designed for glass substrates, is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. It transports glass substrates at high speed and high precision through S-curve acceleration and deceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
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STCR4160SN (Closed Loop Control)

STCR4160SN (Closed Loop Control)

●Closed-loop control ●Equipped with absolute encoder ●Achieves battery-less operation

This is a 4-axis cylindrical coordinate clean robot designed for super clean rooms. It is a new type of twin-arm robot compatible with 2-inch to 300mm wafers, achieving low cost, high-speed transport, and no loss of steps. It employs closed-loop control that does not lose steps even under rapid load fluctuations or sudden acceleration, further enhancing the robot's reliability. By incorporating an absolute encoder, it can grasp its current position and reduce the time required for operation after returning to the origin. It is equipped with a mechanical multi-turn absolute sensor that does not require a battery. It is compatible with conventional models (mounting compatibility and performance compatibility), allowing for easy replacement. The high rigidity arm has a third joint equivalent to 3 kgf (including wrist block, chuck, and workpiece). Arm variations include: 100mm, 130mm, 160mm, and 200mm. Depending on the device layout, it is possible to choose the mounting method for base type or flange type devices. A Bernoulli chuck can be installed (optional).

  • Other semiconductor manufacturing equipment
  • robot

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TSVCR3060N (2-inch wafer transport)

TSVCR3060N (2-inch wafer transport)

It contributes to the miniaturization of vacuum transfer chambers.

Industry's smallest class, enabling miniaturization of equipment. Our standard vacuum robot: 65% footprint (φ95mm), 75% reduction in volume. Arbitrary reach distance can be set by combining arms.

  • Other semiconductor manufacturing equipment
  • robot

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Petri dish transport robot

Petri dish transport robot

Transportable in sterile rooms and clean environments such as medical and bio-related facilities.

Transport is possible in sterile rooms and clean environments such as medical and bio-related facilities. Microplate transport is also possible. The tilt mechanism allows for the tilting of petri dishes, enabling the suction of culture media and other liquids. Transport units can be attached to our various robots (this specification is designed for mounting on horizontal multi-joint robots).

  • Other semiconductor manufacturing equipment
  • robot

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STWHR4156 (Waterproof compatible)

STWHR4156 (Waterproof compatible)

This is the STWHR4156 series of waterproof 4-axis cylindrical coordinate robots.

It can transport wafers in environments where water is present or in wet conditions. It is capable of transporting wafers in environments where people cannot enter and touch the wafers due to chemicals. It is suitable for transporting wafers in acidic and alkaline mist atmospheres during the LSI manufacturing process. The arm section ensures corrosion resistance with a Teflon coating. The arm joint section uses a V-seal for waterproofing. The joints of the components are sealed with a Viton packing. The Z-axis section can also accommodate a bellows for waterproofing. The adoption of a twin arm reduces wafer exchange time. It is equipped with an operation monitor. Control method: RS232C and parallel photo I/O. All axes use two-phase stepping motors. The S-curve acceleration and deceleration control allows for high-speed and high-precision wafer transport. Wafer holding methods include vacuum suction, drop-in, and edge grip chucks. It can accommodate optimal chucks tailored to the transported items and equipment layout.

  • Other semiconductor manufacturing equipment
  • robot

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GCR4210SN (Closed Loop Control)

GCR4210SN (Closed Loop Control)

- Closed-loop control - Equipped with absolute encoder - Achieves battery-less operation

This is a four-axis horizontal multi-joint clean robot for super clean rooms that supports wafer sizes from 2 inches to 300 mm, achieving low cost, high-speed transport, and no loss of synchronization. It can transport to parallel-arranged cassettes without a travel axis. The chuck moves linearly relative to the cassette, allowing for transport using edge grip and corner substrate transport without a travel axis. It is compatible with various wafer sizes. It employs closed-loop control that does not lose synchronization even under rapid load fluctuations or sudden acceleration, further enhancing the robot's reliability. Equipped with an absolute encoder, it can determine its current position and reduce the time required for operation after returning to the origin. It features a mechanical multi-turn absolute sensor that does not require a battery. It is compatible with conventional machines (mounting compatibility and performance compatibility), allowing for easy replacement. The robot can handle two FOUPs on its own. Depending on the equipment layout, it is possible to choose a fixation method for either base type or flange type. A Bernoulli chuck can be installed (optional).

  • Other semiconductor manufacturing equipment
  • robot

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