3D Plasma Simulation Software "Particle-PLUS"
"Particle-PLUS" is a plasma and rarefied fluid analysis software that uses the particle method.
"Particle-PLUS" is a simulation software suitable for research, development, and manufacturing of devices and materials using plasma. - It specializes in low-pressure plasma analysis. - It is capable of advanced physical model analysis such as CCP and external circuit models. - It excels in plasma simulation for low-pressure gases, where fluid modeling is challenging. - It supports 2D (two-dimensional) and 3D (three-dimensional) analyses, efficiently handling complex models. - As a strength of our in-house developed software, it can perform CCP and magnetron sputtering calculations with standard functions, and customization to fit customer equipment is also possible. ◆ Supports various cases ◆ - Magnetron sputtering - PVD, plasma CVD - Capacitively coupled plasma (CCP) - Dielectric barrier discharge (DBD) - Electrophoresis, etc. ◆ Outputs various calculation results ◆ - Potential distribution - Electron and ion density distribution/temperature distribution/generation distribution - Particle flux and energy flux to the wall - Energy spectrum of electrons and ions at the wall - Neutral gas density distribution/temperature distribution/velocity distribution, etc. *Please feel free to contact us for more details.
- Company:ウェーブフロント 本社
- Price:1 million yen-5 million yen