Tabletop Macro-Micro Inspection Device 'SYAR120'
8-inch wafer compatible! Macro-micro inspection device equipped with a transmissive mapping sensor.
The "SYAR120" is a microscope macro-micro inspection device compatible with 8-inch TAIKO wafers, incorporating a tabletop robot, aligner, and macro unit. After removing the designated wafer from the cassette, it is transported to the macro unit for observation of both sides. Arbitrary coordinate control is possible via a joystick. It is equipped with an anti-static PVC cover and various interlocks. 【Features】 - Supplies to the microscope XY stage after centering and alignment positioning with the aligner - Equipped with a transmissive mapping sensor - Arbitrary coordinate control possible via joystick - Equipped with an anti-static PVC cover and various interlocks *For more details, please refer to the PDF document or feel free to contact us.
- Company:アテル
- Price:Other