アテル List of Products and Services

The "GA2000 Series" centers the wafer using a PEEK resin clamp that grips the outer circumference of the wafer. It uses a 2-phase stepping motor. By adopting an extremely simple structure, significant reductions in manufacturing costs are possible. Additionally, it supports 4-inch wafers. If you have any inquiries about this product, please feel free to consult Ateru Co., Ltd. 【Features】 ■ RS232C communication control ■ Uses a 2-phase stepping motor ■ Supports 4-inch wafers ■ Significant reductions in manufacturing costs possible due to the extremely simple structure ■ Notch positioning grips the outer circumference of the wafer and positions it using a light sensor *For more details, please refer to the PDF materials or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines

The "AA2000 Series" centers the wafer using a clamp made of polyacetal resin that grips the outer circumference of the wafer. It features a compact, clean body that enhances cleanliness. It supports RS232C communication control or I/O control. Additionally, it is compatible with 5, 6, and 8-inch wafers. For inquiries about this product, please feel free to contact Ateru Corporation. 【Features】 ■ Wafer centering: Grips the outer circumference of the wafer with a polyacetal resin clamp ■ Notch positioning: Adsorbs with a spindle and positions using a light sensor ■ Compact, clean body that enhances cleanliness ■ RS232C communication control or I/O control ■ Uses a 2-phase stepping motor *For more details, please refer to the PDF materials or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines

The "PR2000 Series" is a link-type single-arm clean robot that achieves manufacturing cost reduction by increasing the sheet metal ratio and simplifying the structure compared to our conventional products. It features a 2-phase stepping motor for all axes and is equipped with various sensors. If you are looking for a link-type single-arm clean robot, please feel free to consult us. 【Features】 ■ 2-phase stepping motor for all axes ■ Equipped with various sensors ■ Chuck: Ceramic chuck (vacuum suction type) option *For more details, please refer to the PDF materials or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The "PR1000 Series" is a link-type single-arm clean robot that can rotate 180 degrees driven by a stepping motor. It features a 2P stepping motor for all axes. It has a special I-type chuck made of a laminated structure of aluminum and stainless steel. Additionally, the rotating axis is equipped with a home position sensor, a motor stall detection sensor, and a 180-degree position sensor. 【Features】 ■ The hand can rotate 180 degrees driven by a stepping motor ■ Special I-type chuck made of a laminated structure of aluminum and stainless steel ■ The rotating axis is equipped with a home position sensor, a motor stall detection sensor, and a 180-degree position sensor *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

This product is an automatic visual inspection device that automatically detects registered types of defects from images captured in the inspection section. It transports the wafer without making contact with the central part using an edge grip hand. Defect detection targets both sides of the wafer. The automatic transport unit carries the wafer to the XY stage of the inspection section, captures images of the entire surface, then flips it over to capture images of the other side. 【Features of the Automatic Visual Inspection Device】 ■ Compatible with 8-inch wafers ■ Detected defects are displayed on the wafer map with their locations ■ Data can be saved and linked to higher-level systems with arbitrary operations ■ Equipped with a double-arm robot, aligner, flipping unit, automatic imaging unit, and control equipment (including basic transfer software) ■ Transports wafers without making contact with the central part using an edge grip hand *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Contract manufacturing

This product is designed to integrate with defect data from other inspection systems, automatically capturing images at specified coordinates and saving or sending them to other systems. The automatic transport unit conveys the wafer to the XY stage of the review unit. It can automatically capture images at specified coordinates of received defect data at high magnification (100x, 150x). 【Features】 ■ Supports 8-inch wafers ■ Automatically captures images at specified coordinates and saves or sends them to other systems ■ The automatic transport unit conveys the wafer to the XY stage of the review unit ■ Capable of automatically capturing images at specified coordinates of received defect data at high magnification (100x, 150x) *For more details, please refer to the PDF document or feel free to contact us.

• Contract manufacturing
• Other inspection equipment and devices

This product is a device equipped with laser marking and marker counting functions for macro-micro inspection systems. The macro unit, micro unit, and laser marking chamber are supplied with wafers automatically by a transport unit. It allows for macro visual observation and micro microscopic observation, and can perform automatic laser marking at specified coordinates in conjunction with a higher-level system. 【Features】 ■ Compatible with 6 and 8-inch wafers ■ Equipped with laser marking and marker counting functions ■ Capable of macro visual observation and micro microscopic observation ■ The macro unit, micro unit, and laser marking chamber are automatically supplied with wafers by a transport unit ■ Can perform automatic laser marking at specified coordinates in conjunction with a higher-level system *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Contract manufacturing

This product is a device equipped with a cassette stage with 4 ports and a sorting function based on wafer ID reading. It is capable of splitting from 1 cassette to 3 cassettes and integrating from 3 cassettes to 1 cassette. It can be linked with factory systems to select transfer patterns for each lot. 【Features】 ■ Compatible with 6 and 8-inch wafers ■ Equipped with a sorting function based on wafer ID reading ■ Capable of splitting from 1 cassette to 3 cassettes and integrating from 3 cassettes to 1 cassette ■ Can be linked with factory systems to select transfer patterns for each lot *For more details, please refer to the PDF materials or feel free to contact us.

• Contract manufacturing
• Other inspection equipment and devices

This product is a device for observing the appearance of wafers through visual inspection and microscopy. It can transport and observe the wafer without contacting the central part, thanks to the edge grip hand. In the macro unit, both sides of the wafer can be observed at any angle. In the micro unit, the electric XY stage moves to pre-registered coordinates, allowing multiple specified coordinates to be observed continuously with just one trigger button. 【Features】 ■ Compatible with 8-inch wafers ■ Transport and observe without contacting the central part of the wafer using the edge grip hand ■ Macro unit: capable of observing both sides of the wafer at any angle ■ Micro unit ・Electric XY stage moves to pre-registered coordinates ・Multiple specified coordinates can be observed continuously with just one trigger button *For more details, please refer to the PDF document or feel free to contact us.

• Contract manufacturing
• Other inspection equipment and devices

This product is a device that can add automatic transport functionality to various standalone wafer measurement instruments. It can transport wafers without contacting the central part of the wafer using an edge grip hand. It can also transport wafers with warpage up to 2mm and can flip the wafer to transport both sides. Additionally, it can be linked with a measurement system as a higher-level system. 【Features】 ■ Compatible with 8-inch wafers ■ Can add automatic transport functionality to various standalone wafer measurement instruments ■ Can transport wafers without contacting the central part using an edge grip hand ■ Can transport wafers with warpage up to 2mm and flip them to transport both sides ■ Can be linked with a measurement system as a higher-level system *For more details, please refer to the PDF document or feel free to contact us.

• Contract manufacturing
• Substrate transport device (loader/unloader)

This product is a compact tabletop device that can add an automatic transport function to existing microscopes. It supplies and retrieves wafers on the microscope stage. The wafer replacement is automatically performed by moving the microscope stage to a designated position. If the microscope has a control system, it can also be linked as a higher-level system. 【Features】 ■ Compatible with 5 and 6-inch wafers ■ Can add an automatic transport function to existing microscopes ■ A device that supplies and retrieves wafers on the microscope stage ■ Wafer replacement is automatically performed by moving the microscope stage to a designated position ■ If the microscope has a control system, it can be linked as a higher-level system (optional) *For more details, please refer to the PDF document or feel free to contact us.

• Contract manufacturing
• Substrate transport device (loader/unloader)

This product is a device that can transfer wafers without contacting the grinding area in the center of the wafer, thanks to the edge grip hand. It is possible to flip the grinding surface from bottom to top or vice versa. The cassette is compatible with both standard pitch cassettes and double pitch cassettes, allowing for interchangeability between them. 【Features】 ■ Compatible with 8-inch Tyco wafers ■ Capable of flipping the grinding surface from bottom to top or vice versa ■ Supports both standard pitch cassettes and double pitch cassettes ■ Interchangeable between each other ■ Can transfer wafers without contacting the grinding area in the center of the wafer due to the edge grip hand *For more details, please refer to the PDF document or feel free to contact us.

• Contract manufacturing
• Other inspection equipment and devices

This product is a device that accelerates a 4-port sorter and improves throughput. All cassette stages have lifting functions, and sorting is performed by two robots for retrieval and storage. Additionally, it is capable of splitting from one cassette to three cassettes and integrating from three cassettes to one cassette. It can be linked with factory systems to select transfer patterns for each lot. 【Features】 ■ Compatible with 6 and 8-inch wafers ■ All cassette stages have lifting functions ■ Sorting is performed by two robots for retrieval and storage ■ Capable of splitting from one cassette to three cassettes and integrating from three cassettes to one cassette ■ Can be linked with factory systems to select transfer patterns for each lot *For more details, please refer to the PDF document or feel free to contact us.

• Contract manufacturing
• Other inspection equipment and devices

This product is a device that can accommodate both standard pitch cassettes and double pitch cassettes, allowing for interchange between them. The basic transfer patterns include options for same slot transfer, inverted slot transfer, and designated slot transfer. Additionally, as an option, it is possible to equip a slot designation recipe and a wafer ID reader. 【Features】 ■ Compatible with 6.8-inch SEMI standard wafers ■ Supports both standard pitch cassettes and double pitch cassettes ■ Allows for interchange between them ■ Optionally equipped with a slot designation recipe and a wafer ID reader *For more details, please refer to the PDF document or feel free to contact us.

• Wafer
• Contract manufacturing
• Other inspection equipment and devices

Our company is a manufacturer of various multifunction devices, including inspection systems, development, design, and production. To meet our customers' needs in detail, we conduct thorough discussions and carry out design and manufacturing. Additionally, it is possible to reuse existing equipment to create new devices. We would like to introduce a case of custom order production. We received an inquiry stating that the desired visual inspection device was too complex to be manufactured by other companies. Using our custom order service, we leveraged our years of experience and newly developed software to produce a device that met the specifications requested. [Features] ■ Issue: The desired visual inspection device is too complex to be manufactured by other companies. ■ Production: Utilizing years of experience and newly developed software to create a device that meets the specifications requested. *For more details, please refer to the PDF document or feel free to contact us.

• Contract manufacturing
• Inspection robot

Our company is a manufacturer of various multifunction devices, including inspection, development, design, and production. To closely meet our customers' requests, we conduct thorough meetings and carry out design and manufacturing. Additionally, it is possible to reuse items that customers already have and transform them into new devices. We would like to introduce a case of custom order production. Using tweezers, wafers are manually transported, but they often get damaged. Therefore, we received a request to stabilize quality and improve the working environment. With our custom order, we produced an easy-to-handle, cost-effective automatic transport inspection device. [Features] ■ Request: Stabilize quality and improve the working environment ■ Production: Easy-to-handle, cost-effective automatic transport inspection device *For more details, please refer to the PDF document or feel free to contact us.

• Contract manufacturing
• Other conveying machines

Our company is a manufacturer of various multifunction devices, including inspection, development, design, and production. To meet our customers' requests in detail, we conduct thorough meetings and carry out design and manufacturing. Additionally, it is possible to reuse items that customers already have and transform them into new devices. We would like to introduce a case of custom order production. We received a request to create a device that allows for visual observation by reusing a microscope owned by the customer. Through our custom order service, we extracted only the necessary functions and produced a new device. [Features] ■ Request: To create a device that allows for visual observation by reusing a microscope owned by the customer. ■ Production: A new device that extracts only the necessary functions. *For more details, please refer to the PDF document or feel free to contact us.

• Inspection robot
• Contract manufacturing

Our company is a manufacturer of various multifunction devices, including inspection, development, design, and production. To meet our customers' needs in detail, we conduct thorough meetings and carry out design and manufacturing. Additionally, it is possible to reuse existing equipment and transform it into new devices. Here, we introduce a case of custom order production. We received a request to conduct microscope inspections as quickly and as frequently as possible. With our custom order, we created a special robot and controller. [Features] ■ Request: To conduct microscope inspections as quickly and as frequently as possible ■ Production: Special robot and controller *For more details, please refer to the PDF document or feel free to contact us.

• Inspection robot
• Contract manufacturing

Many companies are facing the necessity of automating inspections. In the past, product quality was ensured by many people and many inspectors. However, it has become difficult to rely on manual labor. Our company has been working for many years on automating macro inspection devices and microscopic observations that were previously done by human eyes. Depending on the type of defects or abnormalities, we can respond immediately. We can also detect difficult defects, such as cracks on the back side of the background wafer or needle marks and scratches on aluminum grains. Please feel free to consult with us. 【Benefits】 ■ High cost performance ■ Easy to handle ■ Easy to accelerate *For more details, please refer to the PDF document or feel free to contact us.

• Automatic sorting machine
• Inspection robot

Devices used in power devices and MEMS are all special types. Many of them are difficult to handle and involve various challenging sensing capabilities. Our company believes that "ensuring the reliable transport of these special wafers is our mission." It is a given that we do not break them, and we have developed various units that can meet special requests such as "handling only around the wafer." Therefore, we confidently assert that we can handle difficult and special wafers, including Taiko wafers, thin wafers of 80μm or less, wafers that are warped by more than 15mm, SiC wafers, and quartz wafers. 【Supported Special Wafers】 ■ Taiko wafers ■ Thin wafers of 80μm or less ■ Wafers warped by more than 15mm ■ SiC wafers ■ Quartz wafers *For more details, please refer to the PDF materials or feel free to contact us.

• Other conveying machines
• Other polymer materials

The "SSR1160+S2244-S001" is a system consisting of a link-type single-arm robot and a slider. It is equipped with a control line for the clamp hand. It clamps the front and rear end faces to hold the substrate. It is equipped with a two-phase pulse motor with an encoder on all axes. 【Features】 ■ Substrate holding: clamps the front and rear end faces ■ Equipped with a two-phase pulse motor with an encoder on all axes ■ Equipped with various sensors ■ RS232C control or parallel I/O control *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The "WR2154-300" is a waterproof double-arm clean robot. The arm section above the mounting flange complies with the IP64 standard. The hand section is equipped with a transmissive mapping sensor capable of vertical/horizontal operation. Additionally, it can accommodate rotary and clamp units. 【Features】 ■ Arm section: Teflon-coated, high-rigidity arm specification ■ Capable of mounting rotary and clamp units ■ Wafer holding: Vacuum suction using ceramic chucks ■ Equipped with a two-phase pulse motor with encoder ■ Control: RS232C communication control or parallel I/O control *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The "EV2250" is a parallel link single-arm clean robot that uses a contact sealing method for its vacuum seal. The arm section has been treated with Alpicca. In addition to being equipped with a two-phase pulse motor with an encoder, it supports RS232C communication control and parallel I/O control. 【Features】 ■ Heat-resistant use: Installation of a reflector (thermal reflective plate) on the arm ■ Arm section treated with Alpicca ■ Equipped with a two-phase pulse motor with an encoder ■ RS232C communication control ■ Parallel I/O control *For more details, please refer to the PDF materials or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The "SV1240" is a single-arm clean robot that employs a magnetic fluid seal and a metal bellows method for its vacuum seal. By reducing the number of conventional aluminum structural components, further manufacturing cost reductions have been achieved. It uses a belt link system with a timing belt for arm drive. 【Features】 ■ Equipped with a 2-phase pulse motor with an encoder ■ RS232C communication control ■ Parallel I/O control ■ Adopts a magnetic fluid seal and metal bellows method for the vacuum seal ■ Belt link system using a timing belt for arm drive *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The "SR2160-310" is a link-type double-arm clean robot equipped with an inversion unit and a mapping unit. To address issues with wet wafers, the lower inversion axis is capable of vacuum suction for wet wafers. To prevent water from entering the robot's drive components, water catchers have been installed in both the arm drive unit and the main body drive unit. 【Features】 ■ Includes inversion unit and mapping unit ■ Water catchers installed in arm drive unit and main body drive unit ■ Special ceramic chuck included (optional) ■ Positioning sensor included (optional) *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The SR1160-310 is a link-type single-arm clean robot with a hand that can rotate 180°. The hand section comes with a rotary unit. It can accommodate other wafer size hands by replacing the mounting block. As an option, various sensors for positioning and air pressure confirmation are available. 【Features】 ■ Hand: KUMADE FORK KMWF-12SF ■ The hand section includes a rotary unit ■ Various sensors included (positioning, air pressure confirmation) *optional ■ All axes are equipped with 2P stepping motors ■ Hand can rotate 180° *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The PR2111-60 is a link-type double-arm clean robot equipped with various sensors. By increasing the sheet metal ratio and simplifying the structure compared to our conventional products, we achieve a reduction in manufacturing costs. It is equipped with a vacuum suction type ceramic chuck. 【Features】 ■ All axes use 2-phase stepping motors ■ Chuck: Ceramic chuck (vacuum suction type) optional ■ Equipped with various sensors ■ Reduction in manufacturing costs by increasing the sheet metal ratio and simplifying the structure *For more details, please refer to the PDF materials or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The "PR1111-200" is a link-type single-arm clean robot with a specification of 2P stepping motors for all axes. The hand can be rotated 180 degrees by a stepping motor drive. The rotation axis is equipped with a home position sensor, a motor stall detection sensor, and a 180-degree position sensor. 【Features】 ■ 2P stepping motor specification for all axes ■ The rotation axis is equipped with a home position sensor, a motor stall detection sensor, and a 180-degree position sensor ■ Chuck: Special I-type chuck made of a laminated structure of aluminum and stainless steel *For more details, please refer to the PDF materials or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The "HR1400-720" is a linear single-arm clean robot equipped with an AC servo motor of the absolute encoder type for all axes. The motor can be equipped with a reduction gear. Control methods can be selected from RS232C, I/O, and Ethernet. 【Features】 ■ Equipped with various sensors ■ Controller is 5-axis specification ■ Control method: RS232C ■ I/O and Ethernet can be selected ■ Equipped with an AC servo motor of the absolute encoder type for all axes *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The "LR31000-600" is a compact body, long-stroke direct-drive double-arm clean robot. With a high-rigidity design, it transports third-generation glass substrates at high speed. It is designed for easy docking with the lateral slide axis. The slide axis is equipped with an incremental encoder and can be controlled by a servo motor. 【Features】 ■ Compact body, long stroke ■ Easy docking with the lateral slide axis ■ Slide axis: Incremental encoder specification, controllable by servo motor ■ Equipped with a two-phase pulse motor with encoder *For more details, please refer to the PDF materials or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The "HR71000-1500" is a direct drive double-arm clean robot compatible with third-generation glass substrate transport. Both the arms and the vertical axis can achieve long strokes. It vacuum-suctions the backside of the substrate. The arms are equipped with stepping motors, while the pivoting vertical axis uses servo motors. 【Features】 ■ Dedicated command control via RS232C ■ Equipped with various sensors ■ Substrate holding: Vacuum suction on the backside of the substrate ■ Arms: Stepping motor specification for pivoting ■ Vertical axis: Servo motor specification *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The "HR81315-1900" is a linear double-arm clean robot equipped with an all-axis ABS encoder AC servo motor. It transports glass substrates at high speed due to its high rigidity design. It holds the glass substrates by attaching anti-slip pads to the top surface of the CFRP fork. Additionally, it features a CFRP fork that is heat-resistant up to 250°C. 【Features】 ■ Equipped with various sensors ■ All-axis ABS encoder AC servo motor specification ■ Dedicated command control via RS232C ■ Substrate holding: Glass substrates are held by attaching anti-slip pads to the top surface of the CFRP fork ■ Fork: 250°C heat-resistant CFRP fork *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The "AR2300-220" is a tabletop wafer transport device equipped with functions similar to conventional clean robots. It adopts a unique compact and lightweight multi-stage slide mechanism for the transport arm. By reducing the weight of the rotation and vertical axes, it achieves a simple structure with a mass of less than one-third compared to conventional models. 【Features】 ■ Achieves a mass of less than one-third compared to conventional models ■ Cleanliness measures: unique structure that sucks air from the side of the lower cover ■ Achieves low power consumption of less than 100W ■ Dedicated command control via RS232C ■ Equipped with a two-phase pulse motor with an encoder *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The AR1300-220 is an ultra-compact, lightweight tabletop single-arm clean robot. It can build a tabletop system for transporting conventional sorters and inspection devices. To reduce the size of the controller, the motor driver can be stored in the bottom of the robot. 【Features】 ■ The motor driver can be stored in the bottom of the robot ■ Significantly contributes to the reduction of CO2 emissions during operation ■ Board holding: Wafer is vacuum suctioned ■ Equipped with various sensors ■ Equipped with a two-phase pulse motor with an encoder ■ Dedicated command control via RS232C *For more details, please refer to the PDF materials or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines
• Transport and handling robots

The "GA2400" is an edge grip specification aligner that holds the wafer's outer circumference with a PEEK resin clamp. It grips the wafer's outer circumference and allows for positioning using a light sensor. By adopting an extremely simple structure, manufacturing costs can be significantly reduced. Additionally, it uses a 2-phase stepping motor. 【Features】 ■ Wafer centering: Grips the wafer's outer circumference with a PEEK resin clamp ■ Notch positioning: Grips the wafer's outer circumference and allows for positioning using a light sensor ■ Uses a 2-phase stepping motor ■ RS232C communication control *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines

The AA2568 is an aligner compatible with 5, 6, and 8-inch wafers. Wafer centering is achieved by clamping the wafer's outer circumference with a polyacetal resin clamp. It allows for suction via a spindle and positioning using a light sensor. It uses a 2-phase stepping motor. 【Features】 ■ Wafer centering: Clamping the wafer's outer circumference with a polyacetal resin clamp ■ Notch positioning: Suction via spindle and positioning using a light sensor ■ Compact and clean body for improved cleanliness ■ RS232C communication control or I/O control *For more details, please refer to the PDF materials or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines

The "SYAR110" is a sorting device that incorporates a tabletop robot, an aligner, and a cassette stage. It can extract wafers from a cassette, center them with the aligner, and then transfer them to another cassette. Additionally, it is equipped with an anti-static PVC cover and various interlocks. 【Features】 ■ Pattern selection for transfer is possible through recipe selection on the computer screen ■ Equipped with fiber sensors ■ Equipped with an anti-static PVC cover and various interlocks *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines

The "SYAR100" is a sorting device that incorporates a tabletop robot and a cassette stage. It can transfer wafers from one cassette to another, and it allows for the selection of transfer patterns through recipe selection on a computer screen. It is equipped with an anti-static resin cover and an emergency stop switch. 【Features】 ■ Capable of transferring wafers from one cassette to another ■ Equipped with mapping sensors ■ Anti-static resin cover and emergency stop switch included ■ Controlled via a computer using dedicated software *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Other conveying machines

The "SYAR112" is a microscope loader device consisting of a tabletop robot, an aligner, and a microscope XY stage. After extracting a designated wafer from the cassette, it centers and positions the notch or orientation flat using the aligner, and supplies it to the microscope XY stage. Additionally, it can record and store observation points and inspection results. 【Features】 ■ Macro observation of the wafer surface on the microscope XY stage ■ Equipped with a transmission mapping sensor ■ Arbitrary coordinate control via joystick ■ Acrylic cover and various interlocks included ■ Capable of recording and storing observation points and inspection results *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Substrate transport device (loader/unloader)

The "SYAR110" is a microscope loader device consisting of a tabletop robot and an illumination observation unit, along with a microscope stage. The illumination observation unit allows for macro observation of the wafer surface. It accommodates various wafers, starting with large GaAs wafers ranging from 2 to 4 inches. 【Features】 ■ Extracts wafers from the cassette and supplies them to the microscope stage ■ Supports various wafers, including large GaAs wafers ranging from 2 to 4 inches ■ Equipped with a laser-type mapping sensor ■ Features a PVC cover and various interlocks *For more details, please refer to the PDF materials or feel free to contact us.

• Other inspection equipment and devices
• Substrate transport device (loader/unloader)

The "SYAR120" is a microscope macro-micro inspection device compatible with 8-inch TAIKO wafers, incorporating a tabletop robot, aligner, and macro unit. After removing the designated wafer from the cassette, it is transported to the macro unit for observation of both sides. Arbitrary coordinate control is possible via a joystick. It is equipped with an anti-static PVC cover and various interlocks. 【Features】 - Supplies to the microscope XY stage after centering and alignment positioning with the aligner - Equipped with a transmissive mapping sensor - Arbitrary coordinate control possible via joystick - Equipped with an anti-static PVC cover and various interlocks *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices
• Inspection robot

This catalog is the product catalog of Ateru Co., Ltd., a specialized group in the development of clean transport equipment that achieves ultra-compact size and low power consumption. It features a wide range of products, including tabletop clean transport devices, semiconductor transport robots, waterproof robots, vacuum-compatible robots, and LCD transport robots. 【Featured Products】 ■ Tabletop Microscope Loader ・SYAR110 ・SYAR112 ■ Tabletop Sorter ・SYAR100 ・SYAR110 ■ Tabletop Macro-Micro Inspection Device ・SYAR120, etc. *For more details, please download the PDF or feel free to contact us.

• Laser microscope
• Inspection robot
• Transport and handling robots