ジェーイーエル List of Products and Services

The 6-inch sorter system reduces the width direction to 50% of the inline type by arranging two cassettes in two tiers (a total of four). It is equipped with a multi-axis GCR and a glass-compatible aligner SAL3361GR. By incorporating the multi-axis GCR type, parallel arrangement of cassettes can be achieved solely by the robot. The glass-compatible aligner can position transparent, translucent, and silicone materials for centering and oleo-fluorolocation quickly and with high precision. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The sorter system complies with SEMI Standards (E15.1-0600, E57-0600, E62-0999, E63-0600, E64-0600). It features a buffer function in the aligner, enabling wafer exchange and achieving high throughput. With the built-in ID reader, it is possible to read the wafer ID (front and back support is optional). For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The 342mm Susceptor-Compatible Vacuum Aligner SVAL30D1 series enables high-speed and high-precision positioning of susceptors (such as compound semiconductors and silicon wafers) in a vacuum environment using a gripping method. By placing the positioning sensor in the vacuum environment, installation can be completed with just the main unit, increasing the design flexibility of the equipment. For more details, please contact us or refer to the catalog.

• Transport and handling robots
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The SAL30C1 series optical aligner compatible with 300mm is designed for transporting wafers that require positioning within semiconductor manufacturing equipment and inspection devices. It achieves high-speed and high-precision centering and notching of silicon wafers, enabling alignment of thin wafers. It supports thin, warped, and film-coated wafers, but please inquire about work detection capabilities and positioning accuracy. Alignment is possible while minimizing wafer damage through the Bernoulli method. The control methods are RS232C and parallel photo I/O. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The 300mm compatible edge grip aligner SAL20C1 series is designed for transport that requires positioning of wafers in semiconductor manufacturing equipment and inspection devices. By adopting the edge grip method, it minimizes contact with the wafer. After notch searching, a repositioning operation is included to move the notch to the specified position. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The optical aligner SAL4381 series is designed for the positioning of wafers (silicon, GaAs, glass) in semiconductor manufacturing equipment and inspection devices that require precise alignment. It achieves high-speed and high-precision centering and alignment of silicon wafers. A 0.1μm filter is equipped on the spindle side. The control method is via RS232C and parallel photo I/O. Options are available for compatibility with GaAs wafers and glass as well. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The optical aligner SAL3261GR series is designed to support the positioning of wafers in semiconductor manufacturing equipment and inspection devices. It is capable of aligning 2-inch, 3-inch, and 100-150mm wafers. Equipped with sensors that detect the wafer edge, it can align silicon, transparent, translucent glass, gallium arsenide, sapphire wafers, and more. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The SAL2241 series aligner, compatible with 50mm to 100mm wafers, is designed for transporting wafers that require positioning within semiconductor manufacturing equipment and inspection devices. It achieves a compact footprint while accommodating small-diameter wafers. It centers small-diameter wafers and positions orifices and notches with high speed and precision. A 0.1μm filter is equipped on the spindle side. The control method is via RS232C and parallel photo I/O. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The SAL4484 series optical aligner, compatible with 100mm to 200mm, is designed for positioning wafers in semiconductor manufacturing equipment and inspection devices that require precise alignment during transport. It centers silicon wafers and positions the orientation flat and notch quickly and accurately. The control method uses RS232C and parallel photo I/O. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The SAL46C6 series optical aligner, compatible with 150mm to 300mm, is designed for positioning wafers in semiconductor manufacturing equipment and inspection devices. It achieves high-speed and high-precision centering of silicon wafers and positioning of the orientation flats and notches. The control method uses RS232C and parallel photo I/O. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The optical aligner SAL38C2/SAL3361 series is designed to support the positioning of wafers in semiconductor manufacturing equipment and inspection devices that require precise transport. It centers silicon wafers and positions the orientation flat and notch quickly and accurately. It is equipped with a 0.1μm filter on the spindle side, and the control method is RS232C and parallel photo I/O. It achieves approximately 50% reduction in footprint compared to the conventional models SAL46C6 and SAL4484. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The 5-axis vacuum horizontal multi-joint clean robot GTVHR5000 series can accommodate a variety of device layouts. It contributes to the reduction of footprint and vacuum chamber volume, enabling cost reduction in processing through simplified chamber shapes. It allows access to parallel stages, making it ideal for inline layout. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The 4-axis cylindrical coordinate link-type high vacuum compatible clean robot DTVHR4000 series features a link structure that is connected by rolling elements without using metal belts or gears, ensuring long life and high reliability in transportation, with low outgassing and usability in environments ranging from 20°C to 50°C. It has obtained CE certification. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The vacuum-compatible 4-axis cylindrical coordinate clean robot STVCR4000 series can be used for transporting wafers within a vacuum chamber. Compared to the STVHR, it has double the payload capacity and offers excellent cost performance. Additionally, it is compatible with the STVHR for installation, allowing for a smooth transition during replacement. The adoption of a twin-arm design has reduced wafer exchange time. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3330S series has a payload capacity equivalent to 10 kgf at the third joint of the arm (including chuck and work), and can accommodate a maximum allowable bending moment of 25 N·m. Due to its high rigidity and high load capacity, it is capable of transporting trays with wafers and small glass substrates. The adoption of a shuttle-type twin chuck allows for a reduction in work exchange time. The vacuum sealing method uses a magnetic fluid field-through (2-axis type) and a welded bellows (stroke 60 mm), achieving a vacuum level of 1.33×10^-6 Pa. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series can be used for transporting wafers within a vacuum chamber. Compared to the SVHR, it has double the payload capacity and offers excellent cost performance. Additionally, it is compatible with the SVHR for installation, allowing for a smooth transition. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The multi-axis type for super clean rooms, the 4-axis horizontal articulated clean robot GCR4280-AM series, is suitable for transporting wafers, small glass substrates, and other items within semiconductor manufacturing equipment and inspection devices, compatible with 300mm and 450mm sizes. You can choose between base type and flange type according to the equipment layout. It is possible to accommodate optimal chucks tailored to the items being transported and the equipment layout. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The GTCR5000 series is a 5-axis horizontal multi-joint clean robot compatible with 300mm, which ensures the functionality of a twin arm while being a single arm by incorporating a twin chuck. It is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices that accommodate 300mm. Depending on the equipment layout, you can choose between a base type and a flange type. It is possible to accommodate with optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The GCR4000-AM series is a multi-axis type, 4-axis horizontal articulated clean robot suitable for wafer transport in semiconductor manufacturing equipment and inspection devices that accommodate 300mm. You can choose between base type and flange type according to the equipment layout. It is possible to use optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The GCR4000-PM series is a multi-axis type, 4-axis horizontal articulated clean robot suitable for wafer transport within semiconductor manufacturing equipment and inspection devices that accommodate 300mm. It is possible to choose between base type and flange type according to the equipment layout. It can be equipped with optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The MTCR4000 series, compatible with 300mm for super clean rooms, is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with full-axis AC servos, offering superior cost performance compared to conventional MTHR models. You can choose between base type and flange type according to your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The MCR3000C series, compatible with 300mm for super clean rooms, is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with all-axis AC servo, offering superior cost performance compared to conventional MHR models. You can choose between base type and flange type to match your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The waterproof 3-axis cylindrical coordinate robot SWHR3156 series is compatible with 300mm wafers and features a flip + edge grip function. With an IP64 protection rating, it is suitable for wafer transport in acidic and alkaline environments during the LSI manufacturing process. It transports wafers at high speed and high precision through S-curve acceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The STHR4000 series of super clean room 4-axis cylindrical coordinate twin-arm robots is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. The two arms allow for quick wafer exchanges. You can choose between base type and flange type to match the equipment layout. S-curve acceleration and deceleration control enables high-speed and high-precision wafer transport. It is possible to accommodate optimal chucks tailored to the transported objects and equipment layout. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The SHR3000 series of 3-axis cylindrical coordinate robots for super clean rooms is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. You can choose between base type and flange type according to the equipment layout. The S-curve acceleration and deceleration control allows for high-speed and high-precision transport of wafers. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The SSCR3115S series of 3-axis cylindrical coordinate clean robots for super clean rooms is suitable for transporting small-diameter wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, thanks to its reduced footprint and lightweight design, allowing for a more compact equipment layout. It is compatible with the SSCR2090S-PM and can be modified to have a link arm specification or a Z-axis-less specification. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The SSCR2090S series of super clean room two-axis cylindrical coordinate clean robots is suitable for transporting small-diameter wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, thanks to its reduced footprint and lightweight design, allowing for a more compact equipment layout. Each axis retains the specifications of higher-end models, including encoders, latch-type solenoid valves, and pressure switches with digital displays. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The Super Clean Room 3-Axis Cylindrical Coordinate Clean Robot SCR3100S series is suitable for transporting small-diameter wafers within semiconductor manufacturing equipment and inspection devices, thanks to its reduced footprint, allowing for a more compact equipment layout. You can choose between base type and flange type according to your equipment layout. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The Super Clean Room 4-axis cylindrical coordinate clean robot STCR4000S series is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It allows for quick wafer exchanges with its two arms. It has obtained CE marking certification. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

The SCR3000CS series of three-axis cylindrical coordinate clean robots for super clean rooms is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. Depending on the equipment layout, you can choose between base type and flange type, and the S-curve acceleration and deceleration control allows for high-speed and high-precision wafer transport. For more details, please contact us or refer to the catalog.

• Transport and handling robots
• Other industrial robots

In the comprehensive product catalog of JEL, we feature a variety of transport robot products, including cylindrical coordinate clean robots, horizontal multi-joint clean robots, and cylindrical coordinate vacuum-compatible clean robots. The 3-axis cylindrical coordinate clean robot "SCR3000CS" is designed for super clean rooms and is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. You can choose between base type and flange type according to the equipment layout, and it is equipped with an operation monitor. The 4-axis horizontal multi-joint clean robot "GCR4000-PM" is a multi-axis type for super clean rooms. It is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices that accommodate 300 mm wafers, using two-phase stepping motors with absolute encoders on all axes. S-curve acceleration and deceleration control, along with motion trajectory optimization, enable high-speed and high-precision wafer transport. For more details, please contact us or download the catalog.

• Substrate transport device (loader/unloader)
• Transport and handling robots

Since its establishment in 1993, JEL has been a specialized manufacturer of robots for semiconductor wafer transport and LCD glass substrate transport, assisting customers in creating better products. Thanks to this, we have established relationships with over 1,800 customers both domestically and internationally, and our solid track record and high quality are the reasons why "transport robots are JEL." Our company conducts consistent process management in collaboration with production systems, achieving short delivery times. Through our self-developed production system (JOISYS), we centrally manage order information, procurement information, inventory management, process management information, quality control, development information, and product shipment information, enabling rapid information transmission, delivery management, and quality improvement. We have an internal structure that allows us to complete everything from development design to product evaluation in a short period, focusing on the development of products with industry-leading cost performance. Additionally, JEL's greatest strength is its ability to customize. We quickly capture customer needs and respond flexibly with a motto of low-cost and timely manufacturing. For more details, please contact us or download our catalog.

• Transport and handling robots
• Substrate transport device (loader/unloader)

By reducing the footprint, it is suitable for the transport of small-diameter wafers within semiconductor manufacturing equipment and inspection equipment, allowing for a more compact equipment layout.

• Other industrial robots